SESHA 2017 Symposium — PDC1

Semiconductor Industry EPA Greenhouse Gas Emissions Reporting

Mike Sherer
Jesse Gonzalez

Trinity Consultants Inc., Phoenix, Arizona

EPA requires certain semiconductor wafer fabs to file greenhouse gas emissions by March 31 for the proceeding calendar year. These emissions calculations can be complex, therefore detailed knowledge of the regulations, semiconductor processes and point-of-use abatement devices is required to correctly prepare and file emissions electronically to EPA. This includes fluorinated greenhouse gases and nitrous oxide from semiconductor processes and carbon dioxide, nitrous oxide and methane from combustion sources. This course will assist attendees in understanding 40 CFR Part 98 Subparts A, C and I and how to calculate emissions, report emissions, and develop documentation for compliance.

SESHA 2017 Symposium Abstract

2017 Semiconductor Market Update and Forecast

Matas, Brian
(Vice President, Market Research of IC Insights, Inc.)

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SESHA 2017 Speaker Biography

Brian Matas
Vice President, Market Research of IC Insights, Inc.

Mr. Matas has worked in the semiconductor industry for more than 30 years. At IC Insights, Mr. Matas specializes in analyzing and forecasting developing trends in the memory, microprocessor, and analog IC markets. Additional responsibilities include monitoring IC trends in automotive and consumer electronics. Prior to helping form IC Insights, he worked several years with Motorola in process engineering and with ICE Corporation in market research analysis. Mr. Matas received his Bachelor’s degree in Physics from Anderson (Indiana) University and a Master’s degree in aeronautical science from Embry-Riddle Aeronautical University. Outside of work, he is an avid cyclist and sings with The Phoenix Symphony Chorus.

Year in Review: Semiconductor Health and Safety

Glass, Eric
(UL EHSS, Franklin, TN)

This highly interactive seminar will examine current BLS (Bureau of Labor Statistics) data to paint a picture on how the overall semiconductor-related NAICS codes performed. It is also a venue where attendee thought leadership will be highly valued by all. During this session, attendees are highly encouraged to share their successes and failures regarding their health and safety performance and learn from others who have deployed and experienced successful results for their organizations.

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SESHA 2017 Speaker Biography

Eric Glass
Senior EHS Advisor UL EHSS, Franklin, TN

See bio info submitted for previous course submitted.

SESHA 2017 Symposium Abstract

An examination of Integrated EHS Management Systems in the Semiconductor Industry

Kruse, Travis; Veltri, Anthony
(Grainger Safety Strategy & Solutions; Oregon State University)

Integrated Management Systems: An examination of organizational strategies employed during the integration of environment, safety & health management systems and lean outcomes of such strategies in the semiconductor industry. Strict environment, safety and health demands from internal and external stakeholders have motivated private sector leaders to adopt environment, safety and health management systems as a way to confront these demands. Moreover, private leaders are being asked to design, implement and continue to improve management systems in a manner that supports lean management principles (i.e., a systematic method for minimizing waste that drives cost). This research was exploratory and confirmatory in design using a mixed-methods (Delphi and case study) approach. Delphi results were derived from responses from a panel of experts which a single integrated ESHMS framework and case study results were derived from an analysis of triangulated evidence from in-depth interviews, observations, internal documents, and short questionnaires and described the organizational strategies employed that supported lean management outcomes.

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SESHA 2017 Speaker Biography

Travis Michael Kruse, CSP, CHMM
Sr. Director, Safety Strategy and Solutions Grainger Safety Strategy & Solutions

Environmental, Health and Safety executive with over 19 years of experience in Corporate EHS, Manufacturing & R&D leadership roles. Credible managerial and technical abilities in the areas of industrial hygiene, environmental, risk management, safety engineering and integrated EHS Management System implementation (ISO 14001/RC 14001 OHSAS 18001). Respected EHS professional in the semiconductor, chemical, distillation, medical device and electronics industries. Member of the Oregon State University Corporate Partners program and an authorized instructor for the OSHA Training Institute. RABQSA lead auditor for ISO 9001, OHSAS 18001 and ISO 14001. Certified Safety Professional (CSP), Class 2 Certified Drinking and Waste Water Operator, Certified Hazardous Materials Manager (CHMM). Travis has spent his career life supporting Intel, Honeywell, Jim Beam, Lam Research and now leads the Safety Strategy & Solutions Team at Grainger based in Lake Forest, IL.

SESHA 2017 Symposium Abstract

Profits and Patchouli: Sustainability as a Core Business Driver

Tetreault, Colin; Tetreault, Colin
(S2 Consulting and ASU School of Sustainability)

Once relegated to EH&S, Sustainable Business has emerged as a driving mechanism to “do well and do good.” Business, policy, and science expert Colin Tetreault will host a collaborative discussion on the role of sustainability in driving organizations forward. Learn how sustainability is not just a part of, but fundamental to the strategy and operation of an organization. You’ll walk away with a lens of sustainability that allows you to drive revenue, mitigate risk, and advance your brand.

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SESHA 2017 Speaker Biography

Colin Tetreault
Principal and Founder S2 Consulting and ASU School of Sustainability

Colin Tetreault is an accomplished sustainability business, policy, and senior scholar practitioner. He drives revenue & sparks innovation, mitigates & manages risk, and advances brands & causes. Colin serves as Principal for S2 Consulting, LLC, an innovation-driven sustainability and management consulting firm. Colin is charged with enabling organizational structure, culture, and operations to be more profitable and sustainability minded through business acumen and scientific rigor. Select clients include PetSmart, Intel, Starbucks, Competitor Group, various cities and SME private businesses. His efforts impact all levels of systems from employees and managers to suppliers and customers.

SESHA 2017 Symposium Abstract

Chemical Supply Chain Panel I

Beu, Laurie; Graunke, Dawn 
((1) Laurie Beu, Laurie S. Beu Consulting, Austin, TX (2) Dawn Graunke, Intel, Chandler, AZ (3) Michael Castorano, Dow, Marlborough, MA)

The European Union’s REACH regulation and the U.S. Environmental Protection Agency both require two-way communication between chemical suppliers and downstream users to provide the data required for chemical registration and premanufacture notification. Suppliers must provide information to show chemicals are used in a safe manner and that worker exposure and environmental release are below levels which would cause negative impact. The purpose of the panel is to discuss information sharing across the supply chain. Panel participants include: Todd Rallison, Intel Dawn Graunke, Intel Virginia Cook, JSR Pat Blau, Moses Lake Industries

SESHA 2017 Speaker Biography

Laurie Beu
Principal Consultant (1) Laurie Beu, Laurie S. Beu Consulting, Austin, TX (2) Dawn Graunke, Intel, Chandler, AZ (3) Michael Castorano, Dow, Marlborough, MA

Laurie Beu is a consultant in the area of environmental policy, strategy and management. She has formulated company and industry environmental strategies, and served as an industry representative in environmental policy negotiations with suppliers and government agencies. Ms Beu is a Lead Author for the United Nations Intergovernmental Panel on Climate Change Industrial Processes and Products Use sector, responsible for developing good practice guidance for estimating electronics industry GHG emissions. She also served on the technical working group responsible for developing the Environmental, Safety & Health (ESH) chapter of the International Technology Roadmap for Semiconductors. Ms. Beu has chaired numerous semiconductor ESH conferences, workshops and technical meetings. Ms Beu is a Registered Professional Engineer in Texas and is a SESHA Fellow. Prior to starting her consulting business, she worked in the semiconductor industry for 22 years, employed by Motorola and Advanced Micro Devices.

SESHA 2017 Symposium Abstract

The Power of Aligning EH&S with Business Aspirations

Lesso, Kristine; Mendoza, Cristina
(Capaccio Environmental Engineering Inc., Marlborough, MA)

EH&S professionals need to ensure that they are effectively integrated and aligned with the core business functions of their organizations. Understanding the overall organizational vision, and taking a strategic approach to EH&S within this context, provides a framework around which EH&S leaders can think and plan strategically. Thus ensuring the success of their organization and strong transformational EH&S leadership with extraordinary outcomes. By proactively preparing for anticipated stakeholder expectations, EH&S professionals can help their organizations achieve a competitive advantage and drive performance improvements for both the business and the EH&S function. Development of a strong vision with effective strategies provides significant opportunities for EH&S leaders to bring greater value to their business organization as a whole, communicate and gain broader support, and make a measurable impact on the success of their organization from both EH&S and business perspectives. The presenter(s) will review a proven process driven approach for mapping EH&S strategy, and show how this can be used to enhance EH&S and organizational performance. Case Study applications will be shown with sustainability, EH&S risk management, regulatory and other requirements management, and effective use of data and information.

