SESHA 2019 Symposium PDC

IH/OS Essential Toolbox Tools: What-If/Checklist & Qualitative Risk Analysis

Kelsey Forde
Timothy Stirrup

Parvati Consulting LLC, Albuquerque, NM

The course is based on the principles and methodologies presented in “The Guidelines for Hazard Evaluation Procedures”, 3rd Edition (aka Redbook). The Redbook is a standard industry reference for hazard evaluation procedures published by the Center for Chemical Process Safety. This course provides an overview of the Redbook methodologies for performing Hazard Analysis and focuses on the What-If/Checklist technique along with a Qualitative Risk Analysis.

The What-If/Checklist technique combines the creative, brainstorming features of the What-If technique with the systematic features of the Checklist technique. The Qualitative Risk Analysis can be used in combination with many of the traditional Hazard Evaluation techniques described in the Redbook. The integration of a Qualitative Risk Analysis into the Hazard Analysis process helps to identify and address the unmitigated risk, mitigated risk, and adequacy of safeguards/controls.

This course uses interactive discussions coupled with videos presented by the Chemical Safety Board and Discovery Channel’s Engineering Disasters to illustrate how Hazards Analysis can help identify and avoid accidents. Instructors augment discussions with lessons learned reflecting a combined 40+ years of experience in system safety and hazards analysis.

Presenters

Kelsey L Forde, CIH CSP CHMM
(505)967-8917
KLForde@ParvatiCorp.com

Ms. Kelsey Forde is a Certified Industrial Hygienist, Certified Safety Professional, Certified Hazardous Materials Manager, Owner and Principal Environment, Health, and Safety (EHS) Professional and System Safety Engineer for Parvati Consulting, LLC., based in Albuquerque, New Mexico. Kelsey has approximately 15 years of experience as an EHS professional including performing and guiding hazards analyses that adhere to the principles in the Redbook. Ms. Forde’s primary responsibilities and areas of expertise are centered around the identification of workplace hazards and development of consequence analysis associated with hazard analysis, safety assessments, primary hazard screens, readiness reviews, and compliance auditing techniques for a variety of clients including the DOE, commercial, industrial, and private clients.
Ms. Forde is a National Director for the Alliance of Hazardous Materials Professionals, President-Elect for the New Mexico Chapter of the American Society of Safety Professionals, Past-President and Director at Large for the New Mexico Society of Hazardous Materials Managers, and served two consecutive appointed terms on the Albuquerque-Bernalillo County Joint Air Quality Control Board.

Timothy S Stirrup, REM CHMM IH
(505)980-3743
TSStirrup@ParvatiCorp.com

Mr. Timothy Stirrup is a Registered Environmental Manager, Certified Hazardous Materials Manager, Industrial Hygienist, Partner and Principal Environment, Health, and Safety (EHS) Professional with Parvati Consulting, LLC., based in Albuquerque, New Mexico. Tim has over 25 years of experience as an EHS professional including performing and guiding hazards analyses that adhere to the principles in the. Mr. Stirrup’s primary responsibilities and areas of expertise are centered around establishing the framework for clients in Hazard Analysis within a diverse set of industrial facilities including accelerators, semiconductor facilities, R&D laboratories, and dynamic energetic materials testing facilities. Tim is respected for his ability to create highly functional teams and solve diverse, complex problems. Mr. Stirrup provides direct input to Line/Executive Management and Regulators to ensure solutions for continued organizational success. Mr. Stirrup currently serves as President on the New Mexico Society for Hazardous Materials Managers Board of Directors and is continually asked by clients, peers, and professionals in the EHS community to present at both local and national EHS/IH conferences.

SESHA 2019 Symposium PDC

Crash Course on Risk Assessment for Semiconductor Industry: Metals, Organic Agents, Nanoparticles

Andrey Korchevskiy
Daniel Hall
Steven Trammell

Chemistry & Industrial Hygiene, Wheat Ridge, CO; BSI EHS Services and Solutions, Austin, TX

“A crisis of regulations” is haunting manufacturers worldwide: governmental standards don’t exist for many workplace and environmental factors, while most of the existing exposure limits are not health-based. Risk assessment becomes a viable alternative to regulatory paradigm, allowing industry professionals to evaluate new and emerging hazards and establish internal occupational exposure limits. This approach follows the “precautionary principle,” while employing the best available scientific information to prioritize risks and ensure occupational and public health improvement. This PDC will take participants for an intensive, hands-on one-day ride exploring how and when semiconductor industry personnel can use advanced risk assessment methods in their practice. The objective of the class is to demonstrate different methods and techniques used for risk assessment purposes. Structural components of the risk assessment paradigm (hazard identification, exposure assessment, dose-response assessment, and risk characterization) will be described from a practical point of view. The participants will learn via class exercises how to obtain & interpret risk metrics, including absolute & relative risk, attributable risk fraction, unit risk, slope factor, and reference concentration and dose.The audience will participate in interactive exercises, including a statistical risk simulation, demonstrating the probabilistic nature of hazards and health outcomes. The class materials will be based on case studies intended to refresh the audience’s knowledge on hazardous agents specific to the industry, including, arsine, phosphine, methylene chloride, hydrofluoric acid (HF), tetramethylammonium hydroxide (TMAH), and engineered nanoparticles. Steve Trammell, PE, CSP, CCPSC, CHMM – Principal Consultant BSI EHS Services and Solutions Austin, TX Steve has 32+ years’ experience in mechanical design engineering, system safety, hazards analysis and risk management within the high technology, aerospace, pharmaceutical, explosives and petrochemical industries. His experience includes development of global risk management programs, manufacturing startup support, compliance and risk-based auditing. Steve is a member of the SESHA Board of Directors (2010-present) and a past President of the organization (2013-2014). He is a member of the NFPA 318 Technical Committee and has co-authored multiple peer-reviewed journal publications focused on risk management. Andrey Korchevskiy, PhD, DABT, CIH Chemistry & Industrial Hygiene, Inc. Wheat Ridge, CO A certified toxicologist and certified industrial hygienist, Andrey is an expert in risk assessment modeling for industrial hygiene and environmental health applications. He arranged and taught best-selling risk assessment classes in the US, UK, Canada, Mexico, Colombia, and other countries. He has over 150 scientific publications in the fields of risk analysis, epidemiology, toxicology, and biostatistics. He is a full member of the Society of Toxicology (SOT), Distinguished Lecturer of AIHA, a recipient of AIHA Outstanding Project Team Award, and AIHA Volunteer Group Service Awards in both 2016 and 2018. Dan Hall, CIH, PE Chemistry & Industrial Hygiene, Inc. Wheat Ridge, CO Dan is a certified industrial hygienist with a decades long experience in engineering controls, statistical data analysis, and computer modeling. He has presented at national conferences on statistical analytical methodologies and computational fluid dynamics (CFD) modeling techniques utilized in retrospective exposure characterization of workers and outdoor contaminant dispersion for risk assessment activities. He is a member of the American Society of Civil Engineers (ASCE), the American Society of Heating, Refrigerating, and Air-Conditioning Engineers (ASHRAE), the national and local American Industrial Hygiene Association (AIHA), and is an active member of the national AIHA Engineering Committee.

SESHA 2019 Symposium PDC

Fundamentals and EHS Challenges of Semiconductor Manufacturing

Aaron Zude
Sue Creighton

Facilities & Safety Solutions, Newark, CA. and Sue Creighton, Apple Inc., Santa Clara, CA

This is an introduction to EHS in semiconductor and high-tech manufacturing intended for both students and professionals that are new to the semiconductor industry and its operations. An experienced semiconductor EHS professional, recognized in his or her area of expertise, will present the topics. This will be a full day PDC. Students will be provided with handouts of each presentation. PDC topics include an overview of:

• Semiconductor fabrication clean rooms and facilities equipment
• Semiconductor fabrication processes & hazardous materials used
• Occupational health and safety hazards and controls in a semiconductor fabrication facility
• Semiconductor fabrication environmental considerations
• Semiconductor fabrication tool product safety requirements and SEMI EHS standards including S2, S8 and S23
• Semiconductor fabrication clean room and facility building & fire codes
• Semiconductor fabrication tool installation permitting & commissioning
• Semiconductor fabrication clean room life safety controls & emergency response

PDC Outline

SESHA 2019 Symposium Abstract

Doing More with Less: A Framework for Advocating for EHS

Joe Morgan
(siY, LLC)

With overall corporate budgets under pressure, corporate EHS budgets are squeezed and being challenged to do more with less. How can you advocate for more budget dollars for EHS and investments in programs from your company?

Joe Morgan, Founder and CEO of siY, LLC, will discuss how the proper context and company alignment enables better, more informed decision-making when it comes to EHS investments and programs.

The key is to engage, align, and enroll all levels of the company (from the leadership team to every employee) toward the common goal focused of doing more with less for EHS. Joe will provide a simple framework to address the challenges facing businesses in this area, including:

• Alignment – Insights from the top to bottom of the organization
• Metrics – to make the business case
• Ownership – engagement to achieve results
Joe brings a unique view of the importance of EHS, both from being a practitioner and leader. He started his career as an engineer at Shipley Company, and then rose through the ranks to become a CEO, holding CEO positions at both Fortune 500 public companies and privately-held growth companies.

SESHA 2019 Speaker Biography

Joe Morgan, Jr.
siY, LLC

Joe believes that if you are relentless in building the right environment for people, then extraordinary outcomes can result. People and curiosity are always at the core of his leadership approach. Having spent his career serving as a CEO or Member of the Board for large public as well as start-up and growth companies, Joe brings a wealth of experience and demonstrated leadership in transformational business environments. He has been successful in driving value and achieving strategic growth objectives in many industry sectors, including service, technology, and manufacturing. Joe has a proven track record for improving performance by integrating the strategy, culture, and customer within an operational framework. In 2016, he founded siY, LLC (Be safe. Be Inspired. Be YOU), a company that helps leaders achieve strategic objectives in an environment where people can thrive. Safety and health are always at the top of his agendas with clients.

Company experience: Standard Register, Sony Chemical Corp., Uniguest, eflatbed.com
Education: MBA, Clark University; BS, Worcester Polytechnic Institute; BA, College of the Holy Cross.

ESHA 2019 Symposium Abstract

Working Session: Arc Flash Hazards – Applying NFPA 70E In Semiconductor Cleanrooms

Aaron Zude
(Facilities & Safety Solutions)

Applying NFPA 70E-2018: “Standard for Electrical Safety in the Workplace” in a semiconductor cleanroom environment presents unique challenges when developing protective measures for arc flash hazards. This session will be a facilitated open-forum working session for participants to ask questions and raise concerns related to work tasks such as verifying deenergized condition as part of LOTO and the use of test instruments for testing, troubleshooting and voltage measurements in a cleanroom environment. More importantly however, the session will illicit an exchange of safety-related work practices that have been developed within the industry for such tasks. A brief overview presentation on NFPA 70E-2018 will be provided, followed by the open-forum working session. The intended outcomes of the session are an open exchange of protective measures that have been developed for arc flash hazards, collection of issues and concerns requiring further attention, and if warranted, the establishment of an informal industry working group.

SESHA 2019 Speaker Biography

Aaron Zude
Owner Facilities & Safety Solutions

Aaron is the owner & principal consultant at Facilities & Safety Solutions, which he founded in 2002. He has a Master’s Degree in Occupational Safety & Health, is a Certified Safety Professional, and has been supporting EHS in the semiconductor and high tech industry for 30 years. Prior to starting Facilities & Safety Solutions, Aaron was the Sr. Director of EHS for SEMI, and has also worked in EHS and facilities management positions at Lawrence Berkeley National Laboratory, Asyst Technologies, Cirrus Logic, National Semiconductor, and Varian Associates. Aaron’s client base spans governmental, semiconductor, pharmaceutical, bio-technology and general industry.

