SESHA 2013 Symposium — PDC1

Electrical Safety for Non-Electrical Engineering Safety Professionals

Chris Evanston

This course focuses on the electrical hazards present in industrial equipment and the fundamental safe design practices and essential electrical code and standard requirements to mitigate those hazards, from the perspective of a safety professional. The course is intended for safety professionals with no electrical safety background or with some practical experience in electrical safety but lacking a broader understanding of electrical safety. The course is not intended for electrical engineers or electrical safety professionals. The course is divided into four parts. The first section, the basics of electrical energy, defines the physics behind electrical energy and the basic elements of an electric circuit. The second section, the building blocks of electrical systems, expands upon these principles with a greater focus on industrial applications, as well as identifying circuit components and their function. The third section, the fundamentals of electrical safety, explains the hazards to personnel and the facility presented by electrical energy and basic safety design principles to mitigate those hazards. The fourth section, essential electrical code and standards requirements – practical applications, further expands on these safety design principles to discuss electrical compliance requirements for industrial equipment. This is an eight-hour course that strongly encourages audience participation. The course was presented at several previous SESHA conferences and was well received by the target audience.

SESHA 2013 Symposium Abstract

Quo Vadis: Laboratory Safety after UCLA

Langerman, Neal
(Advanced Chemical Safety, San Diego, CA)

Dr. Langerman will discuss laboratory safety in the context of the academic lab and the industrial lab. This will include focus on the movement of academic lab scientists into the the industrial lab, and related implications for specific training and performance standards associated with the industrial lab. He will also comment on contemporary changes in academic lab EHS now being driven by high profile accidents which have occurred in recent years.

SESHA 2013 Speaker Biography

Dr. Neal Langerman
Advanced Chemical Safety, San Diego, CA

Dr. Neal Langerman received his bachelors degree in Chemistry from Franklin and Marshall College in Lancaster, PA and his Ph.D. in Physical Chemistry and Thermodynamics from Northwestern University in Evanston, IL. In 1980, after fifteen years teaching chemistry and biochemistry, he helped establish Chemical Safety Associates, Inc. In 1997, he established a new firm, ADVANCED CHEMICAL SAFETY, which is specifically dedicated to the prevention of workplace injuries, illnesses and environmental damage. Dr. Langerman consults with many companies, worldwide, in general industry as well as in the semiconductor industry to improve chemical handling practices, develop emergency response teams, and upgrade industry safety practices. His areas of expertise include chemical safety, environmental protection, regulatory compliance, and training. Dr. Langerman is a Registered Environmental Assessor and a Certified Environmental Inspector. He is experienced with air modeling and environmental remediation. He provides litigation support and expert testimony related to Failure-to-Warn litigation and chemical accident investigations, and prepares precautionary labels for chemical containers and Material Safety Data Sheets for chemical products. Dr. Langerman has been providing safety, health, and environmental consultation to the semiconductor industry since 1980. In 1989-90, Dr. Langerman conducted a worldwide review of all arsine exposure accidents. His most recent publications include the book “Precautionary Labels for Chemical Containers”, was published by Lewis Publishers/CRC Press in 1994 and a peer reviewed article, “Material Safety Data Sheets: Who Uses Them?” which was published in the American Chemical Society publication “Chemical Health and Safety” in 1995.

SESHA 2013 Symposium Abstract

Updating your Hazard Communication Program and Getting the benefits of the GHS

quevedo, rosanne
(URS, San Jose)

GHS and Haz Com Programs The Hazard Communication Standard (HCS) is now aligned with the Globally Harmonized System of Classification and Labeling of Chemicals (GHS) which is designed to provide consistency in the classification and labeling of all chemicals. These changes are designed to enhance worker comprehension, resulting in more appropriate handling and use of chemicals. The harmonized format of the safety data sheets (SDS) will also enable workers to access the information more efficiently. These changes require that U.S. employers ensure proper chemical reclassification and update their HazCom programs. Employers must provide additional training on the new label elements, chemical classification, SDS format, and the modified HCS standard requirements. Have you made the transition?

