Making Equipment Decommissioning & Decontamination a Part of Daily Operations

Maloney, Terence A. (AMD, Sunnyvale, CA)

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There are several circumstances that call for decontamination and decommissioning (D&D) of equipment contaminated with hazardous materials to prevent human or environmental damage. These include the complete shutdown and removal of all equipment from an area, the idling of some or all of the equipment in an area for an extended period of time, the disposal of damaged equipment, the replacement of obsolete equipment, and the transfer of equipment. During wafer fabrication facility closures, safely removing equipment and disposing of it is the primary focus of every individual involved. In other circumstances, the primary focus is always something else. Inherent in addressing equipment shutdown and removal ad hoc is the likelihood that the job will be done poorly or not done at all. It is important, therefore, that semiconductor manufacturing sites have formal procedures in place that ensure the identification of all situations in which D&D is appropriate; that ensure, in those circumstances, the identification of all equipment that might be contaminated with hazardous materials and need D&D; and that ensure proper D&D of all appropriate equipment. This presentation explains the business processes and operational procedures which have been used successfully address these needs at AMD’s Sunnyvale, CA site for more than 10 years.

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