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SESHA 2017 Speaker Biography

Kristine Lesso
Environmental Scientist/Sustainability Consultant Capaccio Environmental Engineering Inc., Marlborough, MA

Kristine Lesso, RABQSA ISO Lead Auditor, CSP, Sigma Black Belt – Senior Environmental, Health and Safety (EH&S) Contributor – Ms. Lesso has over 25 years of experience in a wide variety of EH&S areas including Corporate-Level Strategic EH&S Planning and Road Mapping. In particular, Ms. Lesso is versed in the use of EH&S corporate planning models (AIM, SIP), Corporate Sustainability, ISO 14001 and OHSAS 18001 management systems, and has provided extensive data/metrics analysis and use in strategic EHS planning and program implementation. Ms. Lesso holds a Bachelor of Arts in Environmental Science from the University of Massachusetts, Amherst, a Master of Science in Environmental Studies from Louisiana State University, and a Post-Graduate Diploma in Corporate Sustainability from Furman University. Cristina Mendoza – Environmental Scientist II/Sustainability Consultant – Ms. Mendoza leads the Sustainability Technical Group for Capaccio Environmental Engineering. Her expertise and experience include Corporate Sustainability Reporting, Global Reporting Initiative Reporting, sustainability strategy, and green team facilitation. She is also versed in Greenhouse Gas Reporting and sustainability metrics tracking and analysis. She leads the Management Systems Technical Group as well, and has experience in ISO 14001 and OHSAS 18001 management systems. Ms. Mendoza holds a Bachelor of Arts in Environmental Science, and a Master of Business Administration (MBA), both from Clark University. She sits on the Associated Industries of Massachusetts (AIM) Sustainability Round Table Leadership Board, and on the Leadership Committee of the Environmental Business Council (EBC) Young Environmental Professionals Committee.

SESHA 2017 Symposium Abstract

Achieving Inherently Safe Design

Ffrench, Richard
(FM Global, Johnston, RI)

The semiconductor industry has been effectively incorporating safety and loss prevention into the design of their facilities, by providing state of the art safety, control, and protection systems. In addition the industry has been a leader in the concepts associated with inherently safe design – by eliminating the hazard and exposure. We will review various methodologies and successes with the use of construction materials. We will explore the challenges in maintaining inherently safe design with the use of new materials, chemicals, and processes; and review best practices for change management. And as we move forward in the next generations of technology in fabs, the impact of events will be larger and the value of inherently safe design will be critical to successfully mitigating these risks. Through your partnerships within the safety community, we can begin to identify the risks and opportunities to achieve and maintain inherently safe fabs.

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SESHA 2017 Speaker Biography

Richard Ffrench
Manager of Principal Engineers FM Global, Johnston, RI

Assistant Vice President, Manager of Principal Engineer, Chief Engineer’s Group, Johnston, RI. In additional to Managing the Industry Principal Engineering Group, Richard is responsible to the technology segment (Semiconductor, Data Centers, Telecommunication and Cyber Risk). In his 30 years with FM Global, Richard has had a number of technical and management leadership positions within FM Global. Prior to his current role, Richard managed the account engineers and the FM Global\\\’ Semiconductor specialist team. He is responsible for providing the direction on standards development, research and approval for the technologies and oversight of the global semiconductor specialist program.

SESHA 2017 Symposium Abstract

Chemical Supply Chain Panel II

Bruniard, Maria; Weiby, Fumie
(Semiconductor Industry)

Green Chemical principles have been around for a long time, but little is known on best practices in the industry in the search for more benign alternatives. Most recently we are seeing an increase in regulatory drivers that require proof that an alternative assessment has been performed. In addition, investor, NGO and consumer are exerting pressure to reduce overall hazardous chemical footprint. This panel invites supply chain members to discuss best known practices for performing alternative assessments. The intent is to showcase available software and tools and current processes to perform a successful alternative assessment. Panel Participants include: Trini Bruniard/Fumie Weiby, Intel Mike Castorano, Dow Virginia Cook, JSR

SESHA 2017 Speaker Biography

Dawn S. Graunke, Maria T. Bruniard, Fumie Weiby – Intel Supply Chain Regulatory Manager Semiconductor Industry

Dawn has over 25 years of EHS experience. She has held various positions in the EH&S field and currently manages Intel’s global supply chain sustainability regulatory group. Her team works to ensure Intel’s supply chain is complaint to all global chemical regulatory requirements and that they are meeting their sustainability commitments. Prior to this, Dawn was on assignment at International SEMATECH where she project managed various global chemical initiatives and the ESH assessments of new materials and processes for advanced technologies. She also has managed Fab Construction Safety projects from the design phase & tool installation to de-install and demolition. She has a B.S. degree from Tulane University and a M.S. degree from the University of Massachusetts at Amherst. Dawn is a certified Industrial Hygienist and Safety Professional. Dawn is a past president and Fellow of SESHA and served numerous years on the BOD. In her not so spare time, Dawn enjoys spending time with her family (Husband & Twin 7 yr old girls). Maria T. Bruniard (Trini) has worked in the chemical and semiconductor industry for more than 10 years. She is a Supply Chain Sustainability and Chemical Regulatory program manager at Intel. She has also held roles in Factory Operations in the Gas and Industrial Waste Systems teams, and most recently, in Global Supply Management as a technical supplier owner. Trini’s educational background includes a bachelor’s degree and master’s degree in Chemical Engineering from Villanova University, and a Certificate in Facilities Management from ASU. Prior to her career at Intel, Trini worked for a major industrial gas company in Pennsylvania where she held positions in areas ranging from polymer manufacturing to cryogenic food freezing. Outside of work, Trini enjoys travel, hiking and sharing new experiences with her husband, Jason. Fumie Weiby has been working at Intel over 11 years and held various positions including environmental engineer, facility manager, and safety/IH engineer. Prior to joining Intel, Fumie worked as an environmental consultant for 6 years to manage various environmental projects across the country and oversea including China and Japan. Currently, she works as a Supply Chain Sustainability Regulatory Engineer to manage chemical suppliers for global chemical regulatory compliance as well as drive Intel’s Green Chemistry initiatives. She has a B.S. in Environmental Health and Safety from Oregon State University and a M.S. degree in Environmental Engineering from the Oregon Health and Science University. Outside of work, she is a long-distance runner and enjoys all kinds of outdoor sports. She is also enjoys spending a time with her family including her husband and three daughters (9, 7, and 3 years old).

SESHA 2017 Symposium Abstract

TMA Fire Testing R&D – Can Use of Metal Organic Pyrophoric Liquids Be Fire Safe?

Wyman, Matt
(TMA Fire Testing R&D – Can Use of Metal Organic Pyrophoric Liquids Be Fire Safe?)

The semiconductor industry continues to develop new process technologies to meet ever-changing demand requirements and achieve new manufacturing milestones. The use of these new “Energetic” materials (pyrophoric, water reactive, and unstable chemicals) are quickly moving from R&D to full production in ALD, MOCVD, PECVD, Epi, etc. and likewise the quantities of these chemicals stored onboard and in bulk delivery systems are also increasing at a rapid pace. The use of these new chemicals have increased the fire risk while also increasing the fire detection and suppression challenges. KFPI has been conducting trimethyl-aluminum (TMA) Fire Testing R&D for over 1yr. to determine how to 1st reliably detect these fires and 2nd suppress and control these fires….. if possible. KFPI will present the data, results, and actual fire test videos from various small and large scale fire tests. KFPI will also be showing promising new test data on future fire suppression and control technologies for these pyrophoric metal organics.

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SESHA 2017 Speaker Biography

Matt Wyman, KFPI Managing Director & CTO
Managing Director & CTO TMA Fire Testing R&D – Can Use of Metal Organic Pyrophoric Liquids Be Fire Safe?

