TMAH Toxicity and Controls Update

Ernest Timlin; Brooke Tvermoes; Thomas Diamond
(SUNY Polytechnic Institute, Albany, NY and IBM Corporation, Boulder, CO)

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TMAH Toxicity and Controls Update Purpose There are a growing number of semiconductor processing applications which propose to use TMAH at high concentrations and sometimes at elevated temperatures. Tool vendors, chemical formulators, and some semiconductor companies may not be aware of TMAH’s high acute systemic toxicity. This presentation describes: – Current information on the acute systemic toxicity in humans and supporting data in animals. – Results of toxicity testing in animals, sponsored by IBM, and others, on the effects of repetitive dermal contact and the potential underlying mechanisms of toxicity. – Evaluation and safety precautions implemented by IBM and others to minimize the potential risk.

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