The Science of Exhaust Management

January 11, 2017, 4:00 PM EST

Presented by: Adam Stover/Applications Engineer/Edwards

It is crucial to understand the role precursor chemistry plays in safe process gas by-product abatement. This talk will first discuss general elemental reactivity and how it affects the selection of appropriate types of gas abatement. Afterwards, specific chemical families used in semiconductor processing (high K precursors, PFC gases, etc) will be discussed in more detail to both suggest various recommended abatement options as well as pitfalls and safety hazards to avoid.

Brought to you by GoToWebinar®
Webinars Made Easy®


ESH for High Technology

Providing industry solutions with education and development of our members.

Want Access?

Sign-up for instant access

This suite of online, on-demand courses, incorporating content from SESHA “boot camp” courses, provides a comprehensive safety training foundation for all employees who work in a semiconductor fabrication setting.

Access Training Download Flyer



Already have an account?