Semiconductor Industry Environmental Auditing

Mike Sherer
Jesse Gonzalez

Trinity Consultants, Phoenix, Arizona

Environmental auditing of semiconductor wafer fabs and related facilities requires detailed technical knowledge of semiconductor processes, process byproducts, abatement equipment, and materials/chemicals/gases used. In addition, local, state and federal regulations experience is needed to review for compliance and opportunities for improvements. This PDC will review experiences with environmental auditing and examples of items found that will help attendees develop compliance mechanisms at their facilities. The facilitators will provide time for specific questions and discussion.

Back to SESHA 41st Annual Symposium (2019)



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