Understanding SEMI S2-0200 Environmental Requirements

Shree Dharasker (Applied Materials, Santa Clara, California)

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SEMI S2-0200, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, was technically approved and published by the Semiconductor Equipment and Materials Incorporated (SEMI) in February 2000. The new guideline updates the SEMI S2-93, and contains several new requirements for semiconductor manufacturing equipment. The environmental requirements in S2-0200 have been significantly modified with more focus on life cycle analysis and Design for Environment (DfE) principles. In order to inform and educate product design engineers about the new requirements, Applied Materials Environmental, Heath, and Safety (AMEHS) conducted several activities such as, preparing a SEMI S2-93/S2-0200 comparison matrix, developing a product environmental assessment procedure, and updating internal design processes with SEMI S2-0200 requirements. Several requirements have been standardized to achieve consistency across the company. This paper describes Applied Materials efforts to understand and implement the new standard, and incorporate DfE concepts into product design. It is expected that these efforts will result in increasing conformance to SEMI S2-0200 environmental requirements, greater awareness of product environmental issues, and improved DfE performance in the year ahead.

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