Download the Proceedings

SESHA 2013 Speaker Biography

Rosanne Quevedo
sr. project scientist, URS, San Jose

Ms. Quevedo is a Sr. Project Scientist at URS Corporation in San Jose, CA. She has more than 25 years experience in environmental health and safety (EHS) compliance strategy development and implementation, permit assistance, industrial hygiene, compliance auditing, environmental management systems design and implementation, sustainability management, environmental planning, policy development and training. She has worked extensively in a broad range of sectors, including high technology, biotech, communications, public utilities, petroleum, light and heavy manufacturing, remediation, facilities management, education, food, beverage, agriculture, government, and health care for both public and private organizations. Ms Quevedo expertise includes: environmental health and safety compliance; industrial hygiene; sustainability system implementation; ISO 14001/OHSAS 18001; broad-spectrum business assistance; and legislative analysis. Ms. Quevedo has a bachelor’s degree in Environmental & Occupational Health and has completed post-graduate coursework in Environmental Geology, Environmental Law and Lead Auditor coursework for ISO 14001/18001/9001.

SESHA 2013 Symposium Abstract

SEC Conflict Minerals Ruling: Ensuring Compliance and Meeting Customer Demands

Wilk, Lisa*; Muszalski , Julie
(Capaccio Environmental Enginnering Inc, Marlborough, MA)

Are your customers sending surveys inquiring about your supply chain? Do you have a plan on how you will report to the U.S. Securities and Exchange Commission (SEC) on May 14, 2014 regarding the source and chain of custody of conflict minerals? Have you incorporated conflict minerals reporting into your sustainability management system or corporate social responsibility program? In August 2012, the SEC adopted a ruling mandated by the Dodd-Frank Wall Street Reform and Consumer Protection Act that requires publically-traded companies to disclose their use of conflict minerals originating from the Democratic Republic of the Congo (DRC) or an adjoining country. Conflict minerals, including tantalum, tin, tungsten, and gold, are largely found in electronic and semiconductor components. Conducting due diligence and tracing the use of conflict minerals to comply with the ruling can be a substantial undertaking requiring dedicated time, resources, and expertise. This presentation will provide an overview of requirements, and identify systems and solutions for streamlining the reporting process. Additionally, the discussion will offer effective approaches to incorporate conflict mineral reporting into sustainability management systems and reporting, helping your organization achieve a competitive advantage and improve transparency.

Download the Proceedings

SESHA 2013 Speaker Biography

Lisa Wilk
President and CEO, Capaccio Environmental Enginnering Inc, Marlborough, MA

As President and CEO, Ms. Wilk is responsible for overall operations, recruiting and retaining outstanding staff, and ensuring that our client’s needs are proactively addressed in a cost-effective, value-added manner. Ms. Wilk brings practical, experienced-based solutions to her clients and is actively involved in integrating best management practices into day-to-day operations through the implementation of on-site Environmental, Health and Safety (EH&S) management assistance programs. She also helps clients develop and implement systems for maintaining compliance with growing global product content restrictions, and addressing the demands of stakeholders and their customers. She has also assisted corporations in preparing global sustainability metrics and reports. Ms. Wilk is a published author of several technical articles and books on pollution prevention, and a frequent speaker at industry seminars and conferences. She is a registered professional engineer and holds a B.S. in Chemistry from Bates College and a B.S. in Civil/Environmental Engineering from Northeastern University.

SESHA 2013 Symposium Abstract

Fire Protection and Life Safety Issues in Semiconductor and Related Facilities

Eisenberg, Jonathan
(Rolf Jensen & Associates, Framingham, MA)

Semiconductor and related process facilities contain numerous fire and explosion hazards that impact life safety and operations. This presentation discusses the major fire protection and life safety design aspects for such facilities, including specific requirements contained in the International Building & Fire Codes, as well as applicable NFPA codes and standards. Project examples will be used to illustrate how these aspects are addressed in facility and process design. The presentation will include the code requirements for Group H-5 occupancies and Group H chemical storage and dispensing rooms – including vertical and horizontal location, occupancy separation, approach for associated mechanical spaces, electrical classification, ventilation, fire suppression (overhead and local), fire and gas/vapor detection, emergency alarms and spill control/secondary containment. We will also discuss approaches and ideas on the number, location and function of flammable liquid, flammable and pyrophoric gas, and highly toxic gas storage areas, including piping and delivery philosophy. The presentation will also include special suppression and detection approaches for hazards found in a clean room/fab area, eg. wet bench chemistry involving flammable liquids, and processing that uses hydrogen and/or silane mixtures. We will share our thoughts and experiences on how these systems interact with the rest of the building and the responding fire department. Related industrial issues also to be covered include hydrogen detection and explosion protection. Lastly, we will discuss licensing and permitting issues faced by owners of fab and clean room facilities that store and use hazardous materials, where the hazards are not clearly understood outside of the semi-conductor industry.

