The Science of Exhaust Management
January 11, 2017, 4:00 PM EST
Presented by: Adam Stover/Applications Engineer/Edwards
It is crucial to understand the role precursor chemistry plays in safe process gas by-product abatement. This talk will first discuss general elemental reactivity and how it affects the selection of appropriate types of gas abatement. Afterwards, specific chemical families used in semiconductor processing (high K precursors, PFC gases, etc) will be discussed in more detail to both suggest various recommended abatement options as well as pitfalls and safety hazards to avoid.
Brought to you by GoToWebinar®
Webinars Made Easy®
SESHA
ESH for High Technology
Providing industry solutions with education and development of our members.
Join Now for Free
Want Access?
Sign-up for instant access
This suite of online, on-demand courses, incorporating content from SESHA “boot camp” courses, provides a comprehensive safety training foundation for all employees who work in a semiconductor fabrication setting.
Access Training Download Flyer