Matt Wyman is the Managing Director & CTO of KFPI LLC who specializes in fire safety solutions for the global semiconductor industry with offices throughout USA, Asia, & Europe. Matt began his career as Semiconductor Loss Prevention Specialist with FM Global and has been designing, consulting, and reviewing fire safety solutions for semiconductor equipment for the past 20+ years. Matt currently serves as the Leader of the SEMI Standards Committee for Fire Protection, active participant in SEMI/ISMI Energetics Task Force Committee, active Member of the NFPA 318 and NFPA 12 Committees, serves on the SESHA BOD, and has presented on various fire safety topics at SESHA Annual Symposium & Local Chapter Events many times in the past.

SESHA 2017 Symposium Abstract

Oxygen Reduction Fire Protection Systems

James, Robert
(UL, Northbrook, IL)

Oxygen Reduction Fire Protection Systems– Oxygen reduction fire protection systems are an emerging technology intended to prevent ignition and flame spread within an enclosed space. Oxygen within the space is displaced with nitrogen to a flame-inhibiting, material-dependent volumetric concentration. UL has published an Outline of Investigation for oxygen reduction fire protection systems and offers a system certification. UL will discuss the application of these systems and the considerations during the fire protection system design process.

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SESHA 2017 Speaker Biography

Robert James
Building inspection services UL, Northbrook, IL

Robert J. James Global Building and Security Inspection Lead UL, LLC. Robert J. James is the UL Global Inspection Leader of the Buildings, Fire, Life Safety & Security Industries inspection programs for UL. His responsibilities include directing the managing and providing guidance for the UL global building and security inspection plans. This includes Life Safety inspections and fire protection related technical support, providing educational seminars, developing internet based training programs, service on the model fire code committees and serving as a liaison between the UL fire service research staff and the regulatory community. Bob continues to be active with the UL research team for firefighter safety and fire forensics activities. Bob currently Chairs the NFPA 400, Hazardous Materials Code, and is an alternate member on NFPA 101 TTC, NFPA 3-4, NFPA 1030 and NFPA 1730. Prior to this assignment, Bob was the Fire Marshal for the City of Bloomington MN. Mr. James provided the supervisory activities for the fire prevention department at the city, including plan review, inspection, investigations, and public education relating to fire protection. His experience includes actively engaged in fire protection enforcement community for 30 years both in the private sector and as a previously member of the MN State Fire Marshal Division.

SESHA 2017 Symposium Abstract

EHS Management Leadership and Influencing

GLOWATZ, MICHAEL
(Colden Corporation, Blue Bell, PA)

The management of EHS in the semiconductor industry requires an EHS management systems approach, which many organizations have adopted. To effectively implement and optimize such systems requires not only technical competency in EHS risks and requirements but also the knowledge and skills to manage, lead and influence others. With the myriad of potential hazards that exist within the industry, good risk assessment is key. This requires recognition and evaluation of EHS issues by trained, competent professionals, application of the hierarchy of controls, worker training programs, and systems for monitoring, maintenance, and review and improvement. A robust management of change (MOC) program needs to be incorporated into the EHS management system, since even minor process changes can add significant hazards to the workplace. How does one influence management on what needs to be done to have an effective EHS program, and how does one lead an EHS program that addresses those and other issues? EHS Management is an art form unto itself. Upper management personnel frequently do not come from EHS backgrounds. They may have a difficult time understanding and managing EHS, even understanding and managing basic regulatory requirements. Managing EHS does have some similarities to managing other aspects of the larger organization, but involves understanding the EHS drivers for your business; setting and managing EHS goals which are sometimes intangible; measuring performance; auditing key issues; employee competence and the proper selection, training and placement of EHS personnel; resource utilization and staffing; and building a culture of EHS importance within the larger organization. A basic question becomes, what type of EHS management does your organization/company need, and how do you lead that organization. Drawing from decades of EHS management experience in high tech organizations, this presentation will outline strategies for influencing management and leading an EHS program, and share lessons learned and keys to success.

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SESHA 2017 Speaker Biography

Michael Glowatz
Senior Consultant Colden Corporation, Blue Bell, PA

Mike Glowatz is a Certified Industrial Hygienist and a Certified Safety Professional with a MS in Environmental Health from Temple University, a MEd in Environmental Science from East Stroudsburg University, and a MS in Organizational Management from the University of Phoenix. He has over 35 years of experience, and presently works as a Senior Consultant with Colden Corporation in Philadelphia, PA. Mike previously was the EHS Officer at Bell Laboratories, Director of EHS at Lucent Technologies/AT&T, AT&T rep to SEMATECH, and Executive Director of EHS at Merck. He spent 7 years with federal OSHA as a field inspector and manager.

SESHA 2017 Symposium Abstract

ISO/OHSAS Conformance vs. Health Safety & Environmental Compliance are they equivalent?

Zimmerman, Michael
(J3M, Inc.)

This technical presentation will provide an introduction to the ISO 14001 EMS standard and OHSAS 18001 standard and conformance with the shall statements. We will discuss the continual improvement objectives in the ISO and OHSAS standards. We will discuss the fact that the ISO and OHSAS standards assume a site is in compliance with the health safety & environmental regulations/laws and that it is trying to go above and beyond the agency requirements. At the same time, we will also discuss the similarities and differences between “conformance” with the ISO and OHSAS standards and “compliance” with health safety & environmental regulations/laws. It’s often a misconception that these two go hand in hand. This technical presentation is meant for a wide variety of interested parties including EHS management, consultants, regulators, etc.

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SESHA 2017 Speaker Biography

Michael Zimmerman, PE, CHMM, CPSA, CPEA
Principal J3M, Inc.

Michael Zimmerman has more than 26 years of experience in the fields of engineering and environmental health and safety (EHS) compliance. He has worked in a wide variety of facilities including biopharmaceutical facilities, Silicon Valley high-tech research and development and manufacturing facilities, telecommunications facilities, utilities (electrical power generating plants, publicly owned treatment plants), oil and gas refineries/terminals/bulk plants, food manufacturers, mines, and chemical manufacturing facilities. He is a BVNNA-certified internal ISO 14001 Auditor. He is a registered Professional Chemical Engineer (PE) in three states. He is a Certified Hazardous Materials Manager, a Certified Process Safety Auditor, and a Certified Professional Environmental Auditor.

SESHA 2017 Symposium Abstract

The expanding role of the electronics industry in the energy sector

Nelson, Brent
(Manager of Engineering and Informatics for the Materials and Chemicals Science and Technology directorate of NREL)

As the energy sector grows and becomes more diverse, the need for more controls, sensors, communications, and data handling also increases. Across the entire energy cycle, from production to distribution to end use, the electronic content in products is increasing. There has been a sharp rise in the number of energy production nodes for both for fossil fuel production where an increasing number of wells are required to meet demand and especially for renewable technologies that are highly distributed. Efficiency is a key driver as reducing losses makes a given technology both more profitable and less polluting. The ability to more efficiently extract energy out of a given production node relies on at-the-source intelligence provided by a broad spectrum of electronic devices. This especially true for renewable electricity generating technologies like wind and solar with a large number of integrated devices. In fact, the active materials in photovoltaics are very similar to those used in the semiconductor industry and are themselves an electronic device. The delivery of extracted energy resources to be processed, or to end users, also is seeing an increased focus on efficiency, safety, and environmental protection all facilitated by the growth of electronic content in all delivery vehicle types. This pails in number to the increase in electronic content in the consumer products such as automobiles and smart devices where reducing energy consumption and increasing safety is becoming increasingly important to the consumer. Smart consumer electronics will rely on a smart grid that will have exponentially more sensors, communications, and data to interpret in the coming years in order to both reduce energy use for the consumer as well as allow the consumer to buy energy at the most affordable prices. This talk will provide a high-level overview of how energy is produced, transformed, distributed and used, providing examples of where electronic devices are playing increased roles.

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SESHA 2017 Speaker Biography

Brent Nelson – Manager of Engineering and Informatics for the Materials and Chemicals Science and Technology directorate of NREL
Manager of Engineering and Informatics for the Materials and Chemicals Science and Technology directorate of NREL

Brent spent the first part of his career studying second-generation photovoltaic (PV) devices; primarily hydrogenated amorphous silicon and its alloys at National Renewable Energy Laboratory (NREL). He has authored eighteen publications and numerous internal documents as well as coauthored an additional 77 other scientific publications. Brent referee’s papers for numerous journals and conferences. With more than 500 citations for his research, and having given dozens of scientific talks, Brent’s work is well recognized in the amorphous silicon PV field. Currently Brent manages the Engineering and Informatics group for the Materials and Chemicals Science and Technology directorate at NREL. This is a group of engineers and technicians that keep research equipment “experiment ready” and state-of-the-art. This is in support of technologies ranging from photovoltaics (PV) to nano particle generation to fuel cells to batteries. Brent is also a well-known within the PV community for his expertise in safety practices in working with hazardous production materials (HPMs) and has chaired the HPM safety panel at NREL for over a decade. He has been on the organizing committee for six international scientific conferences including a joint conference of the premier United States, Asian, and European PV communities. Brent also volunteers with the NREL education office on promoting renewable energy in the classroom and is on the advisory board for a Renewable Energy Class at a local high school. Known as an energy wonk and he gives talks on the bigger energy picture to numerous community and industrial groups.

