An Overview of the Semiconductor Manufacturing Process

Benson, Roger
(Factory Mutual Global, Rohnert Park, CA)

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This Overview presentation will cover the three basic process steps of 1) Layering-Oxidation, CVD and PVD 2) Patterning-Resist and Develop application, Exposure methods, Etching 3)Doping-Diffusion, Ion Implant. We will also look briefly at Wafer Manufacturing, Mask making and Back End Processes. The hazards presented by the processes and the chemicals used will briefly be discussed to set the stage for more detailed presentations on EH&S consideration in the Boot Camp Program.

Back to SESHA 26th Annual Symposium (2004)