Download the Proceedings

SESHA 2013 Speaker Biography

Jonathan Eisenberg, P.E.
Vice President, Rolf Jensen & Associates, Framingham, MA

Mr. Eisenberg is Vice President and Industrial, Chemical and Laboratory Market Leader at Rolf Jensen & Associates. He is a licensed fire protection engineer, with 24 years of fire protection engineering, chemical engineering and chemical plant management experience. Mr. Eisenberg has extensive project experience in chemical process plant and laboratory facility design and code consulting, as well as fire suppression system design and explosion protection for special hazards. He is a member of the NFPA 318 (semiconductor and related facilities), NFPA 30 (flammable and combustible liquids) and NFPA 2 (hydrogen technologies) technical committees. Mr. Eisenberg has a Bachelor of Science in Chemical Engineering from Lafayette College and a Master of Science in Fire Protection Engineering from Worcester Polytechnic Institute.

SESHA 2013 Symposium Abstract

Why Create a Laboratory Safety Culture When You Already Have One?

Gibbs, Lawrence
(Stanford University, Stanford, CA)

We all hear about the buzz of needing to create a laboratory safety culture. This begs two questions: do you really have no safety culture now; or, do you have one but don’t like what you currently have? The fact is every organization has a safety culture; it just may be a “bad” safety culture. When discussing laboratory safety culture or campus safety culture, what one needs to look at is the spectrum of the issue, and not solely the need to “create a culture.” These organizational issues are not new and the basis of most organizations is they have cultural norms that are established over time and at some point change is desired to move from one point to another point on a scale of expected continuous improvement. The same is true for an organizational safety culture; it is preferable to discuss the concept as not “creating” or introducing an entirely new value system for an organization, but to moving from one point on the development scale to another, improved position. In the context of organizational change, this is a much easier task than attempting to “create” and introduce an entirely new value system into an organization, especially one as diverse and resistant to change as the academic research enterprise. This presentation focuses on presenting some baseline concepts related to safety cultures and values, reviews the unique organizational characteristics of academic research laboratories, and discusses core variables of different types of safety cultures and how they relate to the academic laboratory research environment. The qualities and characteristics of different types of safety cultures that help define which type of safety culture an entire organization or a research laboratory will be covered. The goal is to generate discussion and dialogue about various ways to implement safety culture changes in different organizations.

Download the Proceedings

SESHA 2013 Speaker Biography

Lawrence M. Gibbs
Associate Vice Provost for EH&S, Stanford University, Stanford, CA

Larry Gibbs is Associate Vice-Provost for EH&S at Stanford University where he is responsible for health, safety, and environmental risk management programs in addition to oversight of institutional emergency planning and risk communication. Stanford has over 2500 laboratories involved annually in about $700 million of research ranging from basic sciences and engineering to medical and human subjects clinical research. His responsibilities include overall campus safety management and oversight of hazardous chemicals, radiological materials and biological and physical agents used in research at Stanford. Larry is a lecturer at the Woods Institute for the Environment at Stanford and serves on the Stanford Board of Overseers for the SLAC National Accelerator Laboratory. He has graduate degrees in science education from Boston University and in industrial hygiene and public health from the University of Michigan. Gibbs is a certified industrial hygienist with over 25 years of experience in academic, research and clinical institutions. In addition to his work at the university, he has served as a consultant for industrial, pharmaceutical, biotechnology and government organizations and is a member of the scientific advisory board for nanoTox, Inc., a nanomaterials testing and consulting firm. He has authored over 25 publications, co-authored two books, served as officer and board member in a number of national and international professional associations, including as Chairman of the ACGIH, and is a Fellow of the American Industrial Hygiene Association. He recently chaired the California Higher Education – DTSC – NIOSH Working Group developing Practical and Safe Guidelines for Academic Research Use of Nanomaterials.

