Overview of SEMI EHS Standards and Safety Guidelines

McLeod, Ian
(SEMI, San Jose, CA)

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The history of SEMI Standards can be characterized by a “solve a common problem” approach: from the founding of the program in the mid-1970’s through the present, our most successful standards have typically been those that were created in response to a current or near-future issue facing a significant segment of the industry. This presentation will illustrate how that approach is reflected in the EHS-related standards and safety guidelines published by the SEMI Standards program, and what we’ve learned from three decades of standards development, and twenty years of development in the EHS area. A brief overview of the EHS-related standards and safety guidelines that are currently available will also be included.

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