EHS Considerations For Very Large Chemical Systems in the Semiconductor Industry
Beasley, James (Intel Corporation, Hillsboro, OR)
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As semiconductor manufacturing facilities become larger to satisfy increased demand for electronic products, EHS professionals will be faced with the challenge of evaluating and establishing EHS requirements for the handling and distribution of ever-increasing quantities of hazardous chemicals. This presentation will delineate the drivers for increased chemical usage in the semiconductor industry, explore domestic and international regulatory considerations, and describe a proven approach to evaluating and approving large-scale chemical distribution schemes. Additionally, the role and importance of EHS in the design and operation of safe, reliable large chemical systems will be illustrated. The presentation will close with a prediction of future hazardous chemical use trends for high volume manufacturing.