SESHA 2019 Symposium Abstract

How the Semiconductor Industry Evolved from Social Responsibility to Social Innovation and How Today’s Management Systems Can Be Used to Support CSR/CSI Programs

Sandy Skees; Scott Hambleton; Melita Elmore
(BSI, San Jose, CA and Samsung Semiconductor, Austin, TX )

This panel presentation by Scott Hambleton, CSP, (Applied Materials Sr. Director, Environmental, Health and Safety & Sustainability), Sandy Skees (BSI US Practice Leader for Sustainability/CSR/ESG) and Melita Elmore (BSI Lead Auditor) will first cover the early days of semiconductor social responsibility , with initial simple philanthropy efforts, and compare those days to current semiconductor global Corporate Social Responsibility (CSR) activities. In addition, semi-conductor companies that have ISO certification are now becoming increasingly aware of the importance of Corporate Social Responsibility programs (CSR) and how those programs are merging with growing ESG requirements (amid increasing pressure from customers and investors). Semiconductor companies are now not only receiving information requests about their CSR programs but also on their Environment, Social and Governance (ESG)) or Corporate Innovation (CSI) strategies. Scott will cover how social responsibility has changed, especially within the last decade of supply chain concerns, investor interest and climate change issues. He will discuss how in the past, social responsibility meant that those programs were usually separate from the total business function and vision, and how they were driven more by philanthropic intent and EHS compliance operational activities. CSR activities were fueled by allocating siloed budget and people, and often had to be balanced with profit-making. Sandy will discuss the current and growing emphasis on Environmental, Social and Governance (ESG) issues, and the growing evolution from social responsibility to social innovation. ESG, which is slowly replacing “sustainability” within large companies with investment pressures, is becoming defined as a strategy that combines corporate assets with others (e.g. NGOs/government) to co-create solutions to complex economic, social and environmental issues, usually in tandem with the United Nations Sustainability Development goals (UN SDGs). Sandy will also discuss how within ESG and Social Innovation goals, operational and social (people) assets are fully utilized and not separate from the business functions, but rather are driven by overall business strategic intent. Melita will then present how CSR programs can have a synergist connections to existing management system approaches and describe some example CSR tools which can support EMS and/or SMS frameworks. The presentation will also address how CSR and Management Systems can also be correlated with the United Nations Sustainable Development Goals (UN SDGs). The concluding theme of the presentation will be to illustrate that a management systems (MS) approach can support all areas of CSR and CSI programs, including ESG concerns and tie-in with UN SDGs. Many semiconductor companies may have either a CSR or an MS program, but even if they have both- the programs are usually not coordinated, leading to duplicative efforts or CSI/ESG inefficiencies. Correlation between MS and CSR/CSI/ESG strategies both strengthen the organizations ability to plan, to implement and to act upon critical internal and external issues, and to demonstrate their ongoing commitment to evolve and prosper as a 21st Century company.

SESHA 2019 Speaker Biography

Scott Hambleton, Sandy Skees, Melita Elmore
Managing Principal BSI, San Jose, CA and Samsung Semiconductor, Austin, TX

Scott Hambleton- Applied Materials Sr. Director, Environmental, Health and Safety & Sustainability. Scott is a Certified Safety Professional (CSP) with over twenty years of management and technical experience in EHS, Fire Protection, Facilities and Risk Management, and Project Management. Sandy Skees- Managing Principal, leads BSI’s US Sustainability/ESG and Social Responsibility Practice. Her expertise is in programs ranging from sustainability and corporate social responsibility, to worker safety, business continuity planning, responsible supply chain, and EHS programs, especially for the technology sector. She has extensive experience in developing messaging and communications strategy for sustainability reporting (including CDP, GRI, and CSR reports). Prior to coming to BSI Professional Services, Sandy served as Managing Director for Fenton Communications West Coast, accelerating progress through social change communications. Over the years, her work with corporations, nonprofits, and NGOs has been focused on consumer products, recycling and waste, renewable energy, supply chain and human rights. Melita Elmore, Principal Consultant, CSR/Sustainability and ISO Lead Auditor has over 20 years’ experience as a business owner, senior project manager, industry executive and state regulator, and has worked on management system auditing and CSR programs with several semiconductor companies. She is experienced in ESG/UN SDGs and corporate social responsibility issues, EHS management systems, safety and environmental regulatory impacts, policy analyses and organizing project research studies. She is also experienced in waste minimization, water and energy conservation; EHS curriculum development and training delivery; due diligence; stakeholder outreach and participation; and Supply Chain multi-media auditing

SESHA 2019 Symposium Abstract

Building a High Performance EHS Organization

Paul Connor
(DuPont, Marlborough, MA)

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For over 30 years, Paul has been involved with more than 23 acquisitions and mergers in the electronics industry. The process of integrating and building new Environment, Health and Safety organizations is not a “one size fits all” approach (which happens too frequently) and depends on the specific type of business model. An approach will be described to help understand how to define your company’s EHS risk management tolerance/ targets, understand your business model, delineate critical success factors and then build a successful organization. The organization must then operate to deliver both EHS value as well as creating business value.

SESHA 2019 Speaker Biography

Paul Connor
Director EHS DuPont, Marlborough, MA

Paul serves as Director of Global EH&S for the Electronic Materials Business Group of Dow (formerly Rohm and Haas and formerly Shipley Company). As part of the Dow and DuPont merger, Paul will be leading the Global EH&S organization for the future DuPont Electronics and Imaging Business. During Paul’s 30 year tenure he has had global responsibility for all areas of EH&S, Product Stewardship, Toxicology, and Sustainability. Prior to this Paul was the Corporate EH&S Manager for Millipore Corporation and also an Industrial Hygienist for W.R. Grace. He holds a B.S. in Health Sciences from Merrimack College and a M.S. in Public Health from the University of Massachusetts. Paul has been a Certified Industrial Hygienist since 1985 and a member of AIHA since 1981. Paul has been a member of SESHA since 1988 and served on the Board of Directors between 2006 – 2016. Paul served as SESHA President for two terms from 2009-2010 and again from 2014-2015 and is an elected Fellow of SESHA.

SESHA 2019 Symposium Abstract

Exposure and Risk Assessment Strategies for Managing Nanomaterials

William Cyrs; Brooke Tvermoes; Marisa Kreider
(1) Cardno ChemRisk, San Francisco, CA; 2) IBM Corporate Environmental Affairs, Durham, NC; 3) Cardno ChemRisk, Pittsburgh, PA)

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Engineered nanomaterials (ENMs) are an important technology to the semiconductor industry, but represent a challenge for occupational health professionals (OHP) in evaluating worker exposure and risk. Such characterization is critical not only to ensure worker health, but also to aid in the establishment of evidence-based exposure guidelines for these materials. In this three-part workshop, we will explore strategies for exposure and risk assessment for ENMs that aid in decision-making regarding new material development and implementation of controls. In the first part, we will present specific experience and challenges from an industry representative as it relates to nanomaterial exposure and risk assessment. In the second part, we will explore available techniques for exposure assessment. Specific exposure assessment methods used to evaluate exposure to ENMs in semiconductor manufacturing primarily include number concentration measurement by real-time instrumentation, chemical identification using filter-based sampling coupled with electron microscopy and energy-dispersive spectroscopy (EM-EDS), and mass concentration measurement. However, there is still no standard methodology, and the methods described in the literature use multiple equipment and are costly and time-consuming. We will provide an overview of major available exposure assessment techniques for nanoparticles, including strengths and weaknesses of each technique, and will highlight a novel method that combines the use of an electrical low-pressure impactor with offline analysis by EM-EDS. Equipped with knowledge of these methods, OHPs should be able to design an efficient exposure assessment strategy that is time- and cost-saving and can be used until standardized and inexpensive methods become available. In the third part of this presentation, we will present a hierarchical human health risk ranking framework, which can be used to identify and prioritize hazards and health risk scenarios involving nanomaterials. This framework considers characteristics of the material and its use relating to exposure probability as well as physiochemical properties and toxicology data relating to hazard to score potential risk associated with a given material. The intent of this framework is to provide a streamlined method to identify and prioritize risk assessment, toxicity testing, and exposure control efforts for ENM use in a variety of scenarios and lifecycle stages. This presentation will review the framework and an example of how to evaluate ENMs, using two exemplar carbon-based materials. This workshop will provide attendees with tools to aid in managing worker health and safety as it relates to use of nanomaterials in the workplace.

SESHA 2019 Speaker Biography

William Cyrs, MS, CIH
Supervising Health Scientist 1) Cardno ChemRisk, San Francisco, CA

Mr. William Cyrs is a Supervising Health Scientist with Cardno ChemRisk. His principal areas of training and expertise include industrial hygiene, exposure assessment, exposure reconstruction, hazard communication, occupational exposure limit development or management, and aerosol technology with an emphasis on nanoparticles. He has analyzed data or assessed risk regarding 2,3-pentanedione, acrylonitrile-butadiene-styrene or ABS, asbestos, BTEX, carbon monoxide, diacetyl, formaldehyde, hydrogen sulfide, paint volatiles, general VOCs, and welding fume exposure. Mr. Cyrs has worked to develop novel methods to assess occupational exposures to nanoparticles, including both filter-based sampling and sampling using complex electronic equipment, and has used all of the major methods available in his practice. Brooke Tvermoes, PhD, DABT Dr. Brooke Tvermoes is a board certified toxicologist and manager of IBM’s global environmental and chemical management programs with experience in exposure assessment, risk assessment, and regulatory support covering a broad range of industrial chemicals and metals. Her primary areas of interest include quantitative human health risk assessments and the development of health based toxicity values. Marisa Kreider, PhD, DABT Dr. Kreider is a board-certified toxicologist and Senior Managing Health Scientist with Cardno ChemRisk and has 12 years of experience assisting clients with toxicology, risk assessment and product stewardship needs. She has managed a variety of project types, including reviewing of toxicological literature for a variety of chemical types; designing, managing and interpreting toxicity studies; conducting or critiquing dose response assessments for chemicals or particulate; and conducting quantitative or qualitative risk assessments of consumer products. She received her PhD from the Department of Pharmacology and Cancer Biology at Duke University in 2005.

SESHA 2019 Symposium Abstract

Occupational Exposure Banding for Semiconductor Nanomaterials

John Baker; Michele Shepard
(BSI EHS Services and Solutions, The Woodlands, TX / Colden Corporation, Albany, NY)

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Advanced materials, including nanomaterials, are being developed at a rapid pace, too quickly to allow time for the development of an occupational exposure limit by a recognized, authoritative technical body. In the interim, responsible actions can be taken to provide for the health and safety of potentially exposed people handling and using these materials by adopting a control or exposure “banding” approach to guide decisions on equipment design, administrative controls and personal protective equipment. This interactive Roundtable will explore current guidance for banding and discuss approaches using example exposure scenarios and questions from attendees.

SESHA 2019 Speaker Biography

John Baker / Michele Shepard
Principal Consultant BSI EHS Services and Solutions, The Woodlands, TX / Colden Corporation, Albany, NY

John Baker – John Baker, CIH is a Principal Consultant for BSI EHS Services and Solutions. He holds a B.A. in Physics, an M.S. in Environmental Engineering, and has performed graduate work in Biophysics at the State University of New York at Buffalo. John has over 40 years of experience in industrial hygiene and environmental management and consulting. He served as Deputy Director of the Center for Biological and Environmental Nanotechnology at Rice University, one of the original six National Science Foundation funded Nanoscale Science and Engineering Centers. John has completed a number of exposure assessments for carbon nanotubes resulting in a quantitative assessment of risk for protection of employees and the public. He received ABIH Certification in the Comprehensive Practice of Industrial Hygiene in 1978 and became an AIHA Registered Professional in SDS/Label Authoring in 2012. Mr. Baker is the Past Chair of the American Industrial Hygiene Association Nanotechnology Working Group, a member of the American Society of Safety Engineers Industrial Hygiene Special Interest Group, and a technical member of ASTM Committee E56 on Nanotechnology. He was elected a Fellow of the AIHA in 2017. Mr. Baker\\\’s main professional interest is in exposure assessment and hazard communication related to nanomaterials. — Michele Shepard – Michele N. Shepard, PhD, MS, CIH has 25 years of environmental health and safety experience in consulting, industry and academic research. Michele is a Certified Industrial Hygienist and works as a Vice President and Senior Scientist at Colden Corporation. She holds a Doctor of Philosophy in nanobioscience from the University at Albany College of Nanoscale Sciences and Engineering, a master’s degree in Environmental Studies from the University of Oregon, and a bachelor’s degree in Industrial Hygiene and Environmental Toxicology from Clarkson University. She received an EPA STAR Fellowship and conducted research on exposure assessment and control banding methods for engineered nanoparticles used in the semiconductor industry. Dr. Shepard is active on the AIHA Nanotechnology Working Group and a member of the Nanotech Working Group Executive Committee.

SESHA 2019 Symposium Abstract

Assessing Health Risks Associated with Specialty Chemical Handling in the Semiconductor Industry: Employing Occupational Exposure Banding Strategies

Rachel Zisook; Andy Monnot
(Cardno ChemRisk)

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The semiconductor industry uses a broad range of specialty chemicals in the manufacture of electronic components and products, such as silicon wafers and integrated circuits. Workers involved in the manufacture of these electronic products may be exposed to a multitude of chemicals over the course of a workday and throughout their careers. Many of the compounds used in the industry have been associated with increased rates of cancer, birth defects, and other serious illnesses. In the absence of established occupational exposure limits and risk management practices, there are a variety of methods that can be applied to evaluate potential health risks in order to protect and inform workers. For example, in 2017, the National Institute for Occupational Safety and Health (NIOSH) released draft guidance for Occupational Exposure Banding (OEB). This guidance describes a systematic process for connecting qualitative or quantitative hazard information on selected health effect endpoints to defined target inhalation exposure level ranges, which are expected to be protective of worker health. This presentation will discuss utilizing the NIOSH OEB approach to evaluate and manage health risks associated with the use of specialty chemicals in the semiconductor industry. Additionally, this presentation will discuss methods for deriving occupational exposure limits for chemicals in which sufficient toxicological information is available.

