Semiconductor Industry EPA Greenhouse Gas Emissions Reporting

Mike Sherer
Jesse Gonzalez

Trinity Consultants Inc., Phoenix, Arizona

EPA requires certain semiconductor wafer fabs to file greenhouse gas emissions by March 31 for the proceeding calendar year. These emissions calculations can be complex, therefore detailed knowledge of the regulations, semiconductor processes and point-of-use abatement devices is required to correctly prepare and file emissions electronically to EPA. This includes fluorinated greenhouse gases and nitrous oxide from semiconductor processes and carbon dioxide, nitrous oxide and methane from combustion sources. This course will assist attendees in understanding 40 CFR Part 98 Subparts A, C and I and how to calculate emissions, report emissions, and develop documentation for compliance.

Back to SESHA 39th Annual Symposium (2017)



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