Semiconductor Facility Source Emissions Measurements – How the New EPA Regulations Might Change Your Upcoming Test Program

Thiry, Craig; Aasland, Judith
(Montrose Environmental Corporation)

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There are many new regulations impacting source testing in the semiconductor industry in various ways. These include the following regulations: • AETB-7036 (Air Emission Testing Body) Source Testing Company Accreditation • QSTI/QSTO (Qualified Source Test Individual/Observer) • PGVP (Protocol Gas Verification Program) • SSAP (Stationary Source Audit Program) • Boiler MACT • Overview/Discussion of Applicable EPA Test Methods to the Semiconductor Industry • Upcoming EPA Method changes including ERT reporting The discussion will include requirements for source testing companies as well as a brief overview of applicable test methods specific to the industry. All of these items provide an synopsis of the trend towards required improvements in data quality.

Back to SESHA 36th Annual Symposium (2014)



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