SESHA 2019 Speaker Biography

Rachel E. Zisook
Senior Health Scientist Cardno ChemRisk

Rachel Zisook, MS, CIH is a Senior Health Scientist at Cardno ChemRisk. She is a board certified industrial hygienist with over nine years of varied professional experience in industrial hygiene, exposure reconstruction, human health risk assessment, regulatory compliance, database management, and health risk prioritization. Ms. Zisook has been involved in assessing risk to workers, communities, and consumers exposed to a variety of chemicals, such as asbestos, silica, metals, polycyclic aromatic hydrocarbons (PAHs), volatile organic hydrocarbons (VOCs), diacetyl, polychlorinated biphenyls (PCBs), pharmaceutical and personal care products (PPCPs), bioaerosols, and perfluorinated compounds (PFCs). Andy Monnot, PhD, Managing Health Scientist Dr. Monnot received a PhD in Toxicology from Purdue University. He works as a Managing Health Scientist at Cardno ChemRisk and has over seven years of professional experience. His primary professional practice areas include metals toxicology, exposure/risk assessment as well as medical device and consumer product safety. During his tenure at Cardno ChemRisk, Dr. Monnot has performed risk assessments, toxicological assessments, and chemical reviews for a number of clients on a variety of compounds including industrial chemicals, environmental contaminants, food additives, and personal care products.

SESHA 2019 Symposium Abstract

PFAS Roundtable I – PFAS Overview

Mike Carney, Larry Culleen, John Cuthbertson, Marissa Kreider
(Arnold & Porter)

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Per- and Polyfluoroalkyl Substances (PFAS) are a class of emerging contaminants composed of more than 3,000 man-made, fluorinated, organic chemicals (Buck et al., 2011, Wang et al., 2017). The actual number of chemicals is constantly changing, as some PFAS are no longer produced due to regulatory and voluntary actions, while new ones are created as alternatives. Due to their unique chemical properties, PFAS have been commercially used from the 1940’s in many industries worldwide for a wide variety of applications. PFAS issues are a growing environmental concern. While previously focused on items such as non-stick cookware, PFAS are ubiquitous and pervasive in industry and consumer products, and are a growing concern in drinking water supplies. This roundtable will provide an overview of the PFAS issue. Mike Carney, AlterEcho, will provide an introduction to PFAS including its uses and releases. Larry Culleen, Arnold and Porter, will familiarize participants with international and U.S. regulatory actions affecting production and use of PFAS category chemicals, and litigation threats. John Cuthbertson, AECOM, will discuss PFAS characterization methodologies and management strategies including potential PFAS use in the semiconductor industry and potential liabilities the industry may face. Marisa Kreider, Cardno Chemrisk, will compare physiochemical; fate and transport; and toxicological properties associated with a variety of PFAS in an effort to understand potential impacts of substitution to human health and the environment. After the presentations, a roundtable discussion will be held with topics to include risk management strategies to minimize future liabilities.

SESHA 2019 Speaker Biography

Larry Culleen
Partner, Arnold & Porter LLP Arnold & Porter

Mike Carney is an environmental toxicologist and ecological risk assessor with more than 15 years of experience in biogeochemistry, aquatic ecology, aquaculture, field work, impact assessments and laboratory experiments. He has developed restoration plans, designed databases for use in statistical analyses, and quantified the effects of industrial chemicals on ecological communities—as well as quantifying the environmental benefits from restoration projects. He has worked on significant national environmental remediation projects, such as the Bonita Peak Mining District (Gold King Mine) toxic release in Colorado and Utah, and the Deepwater Horizon oil spill in the Gulf of Mexico. Larry Culleen: Arnold & Porter represents clients on administrative, regulatory, and enforcement matters involving federal agencies such as the US Environmental Protection Agency (EPA), the US Department of Agriculture, the US Food and Drug Administration, and the Consumer Product Safety Commission. Larry has broad experience advising clients on US and international regulatory programs that govern commercial and consumer use chemicals, pesticides and antimicrobials, as well as the products of biotechnology and nanoscale materials. Prior to joining Arnold & Porter, Larry held significant positions at EPA serving as a manager in various risk-management programs which oversee pesticides, chemical substances, and biotechnology products. John Cuthbertson is an AECOM PFAS Practice Lead with over twenty-seven years of environmental consulting experience supporting chemical, industrial, and oil and gas sectors. Mr. Cuthbertson currently manages multiple projects involving PFAS constituents and is experienced in analytical testing and methodologies, environmental fate and transport, assessment and investigation, and remedial technologies. Dr. Marisa Kreider is a board-certified toxicologist and Senior Managing Health Scientist with Cardno ChemRisk and has 12 years of experience assisting clients with toxicology, risk assessment and product stewardship needs. She has managed a variety of project types, including reviewing of toxicological literature for a variety of chemicals; designing, managing and interpreting toxicity studies; conducting or critiquing dose response assessments for chemicals or particulate; and conducting quantitative or qualitative risk assessments of consumer products. Specifically, Dr. Kreider has supported regulatory agencies in the development of screening values for PFAS, and has presented on PFAS hazard and dose response assessment at scientific conferences. She received her PhD from the Department of Pharmacology and Cancer Biology at Duke University in 2005.

SESHA 2019 Symposium Abstract

PFAS, PFOA and the USEPA: What it All Might Mean for Manufacturers

Rob Young; Mike Carney
(AlterEcho, Chantilly, VA)

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Like toxic PCBs before them, development and implementation of PFAS and related PFOA and their management is widespread, rapid and undermined by data gaps. PFAS/PFOA issues are a growing environmental concern across the US. While previously focused on items such as non-stick cookware,PFAS/PFOA compounds are ubiquitous and pervasive in industry and consumer products,and are a growing concern in drinking water supplies. Virtually every American has been exposed, with PFAS considered highly toxic (e.g., cancer, endocrine disruption, developmental effects) at very low parts-per-trillion levels. As we refine our understanding of associated uses, releases and how people are exposed, so has the scientific community redoubled efforts to characterize PFAS/PFOA–from the perspectives of analytical methodologies, health risk, and remedial strategy. As science and the law converge, information brought to light drives administrative authority decision criteria, compliance standards, and control technology options. The USEPA, for example, is evaluating the need for a maximum contaminant level (MCL) for PFOA and PFOA by designating PFOA and PFOS as “hazardous substances,” while also currently developing groundwater cleanup recommendations for PFOA and PFOS at contaminated sites. This presentation will address knowns and unknowns regarding PFAS characterization, options for efficient control technologies for chip manufacturers, and risk management strategies to minimize future liability.

SESHA 2019 Symposium Abstract

The Use of Per- and Polyfluoroalkyl Substances (PFAS) in the Semiconductor Industry and Potential Liabilities

John Cuthbertson
(AECOM, Austin, TX)

Per- and Polyfluoroalkyl Substances (PFAS) are a class of emerging contaminants composed of more than 3,000 man-made, fluorinated, organic chemicals (Buck et al., 2011, Wang et al., 2017). The actual number of chemicals is constantly changing, as some PFAS are no longer produced due to regulatory and voluntary actions, while new ones are created as alternatives. Due to their unique chemical properties, PFAS were commercially used from the 1940’s in many industries worldwide for a wide variety of applications. Some of the documented PFAS uses have been used in coatings for textiles, paper products, and cookware and to formulate some firefighting foams, and have a range of applications in the aerospace, photographic imaging, semiconductor, automotive, construction, electronics, and aviation industries (OECD, 2013; Kemi, 2015; USEPA 2017). Various state regulatory agencies have conducted or are in the process of sampling Wastewater Treatment Plants (WWTPs) or have requested sites with ongoing environmental cleanup activities to sample for PFAS. Michigan has asked all of the 90 WWTPs that receives industrial influents to also identify and sample their potential industrial PFAS sources and is currently conducting a statewide WWTP evaluation for PFAS including agricultural fields where biosolids have been land applied. Sampling for PFAS at any sites including facilities associated with the semiconductor industry have been requested. This presentation will provide an overview of PFAS development, chemistry, uses, primary exposure routes, potential health effects as well as the current regulatory climate, public perception, and potential challenges. Presentation will also detail potential PFAS use in the semiconductor industry and discuss potential liabilities the industry may face.

SESHA 2019 Speaker Biography

John M. Cuthbertson, CPG
EHS Section Manager AECOM, Austin, TX

John Cuthbertson is an AECOM PFAS Practice Lead with over twenty seven years of environmental consulting experience supporting chemical, industrial, and oil and gas sectors. Mr. Cuthbertson currently manages multiple projects involving PFAS constituents and is experienced in analytical testing and methodologies, environmental fate and transport, assessment and investigation, and remedial technologies.

SESHA 2019 Symposium Abstract

Comparison of PFAS: Implications for Hazard, Exposure and Risk Assessment

Marisa Kreider
(Cardno ChemRisk)

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Per- and polyfluorinated alkyl substances (PFAS) have been and continue to be used in the semi-conductor industry, including in etching and resist materials, polymers used in processing, as well as manufacturing equipment (valves, tanks, and pumps) to ensure the clean environment necessary for electronics manufacture. Some of these chemistries, such as perfluorooctanoic acid (PFOA) and perfluorooctane sulfonate (PFOS) are facing regulatory restrictions and/or have been voluntary phased out of manufacture in the United States. In place of these chemistries, alternate PFAS have been developed for use in a wide variety of industries, with a focus on shorter chain compounds thought to be less environmentally and biologically persistent than PFOA and PFOS. The U.S. EPA and state-based environmental agencies have established health-based screening criteria for PFOA, PFOS and a variety of their substitutions. Furthermore, the U.S. EPA has recently released draft assessments of GenX and perfluorobutane sulfonate (PFBS). This presentation will compare physiochemical; fate and transport; and toxicological properties associated with a variety of PFAS, including PFOA and PFOS as well as a many of substitute chemistries, in an effort to understand potential impacts of substitution to human health and the environment.

SESHA 2019 Speaker Biography

Marisa L. Kreider, PhD, DABT
Senior Managing Health Scientist Cardno ChemRisk

Dr. Kreider is a board-certified toxicologist and Senior Managing Health Scientist with Cardno ChemRisk and has 12 years of experience assisting clients with toxicology, risk assessment and product stewardship needs. She has managed a variety of project types, including reviewing of toxicological literature for a variety of chemicals; designing, managing and interpreting toxicity studies; conducting or critiquing dose response assessments for chemicals or particulate; and conducting quantitative or qualitative risk assessments of consumer products. Specifically, Dr. Kreider has supported regulatory agencies in the development of screening values for PFAS, and has presented on PFAS hazard and dose response assessment at scientific conferences. She received her PhD from the Department of Pharmacology and Cancer Biology at Duke University in 2005.

SESHA 2019 Symposium Abstract

PFAS Roundtable II – Semiconductor Industry and Supply Chain Perspective

Laurie Beu,Moderator Robert Bonderer; Bob Leet, Lauren Crane
(Laurie S. Beu Consulting, JSR, Intel, SEMI PFOA WG)

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Per- and polyfluoroalkyl substances (PFAS) are critical components of semiconductor process chemistries and may also be found in advanced semiconductor manufacturing equipment, parts, and related fab infrastructure. PFAS are facing increasing regulatory restrictions. Roundtable participants will discuss why PFAS are used, the challenges to replacement, and the need for increased communication and cooperation among semiconductor supply chain members. Robert will discuss why PFAS are necessary in semiconductor lithography formulations… Bob will discuss: 1) the technology needs and difficulty in implementing alternative chemistries, 2) the difficulties of detecting and treating extremely low concentration chemistries in large volume wastewater, 3) the uncertainty in identifying PFAS of concern, and 4) the difficulties of dealing with confidentiality issues around proprietary chemical formulations. Lauren. chair of the SEMI PFOA WG, will provide a high level view of PFOA in fluoropolymers, where they may be found in equipment, complexity of the supply chain, and the challenges posed by restriction in article regulations.

SESHA 2019 Speaker Biography

Bob Leet, Robert Bonderer, Lauren Crane
Principal Laurie S. Beu Consulting, JSR, Intel, SEMI PFOA WG

Robert (Bob) Leet is an Intel Technologist, and Senior Supply Chain EHS Engineer at Intel Corporation, in Portland, Oregon, USA; where he has been employed for 24 years. He holds a Bachelor’s and Master’s degree in Chemical Engineering from Arizona State University, his Master’s degree focusing on Semiconductor Processing and Manufacturing. His specialties are in the U.S. TSCA regulation, and regulatory impacts to process technologies for Intel’s Global Supply Chain organization. He is the holder of seven patents for semiconductor devices and waste treatment technologies. He is a published author in three journals, and has published many industry papers related to chemical regulatory, conflict minerals and corporate responsibility topics. Bob is a member of the US Semiconductor Industry Association, and the World Semiconductor Council’s EHS Task Force, as well was a founding member at the Responsible Business Alliance (RBA, formerly EICC), and developed and led the Responsible Minerals Initiative (RMI, formerly CFSI). Lauren Crane has been the leader of the SEMI PFOA working group since its formation out of the PFOS working group in early 2017, and has been a leading contributor to the SEMI REACH working group, and others for many years prior to that. Lauren has been working with design teams for semiconductor manufacturing equipment producers since 1985 and with related product compliance topics since 1995. He also has contributed to SEMI standards development task forces since that time and is currently also the co-leader of the North American chapter of the SEMI International Compliance and Regulatory Committee (ICRC), and the S23 Energy Efficiency global task force. Lauren works for Tokyo Electron as their US Product Environmental Compliance manager. Robert Bonderer is the EH&S Manager for JSR North America Holdings, Inc. Robert holds a Bachelors and Masters degree in chemical engineering from the University of Riverside, California. Robert was an environmental consultant specializing in air, waste, and hazardous materials programs for a variety of industrial clients, including semiconductor fabs for eight years, and has been EH&S Manager at JSR for 2 years. Robert manages the regulatory compliance programs and product stewardship programs at JSR, including Toxics Substance Control Act (TSCA), DEA controlled substance programs, Green Chemistry, Globally Harmonized System of Classification and Labeling of Chemicals (GHS), in addition to management of environmental and safety programs at it’s Sunnyvale and Oregon facilities.

