PDC 4 – Fundamentals and EHS Challenges of Semiconductor Manufacturing

8am-5pm

Aaron Zude
(Facilities & Safety Solutions)

SESHA 2020 PDC

Fundamentals and EHS Challenges of Semiconductor Manufacturing

Friday, April 17, 8:00 – 5:15

 

This is an introduction to EHS in semiconductor and high-tech manufacturing intended for both students and professionals that are new to the semiconductor industry and its operations. An experienced semiconductor EHS professional, recognized in his or her area of expertise, will present the topics. This will be a full day PDC.

 

PDC topics include an overview of:

  • Wafer fab operations
  • Semiconductor manufacturing processes & hazardous materials used
  • Occupational health and safety hazards and controls in a semiconductor fab
  • Semiconductor manufacturing environmental considerations
  • Product safety and SEMI EHS Standards: S2, S8 and S23
  • Semiconductor fab building & fire codes
  • Semiconductor tool permitting, installation & commissioning
  • Life safety controls & emergency response

 

Session Outline (as of Feb 25, 2020):

# Time Topic Presenter Confirmed
1. 8:00 – 8:10 Welcome & Kick Off Aaron Zude, Facilities & Safety Solutions Yes
2. 8:10 – 9:00 Semiconductor Fab Virtual Tour John Cox, Advanced Technology Solutions Yes
3. 9:00 – 9:15 Sand to Silicon U-Tube Video

Global Foundries

Yes
4. 9:15 – 10:00 Semiconductor Tools & Processes Sue Creighton, Apple Yes
  10:00 – 10:15 Break
5. 10:15 – 11:00 Health & Safety Overview John Cox, Advanced Technology Solutions Yes
6. 11:00 – 11:45 The Chemistry of Semiconductor Gases Joe Van Gompel, Applied Materials Yes
  11:45 – 12:30 Lunch
7. 12:30 – 1:00 Open Roundtable Discussion – Topics of Participant Interest. All Yes
8. 1:00 – 1:45 Environmental Overview

 

Mike Sherer, Trinity Consultants Yes
9. 1:45 – 2:15 Exhaust Gas Management Mike Sherer, Trinity Consultants Yes
10. 2:15 – 2:45 Specialty Gas, Chemical Distribution and POU Delivery Systems Aaron Zude, Facilities & Safety Solutions Yes
  2:45 – 3:00 Break
11. 3:00 – 3:30 Tool Permitting, Installation & Commissioning Aaron Zude, Facilities & Safety Solutions Yes
12. 3:30 – 4:00 Semiconductor Fab Life Safety Systems & Emergency Response Scott Johnson

Intevac, Inc.

Yes
13. 4:00 – 4:30 Semiconductor Equipment Product Safety Conformance Intertek Invited
14. 4:30 – 5:00 SESHA/UL EHS Training Aaron Zude Yes
15. 5:00 – 5:15 Wrap Up & Closing Aaron Zude Yes

 

Back to SESHA 42nd Annual Symposium (2020)

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