Understanding the Effect of Airborne Molecular Contamination on Production Yield and Environmental Management
Di Gangi, Donna M.
(Cal Poly San Luis Obispo)
Airborne molecular contamination (AMC) is of critical concern in the semiconductor industry. The contamination is known to cause failures at various process stages, thus having the potential to reduce process yields. Process yield loss leads to an increase in production demand. Environmental issues surrounding an affected process also increase with higher production requirements. The paper provides a preliminary model that links yield loss from airborne molecular contamination to environmental management requirements.