SESHA 2019 Symposium Abstract

Fate of HBr during F-GHG Abatement

Joe Van Gompel; Jim L’Heureux; Michael Larsen
(Applied Materials, Santa Clara CA)

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Some semiconductor etch processes utilize HBr or a combination of HBr + Cl2, along with fluorinated greenhouse gases (F-GHGs) such as SF6, CF4, and others. Burn-wet abatement is commonly used to destroy the F-GHGs. A new abatement approach will be discussed for abatement of these materials.

SESHA 2019 Speaker Biography

Joe Van Gompel
Senior Applications Specialist Applied Materials, Santa Clara CA

Joe Van Gompel is Senior Applications Specialist and has been with Applied Materials for 4 years. Before that Joe worked as an abatement specialist at Edwards. Joe has a PhD in chemistry from the University of Illinois. Joe has attended every SESHA Annual Symposium since 1996 and has presented over a dozen papers over that time.

SESHA 2019 Symposium Abstract

Reducing CF4-Emissions by smart control of abatement parameters

Andreas Frenzel
(DAS Environmental Expert GmbH)

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Combustion is the most common treatment for removal of PFCs from waste gas of semiconductor etch processes. Combustion is also employed for treatment of CVD process waste gas, where CF4 may appear as a by-product of chamber cleaning chemistry. Smart setting of abatement system burner conditions allows to reduce CF4 emissions in both types of processes. Presently communication from the process tool allows only switching between high and low burner settings. Based on results from laboratory tests we want to discuss how smart control of the abatement system, using communication of actual process conditions, may help to reduce emissions and save energy.

SESHA 2019 Speaker Biography

Andreas Frenzel
Innovation Manager DAS Environmental Expert GmbH

Since October 1999 Dr Andreas Frenzel has been employed by DAS Environmental Expert in a variety of positions including Director of Product Development. He is now holding the position of Innovation Manager, evaluating future market developments. Alongside his professional commitment, he graduated as Master of Business Administration at the Donau-University Krems/Austria in 2011.Previously he worked as a Postdoc at the Université des Sciences et Technologies de Lille/France and the National Institute of Resources and Environment in Tsukuba/Japan. He completed his Doctorate in Natural Sciences in 1997 at the University of Hannover and a diploma degree in Physics at the University of Heidelberg in 1993.

SESHA 2019 Symposium Abstract

The Science of Exhaust Management

Madhuri Korampally; Steve Cottle
(Edwards, Albany, NY / Edwards, Clevedon, UK)

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Perfluorinated compounds (PFCs) were incorporated into semiconductor processing to obviate the use of ozone depleting substances, such as chlorofluorocarbons. However, PFCs have been shown to strongly contribute to global warming due to the behaviour of the carbon-fluorine bond. Furthermore, PFC molecules are quite stable due to the strength of the carbon-fluorine bond. Therefore, it is crucial to understand the chemistry of these molecules and the role it can play in successfully destroying PFCs and then safely treating the hazardous and corrosive by-products safely. To that end, this talk will first discuss the periodic table and its implications on elemental reactivity. Only by fundamentally understanding chemical behaviour can proper abatement strategies by formulated. After this primer, specific chemical families used in semiconductor processing, such as PFCs, will be discussed in more detail regarding their chemistry and toxicity and the role these factors play in proper abatement. As safe abatement can be nuanced, potential safety hazards and practices to avoid are also detailed.

SESHA 2019 Speaker Biography

Madhuri Korampally
Applications Manager Edwards, Albany, NY / Edwards, Clevedon, UK

Madhuri Korampally has been working as an Applications Engineer at Edwards Vacuum since June 2017. She has received her PhD in Electrical Engineering from University of Missouri-Columbia and has mainly worked on fabricating semiconductor chips for biomedical applications. Prior to joining Edwards, she also worked as a Post-graduate research associate in the Joint School of Nanoscience and Nanoengineering, North Carolina.

SESHA 2019 Symposium Abstract

Industrial tested Environmental friendly Fluorine mixture cleaning process to replace C3F8,C2F6, CF4 and NF3 as cleaning gas

Michael Pittroff; Robert Wieland
(EMFT, Hansastr. 27d, Munich)

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Abstract – Since the beginning of the 1980’s per fluorinated carbons (PFC’s) such as C2F6 and CF4 have been used as cleaning gases in thin film deposition technology and since the 1990’s NF3 has been used in the same way. PFC’s and NF3 have long atmospheric lifetimes and therefore high global warming potentials. The main applications of these gases are to remove residual films left behind after a chemical vapor deposition process (CVD). The most important materials to remove are dielectric layers like silicon oxides (SiO2), carbon-containing silicon oxides, silicon nitrides (Si3N4) and, to a certain extent, conducting films like doped poly-silicon and silicide layers. According to the World Semiconductor Council the semiconductor industry in 2013 used 7512 t NF3, 1133 t CF4 and 708 t C2F6 on a global basis. Approximately 72% of all semiconductor industry gaseous emissions are caused from these three gases (C2F6, CF4 and NF3). Fraunhofer EMFT and Solvay Special Chem have developed an alternative cleaning process, which can be a replacement for the currently used PFC’s and NF3 in semiconductor CVD tools. The target of this work was to find viable alternative gas mixtures for the semiconductor industry, which could be used as a “drop in” to avoid additional high investment costs from equipment modification. Our study has demonstrated that these more environment friendly gas mixtures also provide a more efficient and faster cleaning behavior for most applications. A cleaning efficiency gain of a factor 1.3 up to 1,7 can be expected, relative to the F2-amount required for cleaning; this gain in efficiency depends on the cleaning gas to be replaced and on the reactor type. A shorter cleaning time can lead directly into a higher equipment throughput and more cost effective usage of thin film tools. Industrial tests on Applied Producer and Novellus Sequel were performed for different processes. The long term tests at the CVD tool, was equipped with a mass spectrometer, to verify the end point of the chamber cleaning and to gain an overview of the waste gases going into the abatement system. In addition an endpoint system based on an optical spectrometer was tested as well. Long term behavior of piping used with fluorinated gas mixtures was as well monitored.

SESHA 2019 Speaker Biography

Michael Pittroff
Marketing Manager EMFT, Hansastr. 27d, Munich

After studying chemical engineering Michael Pittroff currently holds the position as global marketing manager for electronic gases for the business unit electronics of Solvay`s global business unit Special Chem. He started to work on development of environmentally friendly processes in the Solvay group (Laboratoire Central) of Solvay, Brussels Belgium in 1993. Since then, he has developed several new processes or products for Solvay, mainly for gases. In 2006 he joint Solvay Korea to support the group in building up a high purity gases plant for semiconductors and establishing an agent network in Asia. Solvaclean® was developed together with Texas Instruments after his return to Germany in 2012.

SESHA 2019 Symposium Abstract

Study of Emergency Leakage from Gas Cabinets using Controlled Flows of Arsine

Richard Knapp
(CS CLEAN SOLUTIONS AG)

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Arsine (AsH3) is a very lethal form of arsenic and in most jurisdictions is subject to the most stringent safety and reporting regulations applicable to the transport, storage and usage of gases. Among the many hazardous gases commonly used in the manufacture of semiconductor chips, arsine poses the greatest threat in terms of toxicity. Up until a few years ago, the use of arsine within the silicon semiconductor industry was confined to ion implantation and doped epitaxy applications, where the gas is supplied to the process in relatively low, dopant, quantities, often from safe delivery sources. In recent years gallium arsenide (GaAs) and related compound semiconductor materials have found their way into an increasing number of silicon semiconductor facilities. With the trend towards higher arsine throughput set to continue, the safe storage of AsH3 cylinders and measures to contain emergency leakages from gas cabinets are likely to become even more challenging in the coming years. This presentation will report on testing carried out by CS CLEAN SOLUTIONS in a specially-constructed outdoor facility to verify the gas retention performance of a dry bed emergency containment system. To our knowledge, this is the first time that a simulated release of AsH3 has been conducted using controlled flows of the pure gas at flowrates comparable to those to be expected during a real-life leakage situation. Topics presented will include design of experiment, parameter monitoring, a discussion of results and a summary of lessons learned.

SESHA 2019 Speaker Biography

Richard Knapp
Head of Research and Development CS CLEAN SOLUTIONS AG

Richard Knapp, Head of Research and Development, CS CLEAN SOLUTIONS AG Richard Knapp studied chemistry at the Technical University of Munich (TUM) in Germany from 2001 to 2006. Afterwards he received his PhD in the field of technical chemistry, also at the TUM. His work focused on catalysis using ionic liquid-mediated supported metal nanoparticles. In 2010, Richard joined his present company, CS CLEAN SOLUTIONS, a manufacturer of exhaust gas abatement systems for the semiconductor industry. He spent his first years in the company in the Materials Development department, mainly working on the industrialisation of new chemisorber materials. After that, Richard was responsible for the product management of the entire product line of CS CLEAN SOUTIONS. Since 2017 he is head of the Research and Development department.

SESHA 2019 Symposium Abstract

Solving Common Gas Detection Challenges

Jeyong Jin
(Honeywell Analytics, Lincolnshire, IL 60069)

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Join this workshop for an overview of considerations that should be made when installing gas detection equipment. Learn how to identify potential sources of interference and nuisance alarms that may compromise the integrity of the toxic gas monitoring systems (TGMS). The latest technologies, methodologies and solutions to address these challenges will be presented.

SESHA 2019 Speaker Biography

Dr. Jeyong Jin
Product Marketing Manager Honeywell Analytics, Lincolnshire, IL 60069

Dr. Jeyong Jin is a Engineering Director at Honeywell Analytics in Lincolnshire, Illinois. Dr. Jin has developed gas detection systems for over 26 years for portable, fixed and high tech gas detection applications. He joined Honeywell in 2005 and has led multiple engineering teams and developed many gas detectors, including Honeywell Midas & SPM Flex. He is a certified black belt and Dr. Jin attended Seoul National University in Korea for his BS, MS and PhD in 2003.

SESHA 2019 Speaker Biography

Josh Ratchford
Applications Manager Edwards Vacuum, Hillsboro, OR

Josh Ratchford has worked in the Applications group at Edwards Vacuum for 8 years supporting HVM customers throughout the US and Asia. Josh earned his BS in Chemistry from the University of Missouri and his PhD in Chemistry from Stanford University.

SESHA 2019 Speaker Biography

Josh Ratchford
Applications Manager Edwards Vacuum, Hillsboro, OR

Josh Ratchford has worked in the Applications group at Edwards Vacuum for 8 years supporting HVM customers throughout the US and Asia. Josh earned his BS in Chemistry from the University of Missouri and his PhD in Chemistry from Stanford University.

SESHA 2019 Symposium Abstract

Accident reporting, report from Z136 Accident Working Group

Ken Barat; Ken Barat
(Laser Safety Solution, Maricopa, AZ)

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Since the invention of the laser people have talked about laser accidents or incidents. But how many laser incidents occur each year? Who should one report such an event to? In March 2018, the Z136 Laser American National Institute Standard committee established a working group to investigate these questions. At any laser conference, people can hear about an anecdotical incident. In the United States there turns out to be a variety of groups and agencies that try to collect information on laser incident and accidents. This presentation will review the report of the Accident Working Group as well as their recommendations for follow up activities and try and answer the question, who should I report by laser accident to?

SESHA 2019 Speaker Biography

Ken Barat
Laser Safety Adviser Laser Safety Solution, Maricopa, AZ

Chair of Z136.8 Laser R&D Standard, Author of several laser safety texts and articles. Former LSO for Lawrence Berkeley Nat Lab and National Ignition Facility. LIA Fellow, Rockwell Award winner. Chair of first 7 LSO Workshops. Laser safety adviser to LIGO, Allen Institute, Newport, and ELI Beamlines. Presently providing laser safety services under title Laser Safety Solutions

SESHA 2019 Symposium Abstract

It’s Really OK to Work with Environmental Regulators

Robert Young
(AlterEcho, Chicago, IL)

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Robert Young (AlterEcho, Chicago, IL) In Spring 2015, a property owner and the Oregon Department of Environmental Quality (ODEQ) were stalled in a long-running dispute over the source, nature and extent of releases from a former lumber mill. The site was located in a bay along the Columbia River. Two inconclusive risk assessment reports by previous consultants had contributed to growing stakeholder concerns over ODEQ’s position that active remediation was the sole resolution for the site. The law firm representing the property owner brought AlterEcho in to develop a sophisticated and precise approach to quantify and characterize the carcinogenic risk and non-carcinogenic hazard associated with PCBs and dioxin-like PCBs. AlterEcho developed a novel sampling strategy to re-characterize bed and suspended sediment concentrations in the bay. Our assessment focused on the primary concerns of local stakeholders and chose a set of sensitive subpopulations to underpin risk management. AlterEcho’s detailed assessment was predicated on exposure to Native American subsistence fishing exposures, with a focus on maternal exposure during pregnancy and nursing infant exposure. Multiple lines of evidence, together with a detailed uncertainty analysis to characterize precision and accuracy, provided ODEQ with high confidence to support a risk management decision regarding residual risks that could be allowed to remain in situ. AlterEcho’s timeline, from the start of its assessment to ODEQ, through approval of its proposal, was only six months. Remediation of the sediments was not required. This presentation will focus on the value of working with regulators rather than putting up roadblocks in order to develop quick, cost-effective solutions to environmental challenges.

