New Materials Introductions for Next Generation Semiconductor Manufacturing: ESH Challenges

Trammell, Steven
(SEMATECH, Albany, NY)

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The semiconductor industry uses a wide variety of chemicals and gasses in manufacturing operations. Control mechanisms are in place to mitigate material hazards, however new and emerging materials, some with unknown properties, are continuously being introduced into research and manufacturing to meet the demands of emerging technologies. This presentation will discuss ESH considerations associated with new material introduction, and will include discussions on areas where knowledge gaps may exist.

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