SESHA 2017 Symposium Abstract

Foreline Plasma Abatement in Today’s Fab

John Dickinson, Joe Van Gompel; Dustin Ho, Shaun Crawford; Jim L’Heureux, Andreas Neuber
(Applied Materials, Austin TX)

The use of plasma abatement devices in the foreline (between process chamber and vacuum pump) is a mature technology with thousands of units in use worldwide. Foreline plasma abatement has the advantages of zero footprint in the fab, significantly lower utilities use than post-pump point-of-use (POU) abatement such as water scrubbers, burn-wet, and dry-bed abatement, and avoidance of taking down multiple process chambers with the failure of a post-pump abatement device. Applications include F-GHG (greenhouse gas) abatement, reduction of flammables in the exhaust line, and increase of vacuum pump uptime. A description of foreline plasma hardware and implementation, along with applications and performance data, will be presented. These will include both a direct measurement of greenhouse gas emissions and reduction of flammables in the process exhaust. In addition, cost of ownership (CoO) will be discussed both in absolute dollar terms as well as in overall reduction of greenhouse gas emissions.

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SESHA 2017 Speaker Biography

Joe Van Gompel
Applications Specialist Applied Materials, Austin TX

Joe has been involved with semiconductor exhaust management since 1996. Joe is a Product Specialist with Applied Materials working with emissions testing from AMAT Plasma abatement systems. Earlier he was an Applications Specialist with Edwards, working with POU abatement. Joe is an FTIR specialist, having worked with that technique for over 25 years.

SESHA 2017 Symposium Abstract

Evaluation of Wet-Burn-Wet Abatement System on Semiconductor Silicon Nitride Processes

Chang, Jack
(Texas Instruments Inc.)

Texas Instruments evaluated a wet-burn-wet point of use abatement system on a 300mm silicon nitride process for efficiency of greenhouse gas abatement. Also, NOx and N2O emissions were monitored for both process and clean steps.

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SESHA 2017 Speaker Biography

Jack Chang
Environmental Specialist Texas Instruments Inc.

Jack Chang is an environmental specialist at Texas Instruments Inc.

SESHA 2017 Symposium Abstract

Understanding Ammonium Nitrate Hazards in Semiconductor Facilities

Roberts, Thomas 
(Micron Technology, Boise, ID)

Ammonium nitrate can be present in semiconductor exhaust systems as a direct byproduct from the manufacturing processes. Ammonium nitrate can also occur in centralized exhaust systems as a result of incompatible emissions from unrelated fabrication equipment. Although ammonium nitrate (AN) is typically considered non-hazardous, under certain conditions ammonium nitrate can undergo an explosive thermal decomposition reaction. Explosive thermal decomposition of ammonium nitrate can lead to loss of life and severe damage to facilities and equipment. It is critical to understand the conditions under which AN can pose an unacceptable risk based on the potential for an explosive decomposition reaction. Understanding the physical hazards of a byproduct can assist in implementation of appropriate controls to reduce risk to an acceptable level. A thorough understanding of AN reactivity hazards can assist in the evaluation of appropriate controls for safe handling of the material. In this presentation I will review the conditions under which ammonium nitrate can pose an unacceptable risk due to the potential of explosive decomposition. In addition the presentation will review accepted methods for the safe handling of ammonium nitrate.

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SESHA 2017 Speaker Biography

Thomas M. Roberts, P.E.
Principle Engineer – PSM Micron Technology, Boise, ID

Tom Roberts is a Senior Process Safety Engineer with Micron Technology, inc. in Boise Idaho. Tom Roberts has a Bachelor’s degree in Chemical Engineering from Montana State University, in addition to 14 years of experience in the semiconductor industry. Tom’s current area of focus is chemical process safety and process hazard analysis for semiconductor facilities systems. Tom has led multiple hazard analyses on semiconductor facilities systems utilizing Hazard and Operability Studies. Tom has additional experience in the design of specialty gas systems and pollution abatement systems supporting semiconductor fabrication.

SESHA 2017 Symposium Abstract

Material flow of gallium arsenide and risk analysis in the III/V-semiconductor industry in Germany

Clemm, Christian
(Technische Universität Berlin, Germany)

Gallium arsenide (GaAs) is a III/V-semiconductor material and a key component in many electronic and optoelectronic applications such as telecommunications, defense systems, solar cells, material processing and consumer electronic items. The application of GaAs and other III/V-semiconductor materials has led to large gains in energy efficiency compared to conventional products – for instance in the case of LEDs, lasers, and solar cells. Since the controversial classification of GaAs as category 1B carcinogen under the EU Regulation on Classification, Labelling and Packaging (CLP) in 2013, research has been under way to improve the existing data basis regarding material flows as well as exposure potential and emissions during manufacturing processes. For this purpose, a consortium of German industry and research organizations jointly created inventories of all relevant manufacturing processes, from substrate production to product (die). Simplified quantitative material flow models were generated by clustering the complex process chains and underlying material flows. Further, data on risk management approaches was compiled by measurement of GaAs in workplaces and waste flows, focusing on the processes where exposure is most likely to occur. Additionally, biomonitoring was carried out to monitor the effectiveness of risk management measures in the manufacturing environment. Excerpts of the methodology and results will be presented.

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SESHA 2017 Speaker Biography

Christian Clemm
Research Assistant Technische Universität Berlin, Germany

Christian Clemm is a research fellow at Technische Universität Berlin, in cooperation with Fraunhofer IZM in Germany. His research focus is on environmental assessment and optimization of electronic equipment, including life cycle assessment and material flow analysis, ecodesign, and identification and elimination of hazardous substances from consumer electronic products.

SESHA 2017 Symposium Abstract

Title: Bridging the gap between bottom-up and top-down approaches for the global CF4 budget

Michalopoulou, Eleni
(University of Bristol, Bristol, UK)

CF4, also known as carbon tetrafluoride (or tetrafluoromethane), is a very stable gas with an atmospheric half-life of 50,000 years, and a global warming potential of 7390 (Forster et al., 2007). CF4 is the most persistent greenhouse gas yet discovered and its emissions are almost entirely anthropogenic (“man-made”). Three main sources have so far been identified: a) the aluminium (AL) industry and b) the semi-conductor (SC) industry and c) rare earth smelting (RE). Emissions inferred by a combination of measurements from the Advanced Global Atmospheric Gases Experiment (AGAGE) and inversion modelling (a top-down method) show that only around 50% of global CF4 emissions can be explained by current emissions inventories (Kim et al., 2014). Given the continuous growth of all three industries mentioned above, it is of great importance to understand the reasons behind the emission discrepancies despite efforts from the industries to reduce their emissions and update their inventories. To that end, we are working on construction of a bottom-up inventory that includes the AI, SC and, for the first time, the RE industries. Initial data on Australian emissions will be presented in which top-down and bottom-up emissions are compared. Initial findings for a semiconductor and flat-panel-display-centric example will also be discussed. The ultimate goal of this project is to: a) quantify and localise the emissions of CF4 for each industry and, b) bridge the gap between bottom-up and top-down approaches for the global CF4 budget.

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SESHA 2017 Speaker Biography

Eleni Michalopoulou
PhD University of Bristol, Bristol, UK

Eleni Michalopoulou is a PhD student at the Department of Chemistry in Bristol University where she is studying the discrepancies between bottom-up inventories and top-down estimates for the gases CF4 and C2F6. Coming from a background in Physics she focused her early studies on Environment, Meteorology and Oceanography. At the end of her degree she joined the Hellenic National Meteorology Service where she worked on the verification of numerical weather prediction models, work for which she was awarded the Best Young Scientist award at the 12th International Conference on Meteorology, Climatology and Atmospheric Physics COMECAP 2014. Additional work included the study of extreme weather phenomena, distribution of microplastics within a marine environment and the meteorology and oceanography of the Aegean Sea.

