Lessons Learned and Integration of Gas Supplier for PSM/RMP for Semiconductor Fab

Rouillard, Joel
(Fairchild Semiconductor, South Portland, Maine)

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Fairchild Semiconductor has an OSHA Process Safety Management (PSM) and EPA Risk Management Plan (RMP) for hydrogen chloride gas, trichlorosilane, and hydrogen. Site personnel have been working with the Gas Supplier to ensure compliance with PSM/RMP requirements. The interaction with the Gas Supplier determined what the covered process was, what equipment was included, and whose responsibility it was for compliance for each part of the covered processes. This presentation will also provide reasons why a fab may want to stay out of PSM/RMP if they can control storage amounts below PSM/RMP threshold quantities.

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