PDC 4 – Fundamentals and EHS Challenges of Semiconductor Manufacturing
8am-5pm
Aaron Zude
(Facilities & Safety Solutions)
SESHA 2020 PDC
Fundamentals and EHS Challenges of Semiconductor Manufacturing
Friday, April 17, 8:00 – 5:15
This is an introduction to EHS in semiconductor and high-tech manufacturing intended for both students and professionals that are new to the semiconductor industry and its operations. An experienced semiconductor EHS professional, recognized in his or her area of expertise, will present the topics. This will be a full day PDC.
PDC topics include an overview of:
- Wafer fab operations
- Semiconductor manufacturing processes & hazardous materials used
- Occupational health and safety hazards and controls in a semiconductor fab
- Semiconductor manufacturing environmental considerations
- Product safety and SEMI EHS Standards: S2, S8 and S23
- Semiconductor fab building & fire codes
- Semiconductor tool permitting, installation & commissioning
- Life safety controls & emergency response
Session Outline (as of Feb 25, 2020):
| # | Time | Topic | Presenter | Confirmed |
| 1. | 8:00 – 8:10 | Welcome & Kick Off | Aaron Zude, Facilities & Safety Solutions | Yes |
| 2. | 8:10 – 9:00 | Semiconductor Fab Virtual Tour | John Cox, Advanced Technology Solutions | Yes |
| 3. | 9:00 – 9:15 | Sand to Silicon | U-Tube Video
Global Foundries |
Yes |
| 4. | 9:15 – 10:00 | Semiconductor Tools & Processes | Sue Creighton, Apple | Yes |
| 10:00 – 10:15 | Break | |||
| 5. | 10:15 – 11:00 | Health & Safety Overview | John Cox, Advanced Technology Solutions | Yes |
| 6. | 11:00 – 11:45 | The Chemistry of Semiconductor Gases | Joe Van Gompel, Applied Materials | Yes |
| 11:45 – 12:30 | Lunch | |||
| 7. | 12:30 – 1:00 | Open Roundtable Discussion – Topics of Participant Interest. | All | Yes |
| 8. | 1:00 – 1:45 | Environmental Overview
|
Mike Sherer, Trinity Consultants | Yes |
| 9. | 1:45 – 2:15 | Exhaust Gas Management | Mike Sherer, Trinity Consultants | Yes |
| 10. | 2:15 – 2:45 | Specialty Gas, Chemical Distribution and POU Delivery Systems | Aaron Zude, Facilities & Safety Solutions | Yes |
| 2:45 – 3:00 | Break | |||
| 11. | 3:00 – 3:30 | Tool Permitting, Installation & Commissioning | Aaron Zude, Facilities & Safety Solutions | Yes |
| 12. | 3:30 – 4:00 | Semiconductor Fab Life Safety Systems & Emergency Response | Scott Johnson
Intevac, Inc. |
Yes |
| 13. | 4:00 – 4:30 | Semiconductor Equipment Product Safety Conformance | Intertek | Invited |
| 14. | 4:30 – 5:00 | SESHA/UL EHS Training | Aaron Zude | Yes |
| 15. | 5:00 – 5:15 | Wrap Up & Closing | Aaron Zude | Yes |