SESHA 2017 Symposium Abstract

Revision of IPCC Default PFC Emission Factors

Czerniak, Michael
(Edwards and IPCC)

The IPCC (the United Nations’ Intergovernmental Panel on Climate Change) published standard default values for the emissions of greenhouse gases (GHGs) in 2006 (2006 IPCC Guidelines for National Greenhouse Gas Inventories, http://www.ipcc-nggip.iges.or.jp/public/2006gl/) for a comprehensive spectrum of sources, ranging from agricultural to industrial sectors. At the 26th Meeting of Task Force Bureau (TFB) (28 – 29 August 2014, Ottawa) it was concluded that to maintain the scientific validity of the 2006 IPCC Guidelines, certain refinements may be required, taking into account scientific and other technical advances that have matured sufficiently since 2006. For instance wetlands emit more methane than previously assumed, and aluminium smelting may emit PFC gases during times between anode events. With this in mind, a task force (Task Force on National Greenhouse Gas Inventories, TFI) has been established to review all available data with a view to publishing a new document in 2019. The new report will be an update to the 2006 document – and specifically NOT a fundamentally new document – and only where significant new data has come to light will changes be made. A scoping meeting was held in Wollongong in April 2016 and Table of Contents follow-up in Minsk in August, with nominations for authors made by the end of 2016. 2017 is the year of data collection, 2018 is report writing, and 2019 is UN approval (IPCC49) and publication. Four areas are being considered: Unidentified sources of perfluorocarbons (PFCs), Emissions from soils, Land representation and Emissions from flooded land. Of particular interest to the semiconductor industry will be consideration of the differences between the 2006 IPCC emission factors and the more recent EPA factors and other potential PFC emission sources, such as the manufacture of the PFC gases themselves. The presentation will elaborate on these topics and provide an opportunity for questions and comments.

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SESHA 2017 Speaker Biography

Dr. Michael Czerniak
Environmental Solutions Business Development Manag Edwards and IPCC

Gained his PhD at Manchester University (UK), 1982. Starting his professional career with Philips, initially in their UK R+D labs & subsequently in the fab in Nijmegen, Holland, Mike has worked in the semiconductor business. He had subsequent marketing roles at UK-based OEMs Cambridge Instruments, VSW and VG Semicon before joining Edwards 21 years ago. He has held various technical and marketing positions before beginning his current role 2 years ago. Mike has numerous published articles and patents to his name, co-chairs a SEMI standards committee, participates in the IRDS, is a UK PFC “expert” on the IPCC and has authored chapters on Vacuum and Environmental issues in the forthcoming Semiconductor Manufacturing Handbook.

SESHA 2017 Symposium Abstract

The Science of Exhaust Management

Stover, Adam; Cottle, Steve
(Edwards, Albany, NY)

Perfluorinated compounds (PFCs) were incorporated into semiconductor processing to obviate the use of ozone depleting substances, such as chlorofluorocarbons. However, PFCs have been shown to strongly contribute to global warming due to the behaviour of the carbon-fluorine bond. Furthermore, PFC molecules are quite stable due to the strength of the carbon-fluorine bond. Therefore, it is crucial to understand the chemistry of these molecules and the role it can play in successfully destroying PFCs and then abating the by-products. To that end, this talk will first discuss the periodic table and its implications on elemental reactivity. Only by fundamentally understanding chemical behaviour can proper abatement strategies by formulated. After this primer, specific chemical families used in semiconductor processing, such as PFCs, will be discussed in more detail regarding their chemistry and toxicity and the role these factors play in proper abatement. As safe abatement can be nuanced, potential safety hazards and practices to avoid are also detailed.

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SESHA 2017 Speaker Biography

Adam Stover
Applications Engineer Edwards, Albany, NY

Adam completed his BS in chemistry at Haverford College and PhD in Materials Science and Engineering at The Johns Hopkins University. After graduating, he joined a superalloy manufacturer as a Sr. Process Engineer driving process optimization and change control. Since 2015 he has been a an Applications Engineer with Edwards focused on customers primarily in the northeast.

SESHA 2017 Symposium Abstract

New Regulatory Developments Affecting Fluorinated Materials

Higgs, Tim
(CH2M, Tempe, AZ)

Fluorinated materials are widely used in the semiconductor industry in manufacturing processes, refrigeration and heat transfer. Due to their global warming potential, many regulations have been passed over the years regulating use and requiring reporting of emissions of these materials. A number of pending new actions create the potential for significant new additional restrictions. Pending changes to the refrigerant management rules in 40CFR part 82 would apply existing rules on management and emissions tracking of refrigerants to non-ozone depleting fluorinated materials and would reduce the size threshold to cover smaller refrigeration and heat transfer units. New restrictions under the Significant New Alternatives Policy (SNAP) rules would eventually phase out many commonly used fluorinated refrigerants and recent amendments to the Montreal Protocol call for the phase out of many fluorinated materials. In addition, several changes are proposed to the existing greenhouse gas reporting rule. These changes are significant for industries that rely on fluorinated materials such as the semiconductor industry

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SESHA 2017 Speaker Biography

Tim Higgs
Air Quality Specialist CH2M, Tempe, AZ

Tim Higgs is an air quality specialist with CH2M with over 30 years of experience in the semiconductor industry. He is a registered professional engineer (chemical) in the State of Arizona. Tim worked for Intel Corporation from 1984 – 2015 in a variety of environmental positions at the site and worldwide levels, and has extensive experience in matters related to air permitting, air emissions control, energy efficiency and climate change. He has worked with state and local regulatory agencies across the U.S. as well as in other nations on air pollution control regulations and programs, and has frequently consulted with U.S. EPA on air program matters of importance to the semiconductor industry.

SESHA 2017 Symposium Abstract

A Non-Traditional Approach to Ion Implant Exhaust Reduction

OLANDER, KARL; BALLANCE, STEVEN; SWEENEY, JOE 
(Steven Ballance is with Texas Instruments, Worldwide Facilities. Joe Sweeney and Karl Olander are with Entegris, Inc., Electronic Matrials)

To respond to global warming concerns and the cost of energy, semiconductor manufacturers need to enact energy reduction initiatives that are safe, cost effective and responsive to climate change initiatives. The exhaust requirement for ion implanters traditionally runs about 2500 CFM per tool–one of the highest per tool type in the fab. The majority of this exhaust is used to both cool and sweep the containment shell volume of the ion implanter. This paper traces the evolution made by Texas Instruments, over a 10 year period, to safely reduce the replacement air requirements for ion implanters which occurred over several expansions and covered multiple manufacturing facilities. During this period TI effectively reduced replacement air requirements by over 75%. In addition to a direct operating energy savings of about $8000 per tool per year, TI also captured a significant capital cost savings for the downsized infrastructure needed to supply the make-up air; heating, cooling, filtration, abatement and conveyance equipment. In addition to reviewing the pathway TI followed, this paper examines additional exhaust reduction and safety advances which can be achieved using an integrated approach involving tool manufacturers, dopant gas suppliers and fab designers. The path to a cost effective, smart exhaust system operating at nominally 5% of historical levels is outlined.

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SESHA 2017 Speaker Biography

Karl Olander
Technical Advisor Steven Ballance is with Texas Instruments, Worldwide Facilities. Joe Sweeney and Karl Olander are with Entegris, Inc., Electronic Matrials

Karl holds a Ph.D. in chemistry from the University of Illinois and was a co-founder of ATMI, Inc. Mr. Olander has worked in a variety of semiconductor areas including abatement technologies, gas purification and the safe storage and delivery of gases. He hold 50 issued patents and received the SEMI Award for Innovation in 2002. He received the SESHA Lifetime Achievement Award in 2008.

