GHG Emissions Monitoring Using EPA Method 320

Hall, Steve ; Benaway, Bryan; Bellon, Alex
(URS Corporation, Austin, TX)

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This presentation will cover the methodology, intricacies and complications of GHG monitoring at semiconductor facilities using EPA’s Test Method 320–Measurement of Vapor Phase Organic and Inorganic Emissions by Extractive Fourier Transform Infrared (FTIR) Spectroscopy. With the revised EPA GHG reporting rule likely to include stack sampling in accordance with EPA Method 320, it is important to understand the applicable parts of the method and its relevance for GHG emissions sampling at semiconductor stacks. By doing so, the facility operator will have the knowledge base to determine if this sampling can be performed in-house or, if outsourced, how to properly select a test company. This presentation will provide an overview of the Test Method, providing guidance on the important aspects (e.g. method validation, analyte spiking, minimum detection limit determination, etc.) and what is required in instrumentation and experience to perform this testing.

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