SESHA 2019 Speaker Biography

Rob Young
Vice President-Chief Geologist AlterEcho, Chicago, IL

Rob Young is a Professional Geologist with more than 30 years of technical knowledge in the management of hazardous waste from “cradle to grave.” He is well-versed in federal and state regulations, as well as the appropriate guidance for a number of regulated solid waste and hazardous waste locations throughout the country, from former military bases to federal Superfund sites. He is an expert in groundwater monitoring, particularly as it relates to permitting and site remediation, developed over years of support to the US EPA and state environmental agencies in making risk-based corrective measure decisions affecting human health and ecology. He has visited dozens of government and private waste sites nationwide, performing sampling, monitoring, assessment and oversight activities and providing technical expertise and management to lead projects to successful completion. He has managed all phases of complex remedial investigations for private-sector clients, including negotiations with regulatory agencies. He is also a frequent instructor for federal and state environmental agencies on solid and hazardous waste issues and corrective action and quality assurance techniques.

SESHA 2019 Symposium Abstract

Preparing for a CFATS Inspection

Todd White
(DHS)

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Preparing for a CFATS Inspection Hazardous chemicals used in the manufacturing of semiconductors and other high technology components richly benefit our society when used properly. However, if these chemicals are mishandled or fall into the hands of a terrorist, some of these same chemicals can cause great harm. The Department of Homeland Security’s Chemical Facility Anti-Terrorism Standards (CFATS) program works with facilities to ensure that they have security measures in place to reduce the risks associated with certain hazardous chemicals, and to prevent the chemicals from being exploited in a terrorist attack. This presentation from the U.S. Department of Homeland Security (DHS) will provide a basic overview of the CFATS program and insights into how environmental, health, and safety (EHS) professionals can make sure they and their organizations are prepared for inspections under the CFATS regulation.

SESHA 2019 Speaker Biography

Todd White
Chemical Security Inspector DHS

Todd White is a Chemical Security Inspector within the Inspections and Enforcement Branch at the Infrastructure Security Compliance Division (ISCD) in the Cybersecurity and Infrastructure Security Agency (CISA) at the U.S. Department of Homeland Security (DHS), the office within DHS responsible for chemical facility security regulations. In this capacity, Mr. White is responsible for upholding and enforcing the Chemical Facility Anti- terrorism Standards (CFATS) regulation. Mr. White is responsible for managing and coordinating activities pertaining to agency outreach, compliance assistance visits, inspections, and response to Suspicious Activity Reports (SAR) of regulated high-risk chemical facilities in Region IX (Serving: CA; NV; AZ; HI; GU; CNMI; and AS). Mr. White has served in this role since February of 2011, after serving 23 years with the Phoenix Police Department (1988-2011). Prior to his DHS assignment, Mr. White was assigned to the Threat Mitigation Unit at Arizona’s State Fusion Center, the Arizona Counter Terrorism Information Center (ACTIC) from 2004 through 2011 and worked as a Bomb Technician at the Phoenix Police Department from 1996 through 2006. He has obtained certifications as a Hazardous Materials Technician with the Phoenix Fire Department and a Bomb Technician with the Department of Justice Federal Bureau of Investigation, U.S. Army Ordnance Missile and Munitions Center and Hazardous Devices Technician School. Mr. White specializes in the development and application of protective design concepts. In his State Fusion Center assignment, Mr. White managed a series of programs that promoted the importance of incorporating successful design concepts to address a broad range of contemporary concerns including: community safety; sustainable communities; resilient support systems; and threat mitigation, while integrating the arts and aesthetic elements in the urban environment to create safe, sustainable and livable places. Previous to his employment with the Phoenix Police Department, he worked for the Architectural/Engineering firm of Howard, Needles, Tammen and Bergendoff. Mr. White is a member of: the American Institute of Architects; the American Society of Civil Engineers; the International Society of Explosive Engineers; and the International Association of Bomb Technicians and Investigators. Mr. White has received recognition for his contributions to the field of infrastructure protection including: The Phoenix Police Department’s Distinguished Service Award; Terrorism Liaison Officer (TLO) of the Year; and the Infrastructure Security Partnership (TISP) Annual Award for Distinguished Leadership in Critical Infrastructure Resilience.

SESHA 2019 Symposium Abstract

Keynote Presentation: Culture and Process Safety

Manny Ehrlich
(U.S. Chemical Safety Board)

During this presentation, Mr. Ehrlich will discuss concept of culture, what it encompasses and how it is defined. Differentiation between personal and process safety will be a focus area topic as it pertains cultural issues and their impact. Another key aspect for discussion is the normalization of deviance, and examples of this issue will be presented. The presentation will also include comparison of two Agency investigations, conducted years apart that reflect defects in the culture and their concomitant consequences.

SESHA 2019 Symposium Abstract

14 Elements of Process Safety Management

Kelsey Forde; Timothy Stirrup
(Parvati Consulting LLC, Albuquerque, NM)

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14 Elements of Process Safety Management Process Safety Management (PSM) is a regulation, promulgated by the U.S. Occupational Safety and Health Administration (OSHA). A process is any activity or combination of activities including any use, storage, manufacturing, handling or the on-site movement of highly hazardous chemicals as defined by OSHA and the Environmental Protection Agency (EPA). Process Safety Management is an analytical tool focused on preventing releases of any substance defined as a “highly hazardous chemical” by the EPA or OSHA. Process Safety Management refers to a set of interrelated approaches to managing hazards associated with the process industries and is intended to reduce the frequency and severity of incidents resulting from releases of chemicals and other energy sources (US OSHA 1993). These standards are composed of organizational and operational procedures, design guidance, audit programs, and a host of other methods. This presentation provides a high-level overview of the PSM standard (OSHA 29 CFR 1910.119) and outlines the 14 elements for successful regulatory compliance. Attendees gain the knowledge and skills to use the OSHA 29 CFR 1910.119 PSM Standard as a tool and understand the major compliance points, as well as applicability of the rule. Attendees gain the information necessary to learn more about the OSHA 29 CFR 1910.119 PSM Standard. This presentation aids the IH/OS professional in identifying the requirements of the OSHA 29 CFR 1910.119 PSM Standard and best management practices for use at all levels of facility operations regardless if they are subject the requirements of the OSHA 29 CFR 1910.119 PSM Standard.

SESHA 2019 Speaker Biography

Kelsey Forde CIH CSP CHMM & Timothy Stirrup REM CHMM
Owner, Principal EHS Professional Parvati Consulting LLC, Albuquerque, NM

Kelsey L Forde, CIH CSP CHMM (505)967-8917 KLForde@ParvatiCorp.com Ms. Kelsey Forde is a Certified Industrial Hygienist, Certified Safety Professional, Certified Hazardous Materials Manager, Owner and Principal Environment, Health, and Safety (EHS) Professional and System Safety Engineer for Parvati Consulting, LLC., based in Albuquerque, New Mexico. Kelsey has approximately 15 years of experience as an EHS professional including performing and guiding hazards analyses that adhere to the principles in the Redbook. Ms. Forde’s primary responsibilities and areas of expertise are centered around the identification of workplace hazards and development of consequence analysis associated with hazard analysis, safety assessments, primary hazard screens, readiness reviews, and compliance auditing techniques for a variety of clients including the DOE, commercial, industrial, and private clients. Ms. Forde is a National Director for the Alliance of Hazardous Materials Professionals, President-Elect for the New Mexico Chapter of the American Society of Safety Professionals, Past-President and Director at Large for the New Mexico Society of Hazardous Materials Managers, and served two consecutive appointed terms on the Albuquerque-Bernalillo County Joint Air Quality Control Board. Timothy S Stirrup, REM CHMM IH (505)980-3743 TSStirrup@ParvatiCorp.com Mr. Timothy Stirrup is a Registered Environmental Manager, Certified Hazardous Materials Manager, Industrial Hygienist, Partner and Principal Environment, Health, and Safety (EHS) Professional with Parvati Consulting, LLC., based in Albuquerque, New Mexico. Tim has over 25 years of experience as an EHS professional including performing and guiding hazards analyses that adhere to the principles in the. Mr. Stirrup’s primary responsibilities and areas of expertise are centered around establishing the framework for clients in Hazard Analysis within a diverse set of industrial facilities including accelerators, semiconductor facilities, R&D laboratories, and dynamic energetic materials testing facilities. Tim is respected for his ability to create highly functional teams and solve diverse, complex problems. Mr. Stirrup provides direct input to Line/Executive Management and Regulators to ensure solutions for continued organizational success. Mr. Stirrup currently serves as President on the New Mexico Society for Hazardous Materials Managers Board of Directors and is continually asked by clients, peers, and professionals in the EHS community to present at both local and national EHS/IH conferences.

SESHA 2019 Symposium Abstract

Achieving Compliance with the Ever-Changing Risk Management Program Regulations (40 CFR Part 68)

Natalie VanLiew, P.E.
(Trinity Consultants, Lenexa, KS)

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After multiple delays over the last two years, a 2018 DC Circuit Court decision triggered significant changes to the Risk Management Program (RMP) rule by implementing the January 2017 RMP regulations. This established new RMP requirements for site incident investigations and reports, process hazard analysis reviews, training, emergency coordination and exercise activities, public information sharing, compliance audits and the Risk Management Plan submittal. Some new requirements are currently in effect, while others will come into effect through March 2021 . . . . unless they are reversed by the final version of the RMP Reconsideration Rule that is still under EPA review. If you’re responsible for RMP compliance at your site or company, join Trinity’s Consultants’ Natalie VanLiew as she walks through the steps you need to take to ensure compliance with the RMP rule now and in the future, under both the 2017 rule and future proposed RMP Reconsideration rule. The presentation will be updated based on the status of the Reconsideration rule at the time of the conference.

SESHA 2019 Speaker Biography

Natalie VanLiew, P.E.
Principal Consultant Trinity Consultants, Lenexa, KS

Ms. VanLiew serves as a Principal Consultant in Trinity’s Kansas City office and national expert in the Process Safety Management (PSM) and Risk Management Program (RMP) regulations. She has held environmental compliance responsibilities since 1998 in the consulting, regulatory, and manufacturing arenas, including environmental/PSM/RMP compliance, process engineering, project engineering, and production management roles in the pharmaceutical, food, and chemical industries. At Trinity, Ms. VanLiew assists clients with PSM / RMP program implementation, including Offsite Consequence Analysis modeling, Emergency Response requirements, Prevention Program elements, RMPlan updates, PHA leadership, compliance audits, and enforcement support in the power, chemical, refinery, food and general manufacturing facilities. Ms. VanLiew is the National Instructor for Trinity’s Understanding and Application of RMP/PSM Requirements course, and a trained PHA leader in the HAZOP and What-If/Checklist methodologies. She earned a B.S. degree in Chemical Engineering from Northwestern University and is a licensed Professional Engineer in Missouri and Kansas.

SESHA 2019 Symposium Abstract

Panel Discussion – Collaborating to Address Semiconductor EHS Concerns

Laurie Beu & Dawn Graunke Moderators; Olivier Corvez David Isaacs; Michael Castorano Stephen Harper
(Laurie S. Beu Consulting, Intel, SEMI, SIA, Intel)

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Global environmental, health and safety policies have an impact on the entire semiconductor industry and its supplier chain. Solutions to EHS issues should remain non-competitive and can be most effectively addressed by sharing knowledge and resources. This forum will bring together trade associations and companies to strategize collaboration needs and opportunities.