SESHA 2017 Symposium Abstract

Evaluation of the Performance of a Mixture of BF3+H2 from an EH&S Perspective on an Ion Implant Tool

Despres, Joseph*; Jones, Edward; Tang, Ying
(Entegris, Danbury, CT)

In some instances, Semiconductor customers are migrating from the use of neat fluoride dopant sources to the use of gas mixtures to enable better tool productivity. As an example of this trend certain end-users are moving from neat BF3 to a mixture of BF3+H2. The driver for this change is primarily due to the fact that mixtures can provide productivity enhancements in terms of extended source life and/or a higher beam current. While mixtures offer tool productivity benefits, it is also important to the end-user to ensure that there are no adverse EH&S impacts that result from this conversion. This paper explores the results from testing that was performed comparing the amount of hydrogen fluoride (HF) evolution from an Ion Implant tool under various test scenarios. The purpose of the test was to simulate different recipes, such as neat BF3 compared to BF3+H2, along with several venting procedures to identify the effect on the measured HF concentration during a source housing preventative maintenance procedure. The data indicates that the addition of hydrogen does not impact negatively the measured amount of HF that evolves during a source PM under these test conditions. This fact, along with the reliability data of the Entegris VAC® cylinder package, provides a strong EH&S driver in addition to the increased tool productivity for the use of fluoride mixtures in Ion Implant.

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SESHA 2017 Speaker Biography

Joseph Despres
Sr. Manager Specialty Gases Engineering Entegris, Danbury, CT

Works as a Senior Manager in Entegris’ product development group within the Specialty Gas Business Unit. The focus of this team is to develop novel materials and gas mixtures that are delivered in industry leading safe packages.

SESHA 2017 Symposium Abstract

Actions to Improve Chemical Facility Safety and Security under EO 13650, Improving Chemical Facility Safety and Security, Related to the EPA Risk Management Plan (RMP) Rule and OSHA Process Safety Management (PSM) Standard

Moll, Ashley; Frist, Bernie
(Partners (formally Greystone Environmental Management) and Safety & Risk Management Group, LLC)

The OSHA Process Safety Management (PSM) Standard and EPA Risk Management Plan (RMP) Rule were implemented in the 1990s in order to control and minimize the risk of catastrophic releases of highly hazardous chemicals from processes within stationary sources. On August 1, 2013, POTUS issued Executive Order 13650 – Improving Chemical Facility Safety and Security (EO). The EO was in response to a series of chemical facility accidents that culminated with notable chemical facility accidents in West, Texas and Richmond, California. The EO directed the Department of Homeland Security (DHS), the EPA Environmental Protection Agency (EPA), the Department of Labor (DOL), the Department of Justice (DOJ), the Department of Agriculture (USDA), and the Department of Transportation (DOT) to establish a Chemical Facility Safety and Security Working Group to improve chemical facility safety and security in coordination with Stakeholders (State regulators; State, local, and tribal emergency responders; chemical facility owners and operators; and local and tribal communities). Fast forwarding to the present, what was the impact of the Executive Order? This presentation will discuss regulatory actions related to PSM and RMP as a result of the EO Working Group; the most significant being the EPA’s rulemaking to finalize amendments to the Accidental Release Prevention Requirements for Risk Management Programs under the Clean Air Act, Section 112(r)(7). The presentation will focus primarily on the changes to the EPA RMP regulation under the Final Rule, but will also discuss recent interpretation letters that have been issued by OSHA related to the PSM Standard. At the end of the presentation, attendees should have a better understanding of the regulatory changes resulting from the EO, and how to prepare their facilities for implementation deadlines.

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SESHA 2017 Speaker Biography

Ashley Moll & Bernie Frist
Senior Project Manager Partners (formally Greystone Environmental Management) and Safety & Risk Management Group, LLC

Ashley Moll has 10 years of experience in the practice and management of Safety, Industrial Hygiene and Risk Management. Ms. Moll graduated from Clarkson University with a B.S. in Business Technology Management with a concentration in EHS Management. Ms. Moll is currently a Senior Project Manager with Partners formally Greystone Environmental Management. With Partners she works in a variety of industries such as chemical and plastics manufacturing, refrigeration, and semi-conductor manufacturing, to design and implement Process Safety Management and Risk Management Plans for facilities. Bernie Frist has over twenty-seven years of experience in environmental, health and safety (EHS) program management, specializing in risk management and process safety; five years in a manufacturing environment and over twenty-two years in consulting. Mr. Frist has implemented and evaluated EHS, risk management, and process safety management (PSM) programs for research and development, pilot, and full-scale production manufacturing operations in process intensive industries, worldwide. His PSM experience includes program development, regulatory compliance auditing, and leading process hazard analyses (PHAs) for clients in diverse market sectors. Mr. Frist led technical consulting practice groups focused on risk management plans, process safety management programs, and process hazard analysis at his previous consulting firms. Since April 2014, Mr. Frist has been independently consulting to clients on EHS, Risk Management, and Process Safety Programs. Mr. Frist is a former fire fighter/EMT and past-President and Fellow of the Semiconductor Environmental Safety and Health Association (SESHA).

SESHA 2017 Symposium Abstract

Effective Application of Risk Controls from Integrated Process Hazards Analysis Evaluations

Trammell, Steven
(BSI, The Woodlands, TX)

The use of Process Hazards Analysis (PHA) techniques for hazard identification and assessment are becoming a standard process for many companies as a part of their overall risk management strategies. PHAs provide a systematic approach to studying process systems, identifying weaknesses and providing opportunities to increase overall system reliability through evaluation of existing controls and/or establishment of new control requirements. However inadequate evaluation or application of the proper control for each identified hazard scenario may result in reduced or ineffective risk reduction. In this presentation, criteria for evaluating risk controls to ensure maximum effectiveness will be discussed together with several specific examples from past PHA studies.

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SESHA 2017 Speaker Biography

Steven Trammell
Principal Consultant BSI, The Woodlands, TX

Mr. Trammell has over 30 years of experience in a wide range of environmental, health and safety (EHS) program and project activities, spanning the aerospace, petrochemical and semiconductor industries. His core competencies include technical risk assessments, process safety management, explosives safety and construction safety, in addition to expertise in regulatory compliance program development, compliance auditing, technical training and standards development. He has developed corporate risk assessment programs for multiple companies, and has lead international audit teams to ensure site legal compliance to country specific and international EHS regulations. Mr. Trammell has conducted and led process safety hazards analysis studies for highly hazardous operations and developed programs to comply with OSHA’s PSM and the EPA’s RMP regulations. He has extensive experience in conducting Job Hazards Analysis activities and leading investigation / root cause analysis teams. Mr. Trammell has provided on-site technical support and EHS program development for new construction and site demolition activities, including start-up support for four semiconductor manufacturing facilities, two petrochemical processing facilities, three rocket motor fabrication facilities and decommissioning oversight for a major explosives manufacturing plant.

SESHA 2017 Symposium Abstract

As I look back there were 5 incidents that I was involved in that should have killed me but luck saved me, one as recently as 2016. What were they and what did I learn?

Ngai, Eugene
(President of Chemically Speaking LLC)

I started in the gas industry when the Semiconductor Industry was just beginning in 1972. In those days we knew very little about the hazards of gases being used. In the 45 years that I have worked in the industry, there has been many incidents and Lessons Learned that need to be passed along to this generation of users and suppliers.

SESHA 2017 Speaker Biography

Eugene Ngai
President of Chemically Speaking LLC

Eugene has over 40 years of Specialty Gas experience in production, laboratory, R&D, engineering and safety positions. He retired from Air Products in 2009 and formed Chemically Speaking LLC a compressed gas safety and emergency response training and consulting corporation. Chemically Speaking LLC currently has numerous multi-year agreements to advise manufacturers, suppliers and users of specialty compressed gases, primarily in the Semiconductor, LCD or Photovoltaic industries. He travels over 150,000 miles per year on projects.
He continues to be active in a number of worldwide industry association working groups, CGA G-13 (Silane), NFPA 55 (Industrial and Medical Gases), NFPA 400 (Hazardous Materials), NFPA 318 (Semiconductor), SEMI EHS, SESHA and UN TC58 SC2 WG7 (Gas Toxicity, Flammability, Oxidizer). He coordinated 6 days of silane release testing in 2011 and 2012, in New Mexico to gather data for revision of CGA G-13 standard on silane a pyrophoric gas that has been involved in over 10 fatal accidents.
He has made over 200 presentations worldwide on Emergency Response, Product Safety, Gas Technology and Environment over the last 25 years. He has campaigned extensively on silane safety. He chaired 12 one day silane safety seminars, in Taiwan, Korea, Singapore, US and Europe starting in 2006. He continues to conduct compressed gas safety and emergency response classes throughout the world. He has taught numerous courses (1-3 day) on compressed gas safety and emergency response and has trained over 10,000 users from government agencies, universities, gas manufacturers and semiconductor fabrication facilities. He has also taught at a number of Fire Academies worldwide, including New York, Honolulu, San Jose, Camden County and Singapore and as well as at 3-4 HazMat Conferences per year. Over 4,500 firefighters have been trained.
Eugene has a Bachelor of Science in Chemical Engineering and a Master in Environmental Engineering
He was honored with the CGA Lifetime Safety award in 1999, Fire Dept of New York Commissioners award in 2007, made a SESHA Fellow in 2009 and received the American Chemical Society Howard Fawcett Award for Contributions to Chemical Safety award in 2011. He has 5 US patents for Gas Safety Devices. He designed the Solkatronic 5502 ERCV (Cylinder salvage vessel) in 1988 that has become the standard in high pressure leaking cylinder containment worldwide. Over 400 are in use worldwide including FBI HMRU and FDNY HazMat 1.

