Metal Organic Liquids in R&D: sharing the learning curve

Alain Pardon
(IMEC )

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Metal organic liquids are in use in R&D facilities for over more than a decade. Not only the amounts of materials used in ALD, MOCVD and EPI are increasing but also the variety of alkyl metals in advanced processing is still growing and will grow the following years. Some of these compounds are toxic and highly reactive hence pose serious risks for staff and infrastructure. A dedicated risk assessment method and adequate engineering controls must be in place before using any of these products. This presentation will illustrate the risk assessment methodology that is used taking into account the supply characteristics, process conditions and emergency handling. In this presentation we will also share the learning curve with incidents, engineering controls that worked and did not work.

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