SESHA 2019 Speaker Biography

TBA
Principal Laurie S. Beu Consulting, Intel, SEMI, SIA, Intel

Olivier Corvez is a Senior Manager based at SEMI Headquarters, Milpitas, California. He is focused exclusively on EHS matters for SEMI worldwide. Olivier brings 20 years worth of very diverse experience acquired as a consultant, auditor or in-house Corporate EHS across most economic sectors, globally. Recently, he was managing an EHS team distributed in 10 countries and dedicated to provide EHS compliance support to Cisco facilities worldwide. In addition to compliance experience, he worked on implementing EHS Management systems at ABB or Total primarily in France back in the late 90s. While at KPMG in Paris, he was involved in over 400 due diligence projects in the context of transactions services for electronics, chemicals, auto industry, aeronautics, etc. Olivier received an MS in Environmental Sciences from Universite de Rouen, France, and a BS in Environmental Geology from Northeastern University, Boston, MA. He is trained as an ISO 14001 auditor by DNV Sweden. David Isaacs is vice president of government affairs at SIA, where he is responsible for all aspects of the association’s work related to government policy and advocacy before the U.S. Congress, the Executive Branch, and international organizations. Before joining SIA, David was senior vice president, government relations of Solazyme Inc., a leading renewable energy startup based in South San Francisco, California. In that capacity he was responsible for securing government support to advance Solazyme’s commercialization and research objectives. He previously served as director, government affairs for Hewlett-Packard Company, where he led the D.C. office and directed a global team on HP’s technology, environmental, energy policy, and other priority policy matters. He was an associate at the law firm of Beveridge & Diamond, P.C. in Washington, D.C., and started his career as a law clerk at the U.S. Court of Appeals for the Ninth Circuit in San Francisco. David is a graduate of Tufts University, and received a law degree at Columbia University. He lives with his family in Washington, D.C. He is admitted to the bar in New York and the District of Columbia. Stephen Harper is Global Director, Environment, Energy and Sustainability Policy, at the Intel Corporation. In that capacity, he is responsible for advising senior management and leading company influencing efforts on a wide variety of topics, ranging from chemicals management to energy efficiency, water policy and the role of Intel’s products in helping meet society’s toughest sustainability challenges. Outside Intel, Harper is widely known as a connoisseur of all things Irish, both solid and liquid. Harper serves on a number of outside boards (including the Energy Foundation, the Chesapeake Conservancy, the Center for Environmental Policy at American University and the Environmental and Energy Management Institute at George Washington University). He is an adjunct professor at American University’s School of Public Affairs. Prior to Intel, Harper served in senior positions at Amoco Oil Company, the US Environmental Protection Agency (EPA), ICF Consulting, and the California State Coastal Conservancy. He has served in these positions while continuing to pursue his childhood dream of becoming a professional rodeo clown. Stephen has a Bachelor’s degree from the University of Colorado, where he graduated with highest honors. He also has a Master’s in International Affairs from Princeton University, an MBA from the University of Chicago, and has conducted graduate studies in city and regional planning at the University of Pennsylvania.

SESHA 2019 Symposium Abstract

Industrial Applications for Drones in Construction and Operations

Thomas* Gilman; Joe Perez; Lauren Blazeck
(Intel Corporation, Chandler, AZ)

As drone technology continues to advance, there are many developing opportunities to utilize drones in the semiconductor industry. Learn how drones can reduce safety risks, lower costs, and reduce schedule duration for construction projects and facility operations.

SESHA 2019 Speaker Biography

Thomas Gilman
CSA Project Engineer Intel Corporation, Chandler, AZ

Thomas Gilman is a Construction Project Engineer with Intel Corporation. Thomas has a B.S. in Civil Engineering from the University of Texas at Austin and has worked for Intel Corporation for 3 years. He is also a member of the Intel Drone Team.

SESHA 2019 Symposium Abstract

Today’s High Tech Robotics: Readiness, Risk Assessment, Real World

Mollie Anderson; Jay Zhu
(BSI Services & Solutions, Hillsboro, OR)

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Companies are challenged to be nimble with fast integration of new technology and processes in R&D labs, high- technology / volume production manufacturing sites, and warehousing. Collaborative robots, Autonomous Mobile Robots (AMRs), and changing uses for conventional robots continue to be the top growth solutions to keep pace with this rapid change and maximize safety and efficiency. With the growing demand for human-robot interaction, high-tech robots are solutions to keep pace with rapid change, maximizing safety and efficiency. Semiconductor tools once utilizing ‘wafer handlers’, are now finding those re-evaluated as conventional, industrial robots (defined as 3-axis or more), to keep pace with advances in throughput and process. Additionally, and with recurrent issues to automate internal logistics for e-commerce warehousing, AMRs are drawing more attention. By automating material transport via AMRs, companies optimize productivity and schedule deliveries and de-bottleneck critical paths. Why Risk Assessment? New applications, work environments and safety standards remain challenging. Safety professionals must continuously advance their understanding, re-evaluate risks, and update methods to ensure the safe teaching, use, and maintenance of robots and their associated systems. Addressing industrial robots, both conventional and collaborative, the guiding industry consensus standard is ANSI/RIA R15.06-2012, Industrial Robots and Robot Systems. More recent industry guidance in ISO/TS 15066: Robots and Robotic Devices–Collaborative Robots, also requires “..a comprehensive risk assessment is required to assess not only the robot system itself but also the environment in which it is placed, i.e. the workplace.” Additionally, and as often true for newer technology, current safety standards are outdated – specifically, ANSI/ITSDF B56.5-2012, Automatic Guided Vehicles (AGV), fails to address safety standards for the newer and more technologically sophisticated AMRs – which may also be combined with a collaborative robotic arm. Accordingly, then, risk assessments must be conducted to ensure robotic users and related personnel are safe, and that processes are designed with specific safeguarding and controls addressing issues identified during the hazard analysis and risk assessment. Risk assessments may have several formats, from simple to more robust. This presentation also includes methods and findings of client-confidential robotic risk assessments conducted for several global, process-intensive manufacturing companies, warehousing, and R&D labs. Key risk assessment process elements will be identified and explained, including: determination of the system’s scope, environment, tools and end effectors; identification of risk sources; estimation of risk; evaluation of risk; risk acceptability (what is acceptable risk?); and, risk reduction process and considerations.

SESHA 2019 Speaker Biography

Mollie Anderson, MSSM
Manger, Principal Consultant BSI Services & Solutions, Hillsboro, OR

Mollie Anderson has over 30 years of professional experience providing product safety engineering, hazard analysis and risk assessment, regulatory compliance, sound customer/supplier relationships and environmental oversight. She has managed a team of safety engineering professionals within the semiconductor industry, focusing on regulatory and global compliance, development of industry consensus standards and best practices. With this experience, she is leading the BSI robotics technologies for EHS program development and risk assessments. She has performed a broad spectrum of analyses and has conducted numerous management development and process hazard evaluations.

SESHA 2019 Symposium Abstract

Operational Excellence Round Table—Driving Continuous Improvement in R&D, Pilot Line and Manufacturing Organizations Using Risk Based Approaches

Andy McIntyre; Steve Trammell
(BSI EHS Services and Solutions, San Jose, CA)

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Co-Moderated by: Andy McIntyre, CIH – BSI EHS Services and Solutions Steve Trammell, PE, CSP, CCPSC, CHMM – BSI EHS Services and Solutions Panelists: Jerry L. Jones, PE, CSP, CHMM – Chemical Engineering Consultant Industry leaders / subject matter experts – in progress Operational Excellence (OE)is all about driving continuous improvement and requires a sound strategy and HARD work. It should not be defined only in terms of tactics such as business process improvement tools or techniques (Six Sigma, Lean Mfg., 5S, etc.). OE is a journey and is better described as an organizational mindset or culture dedicated to the pursuit of continual improvement in performance across all functions. While those in manufacturing organizations agree that OE initiatives can help improve product quality/delivery and the safety, reliability and profitability of operations, a key challenge is to set priorities and allocate resources among many target areas with opportunities for improvement, which includes: raw materials supply chain/product distribution optimization, site acquisition risks, equipment design for safety, reliability, maintainability, environment and sustainability during the procurement, equipment installation review and certification, mfg. process control technologies to improve mfg yields/productivity/quality, evaluating and managing change, equipment maintenance and reliability (onstream issues & releases), changing workforce demographics & competency, protection of intellectual property & cybersecurity, occupational safety and health, process safety, environmental protection & sustainability throughout the facility lifecycle, planning/preparing for abnormal or emergency situation. In this roundtable discussion the panel members will address how: numerous management system consensus standards and guidelines can help an organization answer if they are “doing the right things” in specific topic areas; integrating management systems is important to efficiently utilize resources and cost effectively drive improvement; self-assessments and benchmarking help answer the question of “how well they are executing” those tasks & business processes; risk based decision making and risk reduction effectiveness throughout the EHS&S continuum are logical approaches for setting organizational priorities, deciding when to go beyond minimum standards, and allocating resources. The focus of the discussion by the panel members in this 1.5 hour interactive roundtable, will be risk management systems based on AIChE CCPS Risk Based Safety Guidelines and other relevant standards,( e.g. ISO 31000: 2018, ISO 45001: 2018, ISO14001: 2015) and how effective integration is a foundation for driving continuous improvement in an organization and throughout the facility lifecycle.

SESHA 2019 Speaker Biography

Andy McIntyre
Principal Consultant BSI EHS Services and Solutions, San Jose, CA

Andy has 35+ years’ experience as an EHS & Sustainability professional in high technology and related industries. He supports a variety of market areas including semiconductor, communications, biotechnology, pharmaceutical and the photovoltaic industry where he has focused on assisting BSI’s clients in optimizing their environmental health and safety and sustainability initiatives. Andy is a former member of the Semiconductor Environmental Safety and Health (SESHA) Board of Directors (1989-1996). He held the post of President of SESHA from 1995-1996 and received the President’s Award in 1999. Andy was elected in 2001 as a Fellow by SESHA, and received the organizations highest honor, the Lifetime Achievement Award in 2016.

SESHA 2019 Speaker Biography

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Bruce Campbell
Vice President – DOE Services JENSEN HUGHES

Bruce Campbell, FSFPE, has 4 decades of fire protection and loss prevention experience. He is responsible for developing Department of Energy (DOE) technical services and supporting industrial, commercial, and government clients. Mr. Campbell serves as a technical resource on select technical projects and as an expert on legal cases that involve automatic sprinkler systems, fire alarm systems and loss control. Prior to joining JENSEN HUGHES, he began his career in the Highly Protected Risk industry, then spent 20 years at the former Rocky Flats Environmental Technology Site where he managed the fire protection programs for this former nuclear weapons production facility. He participates in highly visible fire investigations and manages fire protection programs involving programmatic and line responsibilities for the fire department, fire protection engineering, and inspection, testing and maintenance.

SESHA 2019 Speaker Biography

Bruce Campbell
Vice President – DOE Services JENSEN HUGHES

Bruce Campbell, FSFPE, has 4 decades of fire protection and loss prevention experience. He is responsible for developing Department of Energy (DOE) technical services and supporting industrial, commercial, and government clients. Mr. Campbell serves as a technical resource on select technical projects and as an expert on legal cases that involve automatic sprinkler systems, fire alarm systems and loss control. Prior to joining JENSEN HUGHES, he began his career in the Highly Protected Risk industry, then spent 20 years at the former Rocky Flats Environmental Technology Site where he managed the fire protection programs for this former nuclear weapons production facility. He participates in highly visible fire investigations and manages fire protection programs involving programmatic and line responsibilities for the fire department, fire protection engineering, and inspection, testing and maintenance.

SESHA 2019 Symposium Abstract

Safety Interlock Design Challenges

Mark Fessler
(ASM International, Almere, Netherlands)

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ASM International has recently developed new design engineering training material to help our many new, young design engineers understand product safety compliance requirements, with a focused attention to proper safety interlock design. Incorporation of proper safety interlock circuits is one of the most important engineering controls to help prevent harm from various hazard scenarios. To properly design these circuits requires a fundamental understanding of the written requirements within SEMI S2 Section 11 and the Machinery Directive Section 1.2.1, as well as the other standards which these 2 umbrella documents reference to. This presentation will review some of the important design decisions that must be made when creating a new safety interlock, and also address alternative paths to compliance when the primary, most straight forward path is not possible due to other existing design constraints. The presentation will introduce ASM’s approach to help “fill in the gaps” for design engineers on how to make safety interlock component selections, and protective enclosure designs, when alternate design paths exist.

SESHA 2019 Speaker Biography

Mar
D ASM International, Almere, Netherlands

For last 2 years, Mark has been leading ASM’s Global Product Safety Engineering Organization (i.e. USA, Netherlands, Japan, South Korea and Singapore) working to establish ASM as a semiconductor industry leader in Product Safety Engineering Design. Mark’s Product Safety team supports ASM engineering by performing detailed design reviews, creating new engineering design guidelines, providing re-occurring training to design engineers, and ensuring continued design compliance through an improved management of change process. Mark completed both his Bachelor’s and his Masters degrees in Mechanical Engineering from Arizona State University, and was previously employed at Tokyo Electron (TEL) 20 years.

