Practical Guide to Toxic and Flammable Gas Detection in the Semiconductor Manufacturing Environment

Hogan, Patrick; Marinelli, Luca
(Zellweger Analytics, Lincolnshire IL)

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Semiconductor facilities utilize some of the most toxic and flammable gases available in significant volumes. The ‘Fab” manufacturing, cleaning and etching processes also generate additional toxic species that need to be detected. Continuous monitoring of multiple areas within a typical facility require certain types of gas detection technology for specific applications. Delegates will gain an interactive summary of all the major types of gas sensing chemistry currently used in the Semiconductor industry including catalytic bead, electrochemical, colorimetric paper tape “Chemcassette”, infra red and other spectroscopic techniques. A comparison of sensitivity, speed of response, relative cost per point and the maintenance requirements for each technology will be summarized. Using a generic Fab process, typical wiring and control systems will be explained in order to provide a full network of functional gas monitors for storage, exhaust, production and even emergency response uses. The session will also explore new areas of innovation associated with the latest trends in wireless sensor technology, distributed power over Ethernet and the implications of emerging certification requirements on the global deployment of life safety sensors.

Back to SESHA 26th Annual Symposium (2004)



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