The Science of Exhaust Management
January 11, 2017, 4:00 PM EST
Presented by: Adam Stover/Applications Engineer/Edwards
It is crucial to understand the role precursor chemistry plays in safe process gas by-product abatement. This talk will first discuss general elemental reactivity and how it affects the selection of appropriate types of gas abatement. Afterwards, specific chemical families used in semiconductor processing (high K precursors, PFC gases, etc) will be discussed in more detail to both suggest various recommended abatement options as well as pitfalls and safety hazards to avoid.
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