SESHA 2019 Symposium Abstract

High Pressure Water mist – Data Center

Jonathan Ingram
(Marioff North America)

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PROTECTING YOUR CLOUD WITH MIST High Pressure Water mist – An advanced fire protection alternative, for future data centers Data is the “new oil” that keeps businesses running. The already enormous amount of data we produce and consume is growing exponentially every year. Businesses, organizations and individuals have all become dependent on digital data. This has led to an increased demand for large data centers. A large data center contains dozens of server rows; with hundreds of miles/kilometers of power and data cables connecting the servers online and to power sources. The energy density per rack has risen, so inevitably the fire risk is more significant. In this presentation we will take a look at how high pressure water mist fire protection works and what key attributes it consists of. Key takeaways of the presentation:

• Water is discharged only to the area of fire, not to the entire data hall subsequently preventing flooding of the premises.
• High pressure water mist uses significantly less water compared to traditional sprinkler systems.
• Cooling is also more efficient in comparison to traditional sprinklers or low pressure water mist systems.
• Water mist can provide total protection for all spaces within the data center building envelope.
• Water mist fire protection can also be used in office areas where personnel are located. And water mist offers an excellent choice in fighting fire in technical areas with back-up generators, transformers and UPS’s.
• Any expansions of the site can be done easily and efficiently just by adding pipes, valves and high pressure/thermally operated sprinkler heads to new areas supported by the original pump-set. This scalability is especially beneficial in data centers that are built in phases.

SESHA 2019 Speaker Biography

Jonathan Ingram
North America Director of Sales Marioff North America

Jonathan G. Ingram, B.S.E.E Director of Sales- Marioff North America During his 20+ year career, he has held various application engineering, product specialist, product management, and sales management positions with Kidde Fire Systems from 1995-2017. In October 2017 he was appointed as the Director of Sales for Marioff North America, A UTC Company, leading their water mist business efforts. In 2012, he published a white paper on the protection of Energy Storage Systems (ESS) that deploy Li-Ion batteries with Clean Agent Fire Suppression, both in the Data Center Journal and Power Magazine. He serves as a Principal member on the NFPA 76 Telecommunications Committee, NFPA 855 Installation of Stationary Energy Storage Systems, and as an Alternate member -NFPA 12, 12A, & 2001 Gaseous Fire Extinguishing Committee. Holds a B.S. Degree in Electrical Engineering (University of Hartford) and is a certified LEED Green Associate.

SESHA 2019 Symposium Abstract

Management of Time Sensitive Chemicals

Ron Scholtz
(Lawrence Berkeley National Laboratory)

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Ron Scholtz, CHMM Lawrence Berkeley National Laboratory Energy Technologies Area Berkeley, CA Time-sensitive chemicals can develop additional hazards during storage, even if stored and handled properly. It is important to recognize the potential hazards and the innate unpredictability of these chemicals. The rate at which a time-sensitive chemical becomes dangerous to handle depends on many factors. Even when stored properly, ignored or forgotten time-sensitive chemicals can become unstable, unsafe or potentially explosive. Categories of time-sensitive chemicals include: organic peroxide forming compounds, unstable/self-reactive with production of gaseous products, explosive when dry materials, hazardous polymerization compounds, and time-sensitive gases. There are many types of time sensitive chemicals used in a research laboratory environment. Common examples include: diethyl ether, tetrahydrofuran, azide compounds, perchlorate compounds, and peroxides. This presentation will give an overview of the programs developed and challenges faced for managing time-sensitive chemicals at Lawrence Berkeley National Laboratory. This includes inventory tracking, identification of containers, testing/inspection, storage practices, and proper disposal. Some lessons learned and best practices will be shared.

SESHA 2019 Speaker Biography

Ron Scholtz
Safety Manager Lawrence Berkeley National Laboratory

Ron Scholtz is the Safety Manager for the Energy Technologies Area at Lawrence Berkeley National Laboratory (LBNL) in Berkeley, CA. He works directly with researchers in the fields of battery technologies, fuel cells, building energy efficiency, and indoor air quality. Ron received his BS degree in Biological Sciences from Cal Poly, San Luis Obispo and has a MS degree in Environmental Management from the University of San Francisco. Ron is a Semiconductor Environmental Health and Safety Association (SESHA) Fellow. He is a Certified Hazardous Materials Manager (CHMM).

SESHA 2019 Symposium Abstract

Reliability and innovations of SAGS packages and their benefit over high pressure alternatives

Edward* Jones; Joseph Despres
(Entegris, Danbury, CT)

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The use of hazardous materials is necessary in the production of electronic devices. Selection of the packaging and dispensing technology can drastically reduce the potential risk to the operators, environment, and processing equipment. Current technologies in the form of Type 1 and Type 2 SAGS (Subatmospheric Gas Delivery Source) have demonstrated this improvement over high pressure alternatives. However, further improvements are possible and necessary in order to continue to meet new requirements. With a proven track record of high reliability, operators may become desensitized to the potential risk of the materials they are handling. With time, the discipline of performing the fundamental steps necessary to safely install and remove these cylinder packages may erode, thereby increasing the risk to users. With the current technology of these packages and systems that they are used with, procedures and proper training are still an essential part of insuring safety. This presentation will highlight the reliability of our packaging technologies including VAC® and SDS® specialty gas cylinders and show how they can drastically reduce the risk over high pressure alternatives. It will cover proper installation and removal procedures and the tools necessary to do so safely and reliably. In addition, it will highlight recent improvements to our packages and provide a direction for future enhancements that could be enabled with a collaboration between tool OEM’s, customers, and suppliers of filled gas cylinders.

SESHA 2019 Speaker Biography

Edward Jones
Senior Product Engineer Entegris, Danbury, CT

Edward Jones is a Senior Product Engineer for Entegris Inc. in their Specialty Gas business unit. He has over 10 years of experience supporting their Type 1 and Type 2 Subatmospheric Gas Delivery Source (SAGS) product lines. In recent years his primary focus has been on the VAC® product line. He started in this industry as an engineer at ATMI which was acquired by Entegris Inc. in 2014. Edward holds a M.S. degree in Mechanical Engineering from the University of Connecticut.

SESHA 2019 Symposium Abstract

Panel Discussion – Challenges of the New SEMI S30 Implementation for Energetic Materials

Tara Collins, Rene’ Graves, Eugene Ngai Michael Gordon, John Visty
(kfpi)

Using a single presentation format, we will go through the various requirements and challenges of implementation of the newly approved SEMI S30 Safety Guidelines on Energetic Materials. Because of the complex hazards associated with energetic materials, SEMI S30 was written as new type of SEMI Standard requiring alignment and joint collaboration of various different equipment and suppliers from chemical delivery through the tool process to exhaust/abatement to ensure a complete “soup to nuts” solution at the end user. In this panel discussion we will step through many of the primary sections and new requirements of this standard and give each the panelists time to comment on the how the implementation affects them. The panel consists of leading edge companies from each step along the manufacturing process who were also actively involved in the creation of this new standard.

SESHA 2019 Speaker Biography

Tara Collins, Rene’ Graves, Eugene Ngai, Michael Gordon, John Visty
CTO kfpi

Panel Bio ASM Technologies (Tool Manufacturer) • Tara Collins, Product Safety Engineer Texas Instruments (IC Manufacturer) • Rene’ Graves, WWESH Technical Team Safety Professional Chemically Speaking LLC (Chemical & Distribution Manufacturer) • Eugene Ngai, Principle Edwards Vacuum (Vacuum & Abatement Manufacturer) • Michael Gordon, Process Safety & Application Engineer Salus Engineering (3rd Party Consultant) • John Visty, Principle

SESHA 2019 Symposium Abstract

Health, safety and well-being for Semiconductor employees – Why it takes a village

Sally* Pawsat; Georgia* Latham
(BSI EHS Services and Solutions, Austin, TX (Sally); ON Semiconductor, Phoenix, AZ (Georgia))

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The health, safety and well-being (HSW) of semiconductor employees is key to sustaining innovation, creativity, quality excellence and business success. Studies show a direct link between worker HSW and increased engagement and performance. HSW has followed the NIOSH Total Worker Health standards for several years, but social responsibility issues and the new ISO 45001 standard raise the bar for worker health, safety and well-being in the workplace. This presentation discusses how initiatives that traditionally resided with Safety and Occupational Health departments now need multiple stakeholder involvement to be successful and provide a robust HSW program for employees. ON Semiconductor and BSI will discuss how HSW issues are becoming increasing holistic, including issues like mental health and occupational stress.

Questions to answer include:

• Who are the key stakeholders needed to create an environment of health, safety and well-being for employees?
• How can Safety and Occupational Health partner to drive the integration of HSW throughout the organization’s core functions?
• What are the elements of a robust, sustainable HSW program?
• What are the emerging HSW issues challenging us?

SESHA 2019 Speaker Biography

Sally Pawsat, CHSP
Principal Consultant BSI EHS Services and Solutions, Austin, TX (Sally)

Sally Pawsat, CHSP: Sally Pawsat has over 25 years of professional environmental, health and safety (EHS) experience in healthcare, semiconductor, petrochemical and consulting. Her experience includes project management, emergency management, waste management, OSHA Voluntary Protection Program and pre-certification auditing to ISO14001 and ISO45001. Areas of expertise include worker injury and illness prevention, environmental, health and safety program development, high reliability, Joint Commission readiness and management system implementation. Prior to BSI, Sally served as the Texas Regional Director of Safety & Emergency Management for Ascension Health. Sally is a certified hospital safety professional (CHSP). Georgia Latham, RN, CCM, CLNC, COHN-s: Georgia is an RN, with 20+ years in the field of Occupational Health Nursing & Industrial Hygiene, and 20 years in the semiconductor industry, and is currently the North American regional manager of Occupational Health Resources for ON Semiconductor. She is a certified case manager (CCM) with extensive experience in worker’s comp and is a Certified Occupational Health Nurse Specialist (COHN-s). She has been a Nurse Educator in Disease Management, Case Management, and Wellness. She is licensed in NY, CA, OR, AZ and the compact states. Georgia loves spending free time on pretty much any beach, with her husband, and the rest of her free time is with her kids and grandkids.

Georgia Latham, RN, CCM, CLNC, COHN-s
ON Semiconductor, Phoenix, AZ (Georgia)

SESHA 2019 Symposium Abstract

Lone Worker: Man-Up Your “Man Down” Safety Program

Daniel DeCoopman
(IM Flash Technologies, Lehi, UT)

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It’s more than legislations or regulations. It’s your co-worker, contractor, friend, or even yourself at risk anytime and every time work is performed alone. Lab technicians, facilities maintenance shift supervisors, janitorial services, construction laborers, and tool install engineers all could, and often do, work in remote areas, out of line of sight or hearing, with little to no means of communication with their team and others. Afterhours work demands can set the stage for an isolate worker scenario. There exists a conundrum for every manager who supervises a worker; How do I protect my worker from hazards while they work alone? This conundrum has one means of risk mitigation that stands out…alone – planning your work and working your plan. Planning is THE single most important form of risk management when it comes to lone worker hazard elimination. This session will focus on resolutions to the lone worker conundrum. With audience participation, there will be discussion about the inherent risks associated with workers who work alone. We will explore the unique risk to working in the semi-conductor industry, both from a day-to-day operations stand point and from a facilities construction/sustainability perspective. A mapping exercise will take the group through a mock scenario, complete with typical management and work challenges. Best practices will be offered and reviewed. This session is intended to be interactive and supported by each attendee’s participation. The session precentor will facilitate the objectives and guide the group experience.

SESHA 2019 Speaker Biography

Daniel DeCoopman
Senior Project Safety Manager IM Flash Technologies, Lehi, UT

Daniel DeCoopman is a commercial construction EHS professional with more than 24 years of experience. Mr. DeCoopman has supported EHS for the private sector, DoD, US Army Corp of Engineers (USACE), OSHA and commercial insurance underwriting. Titles held include: Director of Safety and Health, Senior Project Safety Manger, Compliance Safety and Health Officer, Risk Control Consultant, and Site Safety and Health Officer (SSHO). Current and former designations and certifications: Board of Certified Safety Professionals (BCSP) ASP and CHST, OSHA Outreach Trainer, 40-Hr HAZWOPER, Level 6 SSHO, and CRIS. Mr. DeCoopman presented at the 2010 ASSE conference on the topic of utilizing the USACE EM 385-1 standard as a baseline safety and health program for the private sector working in Federal OSHA and State Plan states. The BCSP has solicits Mr. DeCoopman’s support for their designation exam writing/qualification process as a Subject Matter Expert. Currently, Mr. DeCoopman is the Lead Project Safety Manger for the Construction Sustainability (base build) General Contractor at IM Flash Technologies in Lehi, Utah where the 3D XPoint technology has been developed through the joint venture of Intel and Micron.

SESHA 2019 Symposium Abstract

Short Attention Span EHS Training Works for All Age Groups!

Michael Zimmerman; Michael Zimmerman
(BSI EHS Services and Solutions)

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Traditional environmental health and safety training can be boring and does not always provide enough motivation for employees to do the right thing. Starting a PowerPoint presentation for new employees with the history of the Clean Water Act, does not prompt a stronger compliance culture nor does it get to the meat of the issue: “What do I have to do?” I’m going to provide a summary of new training programs that we are implementing for various clients in various industries that are getting very positive feedback.

This innovative short-attention span EHS training meets the needs of employers and employees listed below.

• What do today’s employers need?
• Cost effective training that promote employee retention
• Training that is user friendly to be easily accessible when needed.
• Training modules that can be easily modified as regulations change or as new issues arise at the facility.
• Analytics that can be tracked to perform leading and lagging indicator analyses. Being able to track the number of times employees access specific training modules and comparing to issues with specific job functions. What do today’s employees need?
• Short, focused training video modules that can be uploaded on tablets for employees to watch almost anywhere, anytime.
• Easy access so that employees can view specific modules on a regular basis, if needed, or just prior to performing a non-routine task.
• Training that addresses boots on the ground EHS compliance activities.

