PDC – Semiconductor EPA Toxic Release Inventory (TRI) Reporting

Mike Sherer and Jesse Gonzalez
(Trinity Consultants)

EPA Toxic Release Inventory (TRI) reporting for semiconductor operations can be very complicated. Process byproducts created can many times be TRI chemicals. Many TRI audits of semiconductor operations have found that some chemicals were not reported (missed)due to byproducts, low reporting threshold for lead, and misunderstanding of sulfuric acid aerosols and hydrochloric acid aerosols. This PDC will review threshold determinations including byproducts calculations and environmental emissions calculations/reporting. In addition, lessons learned will be presented and example excel spreadsheets for tracking threshold determinations and environmental emissions/reporting.

Back to SESHA Virtual Symposium – This week: Equipment and Product Safety

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