SESHA 2017 Symposium Abstract

Jack Rabbit Testing

Ngai, Eugene
(Chemically Speaking LLC)

DHS has been very concerned with terrorism using Cl2 and NH3. Release testing has been conducted since 2010 to better understand downwind dispersion. Initially it was 1-2 tons. In 2016 it was 20 tons of Cl2 released due to a IED on the bottom of a tanker. What did we learn?

SESHA 2017 Speaker Biography

Eugene Ngai
President Chemically Speaking LLC

Eugene has over 40 years of Specialty Gas experience in production, laboratory, R&D, engineering and safety positions. He retired from Air Products in 2009 and formed Chemically Speaking LLC a compressed gas safety and emergency response training and consulting corporation. Chemically Speaking LLC currently has numerous multi-year agreements to advise manufacturers, suppliers and users of specialty compressed gases, primarily in the Semiconductor, LCD or Photovoltaic industries. He travels over 150,000 miles per year on projects. He continues to be active in a number of worldwide industry association working groups, CGA G-13 (Silane), NFPA 55 (Industrial and Medical Gases), NFPA 400 (Hazardous Materials), NFPA 318 (Semiconductor), SEMI EHS, SESHA and UN TC58 SC2 WG7 (Gas Toxicity, Flammability, Oxidizer). He coordinated 6 days of silane release testing in 2011 and 2012, in New Mexico to gather data for revision of CGA G-13 standard on silane a pyrophoric gas that has been involved in over 10 fatal accidents. He has made over 200 presentations worldwide on Emergency Response, Product Safety, Gas Technology and Environment over the last 25 years. He has campaigned extensively on silane safety. He chaired 12 one day silane safety seminars, in Taiwan, Korea, Singapore, US and Europe starting in 2006. He continues to conduct compressed gas safety and emergency response classes throughout the world. He has taught numerous courses (1-3 day) on compressed gas safety and emergency response and has trained over 10,000 users from government agencies, universities, gas manufacturers and semiconductor fabrication facilities. He has also taught at a number of Fire Academies worldwide, including New York, Honolulu, San Jose, Camden County and Singapore and as well as at 3-4 HazMat Conferences per year. Over 4,500 firefighters have been trained. Eugene has a Bachelor of Science in Chemical Engineering and a Master in Environmental Engineering He was honored with the CGA Lifetime Safety award in 1999, Fire Dept of New York Commissioners award in 2007, made a SESHA Fellow in 2009 and received the American Chemical Society Howard Fawcett Award for Contributions to Chemical Safety award in 2011. He has 5 US patents for Gas Safety Devices. He designed the Solkatronic 5502 ERCV (Cylinder salvage vessel) in 1988 that has become the standard in high pressure leaking cylinder containment worldwide. Over 400 are in use worldwide including FBI HMRU and FDNY HazMat 1.

SESHA 2017 Symposium Abstract

Designing Protection for Bulk Silane Systems 

Beach, Denise
(FM Global, Norwood, MA)

As use of Silane expanded to other industries and the methods and size of delivery systems changed in semiconductor fabs, FM Global created a separate standard that provides loss prevention guidance these exposures in all industries. The changes associated with the larger bulk systems increased the potential impact of accidents. FM Global with the CGA conducted testing in 2014 to determine the most effective means to prevent and minimize events such as explosions. The methodologies and protection guidance are included in the FM Global Loss Prevention Data Sheet 108. Understand the background of the testing and the standard development will provide insight on how to effectively use the safety and design guidance for Silane delivery systems.

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SESHA 2017 Speaker Biography

Denise Beach
Staff Engineering Specialist FM Global, Norwood, MA

Denise Beach is a Staff Engineering Specialist with FM Global. Ms. Beach serves as technical specialist on several compressed gas and fuel/combustion FM Global Property Loss Prevention Data Sheets. In addition, Ms. Beach represents FM Global on other associations’ technical committees, including the National Fire Protection Association (NFPA) and the Compressed Gas Association (CGA). Ms. Beach previously served as the Senior Engineer with the National Fire Protection Association. Ms. Beach has a Bachelor’s of Mechanical Engineering from the Georgia Institute of Technology.

SESHA 2017 Symposium Abstract

JHA Projects Within Complex Environments: Risk Assessment, Implementation, Commitment 

Anderson, Mollie
(BSI EHS Services & Solutions)

Job Hazard Analysis (JHA) have broad applicability within high tech, complex environments, such as semiconductor, solar, biopharma, and global applications. Addressed are development, implementation, and desired project results over a diverse set of tasks and procedures–from process chemistries to energy isolation. Due to the nature of today’s industries, technology changes quickly and new tools and processes are brought into the manufacturing or site facilities routinely. As a result, we must continually evaluate, update, and reassess to ensure tools and facilities are safe. A JHA project is uniquely suited to this evaluation. Learning outcomes for this presentation include: 1) understanding JHAs and their unique applicability, 2) management engagement and support, and 3) facilitating open-forum discussions towards culture change for an environment of trust and shared ownership. Procedural safeguards are administrative controls, whereas a JHA is a formal documented hazard analysis with rationale for mitigation/controls selection, hazard ranking, and other components not present nor verified in procedures. To conduct a JHA, tasks and procedures are initially prioritized by perceived risk of tools, processes and hazards. JHAs are then conducted for each operation or maintenance procedure by observing work practices, interviewing workers, supervisors and engineers, and by reviewing maintenance and energy isolation procedures, and manufacturer’s specifications. Additionally, applicable regulatory requirements and industry best practices are reviewed. This effort culminates in a formal JHA for each procedure with mitigation or risk controls for each identified hazard. Two unique facets for large scale JHA completion are: 1) management engagement, and 2) risk assessment using probability of occurrence, severity and frequency. Engaging management provides greater understanding of tool usage, work rotations, existing hazards, and current EHS practices. This increases awareness, transparency, and employee participation, which in turn bolsters employee confidence that hazards, perhaps previously unaddressed, are recognized and can be controlled or eliminated. The probability of occurrence as a risk matrix component complements the commonly used measures of severity and frequency. Incorporating probability provides more accurate risk scores based on perceived likelihood that an exposure, and subsequently an adverse health or safety effect, may occur. The JHA process can demonstrate to the employees and management, that safety is not just a concept, but a fundamental tenant of a company’s structure and philosophy. Using this JHA process, an introduction towards a culture change or strengthening a positive EHS culture is advanced throughout all tiers of an organization.

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SESHA 2017 Speaker Biography

Mollie (Foster) Anderson, MSSM
Principal Consultant BSI EHS Services & Solutions

Mollie Anderson has over 25 years of professional experience providing product safety engineering, EHS program implementation, risk assessment, regulatory compliance, and EHS oversight. She has managed teams of safety engineering professionals within the semiconductor industry, focusing on regulatory/global compliance, SEMI Safety Guidelines, equipment/facility install review, Job Hazard Analysis (JHA) for global company implementation, robotics, and more. Mollie has performed a broad spectrum of analyses and has conducted numerous management development and process hazard evaluations. She is skilled in incident reviews, trending leading/lagging indicators, supply chain management for EHS, HAZOP, What If?, and preliminary and systems hazard analysis.