Examples include properly donning personal protective equipment, filling out a hazardous waste manifest, filling out the hazardous waste label, doing a storm water inspection and visually evaluating a storm water sample, physically collecting a storm water sample with different tools, filling out a chain of custody form, packing an ice chest with samples to be overnighted to a laboratory.

SESHA 2019 Speaker Biography

Michael Zimmerman
Principal Consultant BSI EHS Services and Solutions

Michael Zimmerman has 30+ years of experience in engineering and EHS compliance. He is a registered Professional Chemical Engineer in five states. He is a CPEA and has expertise in environmental health and safety compliance and audits. He has completed audits and engineering HAZOPs across North America as well as globally in such countries as Korea, Malaysia, Japan, China, and Saudi Arabia.. He routinely provides EHS training to various industries through face to face training, video conferences, and development of slide decks.

SESHA 2019 Symposium Abstract

Keynote Speech: Healthcare Technology Roadmap

Karen Thompson
(HCA Healthcare)

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As one of the largest healthcare systems in the country, HCA Healthcare is in a unique position to leverage the latest technology to improve the standard of patient care for 30 million patients. We provide over 37,000 clinicians with access to the latest clinical technology that reduces unnecessary variation in care, while providing them with real-time insights to deliver a world class patient experience.

During my keynote talk, I will highlight how HCA Healthcare uses its scale and operational efficiency to optimize technological advances to achieve industry leading performance, maintain a safe work environment, and deliver on its mission – above all else, we are committed to the care and improvement of human life.

National Supply Chain Network: leveraging our network of strategically located supply chain warehouses, clinical diagnostics, and tracking software we are able to monitor the effectiveness of surgical instruments to identify clinical best practices and use this insight to encourage surgeons to utilize preferred tools to deliver better patient outcomes.

Emergency Department Patient Tracking: using RFID tracking of patients in the ED along with predictive analytics, clinicians are able to identify patients that are most likely to be admitted or need to be transferred to the intensive care unit. Once admitted, a real-time dashboard using this combination of technology and analytics provides administrators with alerts of available rooms and potential backlogs of the entire hospital at a glance. This has enabled hospitals to drastically release the wait time for patients needing to be discharged while better coordinating bed management across the various hospital departments.

Pediatric Monitoring & Tracking Bracelets: identical bracelets are given to all new born babies and their parents at birth. Before any treatments are given, the bracelets are scanned and centrally tracked to validate identification, prevent medical errors, and reduce the threat of abductions.

Emergency Response Efforts: a significant portion of HCA’s facilities are located in the southern part of the country, prone to a number of severe weather conditions. We mobilize a central command center in headquarters to communicate with the impacted area and coordinate relief efforts for our patients and impacted employees. Dealing with the aftermath of the recent hurricanes in Florida, our CEO was unable to get assistance from the Governor to help transport patients whose condition had worsened after the storm, to nearby safer facilities. HCA commissioned 5-7 transport helicopters to transfer all critical patients to our nearby sister facilities in safer areas in the region. We also engaged our security team to utilize RFID bracelets to limit access to our hospitals to approved staff and patient’s family. This additional security feature allowed us to protect our patients, employees and significantly reduce the risk of vandalism that occurs after this type of event with mandatory curfews.

Hospital Room of the Future Innovation Center: a lab has been established modeling a patient room to develop and test new technology solutions to enhance the patient experience and improve clinical efficiency, especially between shifts. Partnering with vendors, the team has created a new in-room television device that is designed to replace the static whiteboards and television sets with a monitor that will serve as the central hub for all patient entertainment, clinical education, and review of patient vitals, conduct physician virtual consults, and provide post-discharge education.

SESHA 2019 Symposium Abstract

Testing the Responsiveness of Fire & Gas Technologies to Small Silane Leak Scenarios

Matt Wyman; Glenn Holbrook
(kfpi)

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Over the past many years Silane has been tested and studied to try to understand characteristics of this complex chemical. The results of these tests have demonstrated that silane, although classified as a pyrophoric gas, can release an automatically catch on fire, release and result in a delayed explosive reaction, or release with no ignition depending upon the leak release rate. With all these varying leak scenarios, what testing has been done to verify the fire and gas detectors used throughout the semiconductor industry will actually detect each and every potential leak scenario? This is exactly what KFPI and ASM set to find out. In this presentation, we will compare what the safety codes and standards require for silane in terms of gas detection, fire detection, and exhaust ventilation and then compare them to what technologies actually responded to leak scenarios of all types under different exhaust rates within silane gas cabinet. Review of the leak testing videos and results will provide some shocking results.

SESHA 2019 Speaker Biography

Matt Wyman and Glenn J. Holbrook
cto kfpi

Matt Wyman is the Managing Director & CTO of KFPI LLC who specializes in fire safety solutions for the global semiconductor industry with offices throughout USA, Asia, & Europe. Matt began his career as Semiconductor Loss Prevention Specialist with FM Global and has been designing, consulting, and providing fire safety solutions for semiconductor equipment for the past 20+ years. Matt currently serves as the Leader of the SEMI Standards Committee for Fire Protection, active participant in SEMI Energetics Task Force Committee, active Member of the NFPA 318 Committee, serves on the SESHA BOD, and has presented on various fire safety topics at SESHA Annual Symposium & Local Chapter Events many times in the past. Glenn J. Holbrook is a Certified Industrial Hygienist by the American Board of Industrial Hygiene and has over 30 years of safety experience and over 22 years focused on Semiconductor Equipment Safety. After graduating from UC Davis with a B.S. in Zoology he started his industrial hygiene career in the Asbestos consulting industry. He then expanded his knowledge and experience by completing many courses through UC Berkeley extension and AIHA and branched out into chemical safety for multiple customers. He spent 4 years in the power generation industry performing traditional worker health and safety. He has worked as a safety consultant for the last twenty years performing SEMI S2 evaluations for all types of Semiconductor equipment. He is currently co-chair of SEMI S3 Process Liquid Heating Systems committee and co-chair of SEMI S6 EHS Guidelines for Exhaust Ventilation. He is an expert in exhaust ventilation and has performed numerous tracer gas tests for the industry and has now brought this capability in-house to ASM. Originally from California he has spent the last 20 years in the Vancouver WA area and is now in the process of building a house in Scottsdale Az for his new role as Senior Principal Engineer for ASM America.

SESHA 2019 Symposium Abstract

Pyrophoric Silanes

Eugene Ngai; Eugene Ngai
(Whitehouse Station)

Silane has been used for many years as a silicon source gas and its use is continuing to grow. While it is pyrophoric, it can be released without immediate ignition and as a result has been involved in numerous fatal accidents. Since the late 1960’s it has been well studied. Other silanes such as disilane, trisilane and tetrasilane are replacing silane in some niche applications. They are pyrophoric as well, how do they compare to silane? Are the safeguards used for silane applicable and/or effective for these silanes?

SESHA 2019 Speaker Biography

Eugene Y. Ngai
Consultant Whitehouse Station

Eugene has over 45 years of Specialty Gas experience in production, laboratory, R&D, engineering and safety positions. He retired from Air Products in 2009 and formed Chemically Speaking LLC a compressed gas safety and emergency response training and consulting corporation. Chemically Speaking LLC currently has numerous multi-year agreements to advise manufacturers, suppliers and users of specialty compressed gases, primarily in the Semiconductor, LCD or Photovoltaic industries. He is known for his many years of research on silane and chlorine trifluoride.

SESHA 2019 Symposium Abstract

Claiming Renewable Energy

Joshua Kang
(Samsung Austin Semiconductor, Austin, TX)

Download the proceedings

Claiming Renewable Energy – Joshua Kang, Samsung Austin Semiconductor, Austin, TX. There is a more focus of renewable energy in supply chain management. As a result, B2B customers are encouraging their supply chain to engage in renewable energy consumption practices. Also, CDP has announced that they’ll develop a rating system for how companies manage their renewable energy and carbon footprint in their global supply chains. For those in supply chains, they’ll benefit from reduced scope 2 emissions by adopting renewable energy strategy. However, the practice of renewable energy procurement is not common, nor readily available among the companies that are not equipped to staff a full-time renewable energy or sustainability professional. In this proposed sprint session, the common methods of claiming renewable energy will be presented as practical solutions. The common methods of claiming renewable energy consist of procurement of unbundled RECs, different types of Power Purchase Agreement, and green utility contracts with the energy providers. The benefits and risks of each method will be presented as well as consideration for potential business impacts including cost, PR/marketing, and sustainability.

SESHA 2019 Speaker Biography

Joshua Kang
Sustainability Professional Samsung Austin Semiconductor, Austin, TX

I am an EHS & Sustainability professional, who has over 10 years of experience in the semiconductor industry. Skilled in sustainability, regulatory compliance, and climate change management. I have a MPA in Urban & Environmental Planning. Also, I am certified in CSR-P and LEED GA.

SESHA 2019 Symposium Abstract

Communications are key to Harvesting Fab Energy Savings

Adam Stover
(Edwards and University of Bristol, UK)

There are many examples in modern life in which energy savings can be achieved when there is no activity happening; office lights which come on only when there is movement in front of sensors, washroom hand dryers which only operate when there are moving hands beneath the sensor, automobile engines which switch off when the car stops at red traffic lights and then re-start when the driver’s foot is applied to the accelerator pedal to name just three. In all these examples, the key to unlocking utility savings is the application of “go to sleep” and “wake-up again” signals. The same can be applied to semiconductor fabs too. There are times when wafer processing tools (such as CVD, etch etc.) are not actually processing wafers, such as waiting for wafers to arrive from preceding processing steps, during maintenance activities and so on. During such times, in principle, energy could be saved in supporting equipment such as vacuum pumps and gas abatement systems, but only when the correct signaling is in place. This paper will investigate how such savings can be realized by the provision of suitable standardized signals and specifically consider: 1. What signals can be provided? 2. How much energy could be saved? 3. Will this impact my process? and will conclude by making some practical suggestions for implementing such savings.

SESHA 2019 Speaker Biography

Adam Stover
Professor Edwards and University of Bristol, UK

Adam Stover, Ph.D. has been applications manager at Edwards Vacuum for 2 years with responsibility for US HVM and R+D semiconductor customers. Previously to joining Edwards he worked in process engineering for a superalloy manufacturer in Utica, NY. Adam received a PhD degree in Materials Science and Engineering from The Johns Hopkins University, Baltimore, Maryland, USA and a BS in chemistry from Haverford College, Haverford, Pennsylvania, USA.

SESHA 2019 Symposium PDC

Reactive Silane Byproducts Phase 2

Chemically Speaking LLC

Since the Reactive Silane Byproducts PDC in April 2018, another year of research has been conducted on this important topic. In one test program, a custom benchscale system was used to simulate a user system and process conditions to better understand how these reactive gels are formed. A key finding is that the reactive gels formed by hydrolysis of hexachlorodisilane is different than hydrolyzed HCDS reactor gels. While both forms can be shock sensitive, they exhibit different chemical and physical properties.

Some of the gels formed are so shock sensitive that a fire occurred when a label was peeled off of a vacuum pump containing gels. A chlorosilane manufacturer reported that a facility bicycle rolled over dried deposits on the ground and reported hearing “popping” sounds. The most likely place for these gels to form are in the reactor system vacuum pumps after the heated foreline. The gels from a number of pumps from 2 US users have been studied. These gels are viscous and waxy like that quickly reacts to a brittle solid after exposure to ambient air.

This PDC will have the same speakers from 2018 plus Global Foundries. Key topics will be:

1. Reactive chemical hazard analysis — mitigation of shock sensitive gels
2. Process vacuum pumps were modified to reduce accumulation of reactive byproducts and extend pump life. Results of recent pilot tests will be presented.
3. Gel formation in heated foreline and ambient
4. Deposits found in a user’s foreline have also been characterized
5. F2 Cleaning of gel and hydrolyzed gel
6. Neutralization of hydrolyzed HCDS spill
7. User experience
8. Methods of in situ deactivation of hydrolyzed gels (chemical, heat, steam)
9. Chemical scrubbing of HCDS vapors

Speakers from:

• National Kaohsiung University of Science and Technology
• Dow Chemical
• Global Foundries
• Edwards Vacuum
• Dekra
• Chemically Speaking LLC

This PDC will present data that has not been revealed and may be significant to your operations.

SESHA 2019 Symposium PDC

Semiconductor Industry Environmental Auditing

Mike Sherer
Jesse Gonzalez

Trinity Consultants, Phoenix, Arizona

Environmental auditing of semiconductor wafer fabs and related facilities requires detailed technical knowledge of semiconductor processes, process byproducts, abatement equipment, and materials/chemicals/gases used. In addition, local, state and federal regulations experience is needed to review for compliance and opportunities for improvements. This PDC will review experiences with environmental auditing and examples of items found that will help attendees develop compliance mechanisms at their facilities. The facilitators will provide time for specific questions and discussion.