Semiconductor Abatement Certification Management and Requirements

August 12, 2026 4:00 pm Eastern Time - Business Case 101 (For EHS Technology And Beyond)

This presentation summarizes best practices for implementing and maintaining abatement certifications for claiming Destruction and Removal Efficiencies (DREs) for F-GHGs and N2O for GHG regulatory programs. We will discuss how to collect and maintain certificates and documentation, how to verify testing performed by vendors and what are the requirements.

DRE certifications are issued by abatement vendors and normally specify installation, commissioning, operating and maintenance requirements in order to guarantee a specified performance of the abatement unit. This presentation will address common requirements and discuss how abatement equipment should be maintained in order to maximize DRE in practice, as well as to meet the requirements specified in DRE certificates issued by vendors. We will also address common pitfalls that cause lower operational DRE as well as invalidated certifications, as well as addressing the validity of DREs often claimed by vendors.

We will address several key questions:

What is a DRE certificate and what are they required for in the semiconductor industry?
Can the abatement vendor really guarantee my DRE, and what are the consequences if they can’t?
What steps are involved in developing and documenting an abatement certificate?
What are some proven methods for tracking compliance with certificate conditions?
What are the responsibilities of the fab facilities team and EHS department on maintaining a DRE certification?

SPEAKER
Lys Draper
Senior Consultant
Trinity Consultants

Lys Draper is a Senior Consultant at the Trinity Phoenix office. She has been working in the semiconductor industry since 2015 as a process and facilities engineer, and specializes in semiconductor abatement systems and environmental matters. Lys provides compliance recommendations, regulatory and permitting support, exhaust management strategies, and reviews of semiconductor control technologies. Her previous work includes equipment engineering at a high-volume manufacturing memory fab in Utah, and commissioning and mechanical operations for a new fab project in Arizona and Taiwan.

 

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