SESHA 2017 Symposium Abstract

Multivariate Analysis Technology in Process Safety Monitoring Application

Tuan, Andy*; Huang, Jack
(Flagship International Ltd, Taipei, Taiwan)

As consumers demand more functionality at lower price for their Information and Communication Technology (ICT) products, high tech device manufacturing industry has widely adopted factory automation and integrated process design to increase factory efficiency and reduce production cost. However better process safety performance is becoming more and more difficult to achieve as both complexity to control manufacturing process and number of hazardous process materials consumed in the factory increase. Traditional uni-variate statistics process control (SPC) charts may not be able to disclose enough insights for plant management to make correct and timely decision for the production line. This paper will illustrate how Multivariate Analysis (MVA) technology can be applied to design and build effective process safety monitoring system and achieve early detection for process excursion and identify critical safety-related parameters which could also often cause abnormal operation that leads to quality and efficiency problems at the same time. A more holistic approach by applying MVA technology not only to monitor process safety factors but also to improve the yield of the process is suggested in this paper.

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SESHA 2017 Speaker Biography

Andy Tuan
President Flagship International Ltd, Taipei, Taiwan

Mr. Andy Tuan is the founder of Flagship International Ltd (FIL), a high tech manufacturing technology-focused consulting company. Together with several business partners, FIL offers broad range of consulting services such as corporate sustainability, process materials, supply chain risk management, factory connectivity, and manufacturing data analytics. Prior to founding FIL, Mr. Tuan worked in several global electronic devices and materials companies for over 23 years including Merck KGaA, Fujitsu, Air Products and Chemicals. Mr. Tuan received his BS degree in Chemical Engineering from National Tsing Hua University (Hsinchu Taiwan) and got his MBA degree with focus on International Business Management. Mr. Tuan is also an active participant of SEMI, a non-profit industry association that provides various services to the global semiconductor industry, where he assumed membership roles in EHS technical standard program, sustainability committee, regional advisory board, and smart manufacturing committee.

SESHA 2017 Symposium Abstract

New developments in wastewater treatment for semiconductor fabs

Jenkins, Brian
(Nalco Water, an Ecolab Company)

It is well known that semiconductor fabs generate enormous quantities of UPW (UltraPure Water) for production; some of the largest reverse osmosis systems in the world are in the microelectronics industry. Also, the industry has some of the largest HVAC (heating, ventilation and air conditioning) systems to support the critical manufacturing environment. As the trend in circuit micro-miniaturization continues, the UPW systems continue to grow in size and complexity. This same trend generates more and more wastewater. Although opportunities for water re-use and recycling, many of the wastewaters generated will require some remediation to make them suitable for these re-use / recycle scenarios. Two of the wastewater “culprits” we will be discussing in this presentation are fluoride (from the HF in the etching processes) and hydrogen peroxide (from various cleaning steps). The presentation will describe some of the newly developed removal techniques, as well as projections of their positive environmental effects compared to currently used techniques as well as financial benefits.

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SESHA 2017 Speaker Biography

Brian Jenkins
Senior Marketing Manager, Microelectronics Nalco Water, an Ecolab Company

Brian has been employed by Nalco Water since 1978 in a variety of technical sales and marketing positions including District Sales Manager, Marketing Manager, and Senior Product Manager. He is currently a Senior Marketing Manager in Nalco Water’s Light Industrial Strategic Business Unit, handling the Microelectronics industries. He has presented at or published in over a dozen technical forums including ASHRAE, UPW Micro and SESHA. He has a Bachelor of Science in Chemical Engineering from the Technological Institute of Northwestern University. He holds ten US patents, and is in process of filing three additional patents.

SESHA 2017 Symposium Abstract

Risk Based Process Safety in Semiconductor Fabrication Operations

Hawkins, *Steve; Lewman, Michael
(ERM North America)

While most semiconductor manufacturing facilities do not contain quantities of highly hazardous chemicals in threshold quantities sufficient to be subject to the Occupational Health and Safety Administration’s (OSHA)Process Safety Management (PSM) regulations, some organizations are applying Risk Based Process Safety (RBPS) concepts as a systematic means to not only ensure EHS risks are identified and quantified, but also to strengthen overall business performance and provide competitive advantages. Aging Fab facilities and infrastructure, ever-increasing production demands and rapid innovation and need for process modifications are also business drivers for RBPS. The core RBPS concepts not only provide a holistic approach to protect employees from catastrophic accidents and releases; but in most cases also drive production efficiencies, increase equipment/tool reliability and life span, promote quality improvements, and enhance business continuity measures. This is accomplished by application of a wide range of process safety management elements, as applicable to semiconductor operations, that fall under the following four basic pillars of RBPS: Process Safety Leadership/Commitment; Risk Assessment/Identification; Risk Management; and Learning and Continuous Improvement. This presentation will discuss the basic concepts of RBPS, including a brief review of the 20 elements as provided by the Center for Chemical Process Safety (CCPS)framework, and present the benefits of developing and implementing process safety management systems for semiconductor processes. Case studies will be presented, as applicable, to detail the advantages, as well as the challenges, of RBPS for the semiconductor industry.

SESHA 2017 Speaker Biography

Steve Hawkins and Mike Lewman
Partner ERM North America

Mike Lewman has more than 20 years experience in Semiconductor Capital Equipment EHS and Product Safety and 6 years with ERM. Steve Hawkins, PE, has over 20 years of experience in air quality, compliance and environmental management systems auditing, process safety management, environmental site assessments, regulatory analysis and review, permitting, and air pollution control equipment design

SESHA 2017 Symposium — PDC2

Energetic Materials

Eugene Ngai

Chemically Speaking LLC

As the IC industry grows the use of new compounds as raw materials is growing. Many have little to no safety information, they also have a tendency under certain conditions to form energetic byproducts. What are these? Incidents and lessons learned.

Biography

Eugene Ngai
President of Chemically Speaking LLC

Eugene has over 40 years of Specialty Gas experience in production, laboratory, R&D, engineering and safety positions. He retired from Air Products in 2009 and formed Chemically Speaking LLC a compressed gas safety and emergency response training and consulting corporation. Chemically Speaking LLC currently has numerous multi-year agreements to advise manufacturers, suppliers and users of specialty compressed gases, primarily in the Semiconductor, LCD or Photovoltaic industries. He travels over 150,000 miles per year on projects.

He continues to be active in a number of worldwide industry association working groups, CGA G-13 (Silane), NFPA 55 (Industrial and Medical Gases), NFPA 400 (Hazardous Materials), NFPA 318 (Semiconductor), SEMI EHS, SESHA and UN TC58 SC2 WG7 (Gas Toxicity, Flammability, Oxidizer). He coordinated 6 days of silane release testing in 2011 and 2012, in New Mexico to gather data for revision of CGA G-13 standard on silane a pyrophoric gas that has been involved in over 10 fatal accidents.

He has made over 200 presentations worldwide on Emergency Response, Product Safety, Gas Technology and Environment over the last 25 years. He has campaigned extensively on silane safety. He chaired 12 one day silane safety seminars, in Taiwan, Korea, Singapore, US and Europe starting in 2006. He continues to conduct compressed gas safety and emergency response classes throughout the world. He has taught numerous courses (1-3 day) on compressed gas safety and emergency response and has trained over 10,000 users from government agencies, universities, gas manufacturers and semiconductor fabrication facilities. He has also taught at a number of Fire Academies worldwide, including New York, Honolulu, San Jose, Camden County and Singapore and as well as at 3-4 HazMat Conferences per year. Over 4,500 firefighters have been trained.

Eugene has a Bachelor of Science in Chemical Engineering and a Master in Environmental Engineering. He was honored with the CGA Lifetime Safety award in 1999, Fire Dept of New York Commissioners award in 2007, made a SESHA Fellow in 2009 and received the American Chemical Society Howard Fawcett Award for Contributions to Chemical Safety award in 2011. He has 5 US patents for Gas Safety Devices. He designed the Solkatronic 5502 ERCV (Cylinder salvage vessel) in 1988 that has become the standard in high pressure leaking cylinder containment worldwide. Over 400 are in use worldwide including FBI HMRU and FDNY HazMat 1.

SESHA 2017 Symposium — PDC3

Half-Day Accident Investigation Evidence Gathering

Steve Trammell
Sue Creighton

BSI Services and Solutions; Apple

Course Goals
Teach Students fundamentals of accident scene management and evidence gathering including photographic evidence, interviews and key data to record.

Overview
Two EHS Professionals will lead students through a course involving a simulated injury-incident scene to demonstrate skills for:

Securing a scene
Collecting photographic evidence
Conducting interviews
Gathering key data

The class includes an exercise of gathering incident evidence and evaluation by each team on their own performance.