SESHA 2013 Symposium Abstract

Lab Safety 101–Compare and Contrast EHS

Crozier, John ; Yost, David ; Igras, Leon
(Arizona State University)

This session addresses core principles of EHS practice as applicable to the general laboratory environment. Degree programs in EHS specialties have traditionally focused on manufacturing, construction, public safety and, in the recent past, healthcare settings. Both baccalaureate and advanced degree prerequisites and course requirements are limited as to the amount of pure and applied science needed. As a consequence there are EHS specialists practicing today who have limited knowledge of and experience in the laboratory setting. From a regulatory standpoint the laboratory environment has been considered something of a hybrid. Standards were considered applicable, but identification of compliance strategies and best practices have been less defined than in other settings. In recent years standards have been developed (e.g., Chemical Hygiene, Bloodborne Pathogens and others) but seamless integration of best practice EHS is still lacking in some settings. In the context of SESHA’s mission of education and support for its EHS specialists this gap can be reduced, giving these professionals tools to better support their lab clients. This presentation identifies core laboratory functions for EHS basics, and suggests tactics that can be useful in the context of a particular lab setting. Thus, the EHS specialist can leverage their knowledge from other settings into the lab environment. Building on a core of hazard analysis, core laboratory functions are meshed with specific EHS topic areas. These include hazardous materials, physical hazards and supplemental tactics such as personal protective equipment. Helping lab clients build these tactics into an EHS program specialized to their lab is then performed to the model for other, better defined settings.

Download the Proceedings

SESHA 2013 Speaker Biography

Arizona State University

SESHA 2013 Symposium Abstract

Black Ops–The Lab Safety Chronicles

Aton, Elizabeth
(Metropolitan Manufacturers)

This presentation is a hybrid of identification of a class of very complex lab situations, meshed with strategies and tactics to improve EHS practices in those situations. Such work is very challenging to the EHS specialist, yet very satisfying as it progresses. Lab scientists and technicians have the same occupational motivations as workers in other settings. They face budget cuts, time constraints and sometimes unrealistic results expectations by management. These factors can drive what one might call less than ideal practices to become part of the lab operations. Such are the activities and practices, the “Black Ops” the EHS specialist may encounter as s/he becomes familiar with a lab’s members and activities. Black Ops are the things they don’t talk about to strangers. Black Ops are unauthorized projects. Black Ops use chemicals acquired outside the system. Black Ops may start with a lab member saying “I wonder what would happen. . “. Examples of the more noteworthy Black Ops the presenter has encountered are included here. The mission of the EHS specialist is to earn the trust of Black Ops lab members and find pathways for them to normalize Black Ops within an EHS framework. The EHS specialist will use standard methodology for EHS integration, but the delivery must be as creative as a lab’s Black Ops are. This presentation describes methods for teaching a framework of risk assessment, and providing assistance in movement of obstacles that create motivation for Black Ops to exist. This is followed by discussion of methods by which the EHS specialist then moves into the role of subject matter expert, providing technical and regulatory compliance knowledge for integration into lab operations. The presentation is timed for question and discussion opportunity.

Download the Proceedings

SESHA 2013 Speaker Biography

Elizabeth Aton
Principal Scientist , Metropolitan Manufacturers

SESHA 2013 Symposium Abstract

Lockout Tagout and Electrical Safe Work Practices for Ion Implanters

Roberge, Steven
(Axcelis Technologies, Inc. )

Ion implanters present a particular challenge in Hazardous Energy Control. Ion implanters utilize a wide variety of hazardous energies including high voltage electricity, highly toxic gases, mechanical systems, vacuum, pneumatic pressure and more. Although interlocks and control systems are incorporated into equipment design to prevent exposure to these hazards, OSHA does not recognize these safety systems and requires the use of hazardous energy isolation at its source (Lockout Tagout). Further complicating Lockout Tagout, is the infeasibility of isolating the main energy sources in the implanter. Some systems must remain operational during access to the equipment for safety purposes, or for troubleshooting or setup operations. For example, high voltage must be locked out while accessing the gas box for a cylinder change operation, however the control systems must remain energized to allow purging of the gas plumbing prior to cylinder removal. Axcelis has developed modular Lockout Tagout procedures for its equipment based on localized hazardous energy analyses conducted in each module of the equipment. In this way, only the hazardous energies that personnel could access during a particular task must be controlled, allowing other systems to remain operational. Troubleshooting activities require personnel to access energized electrical systems for voltage or current measurements. As a component of its Hazardous Energy Control and Electrical Safe Work Practices program, Axcelis has performed Arc Flash Analyses to determine the appropriate level of protective equipment for work in different sectors of the equipment. This presentation will discuss the methods Axcelis has developed to ensure the safety of personnel and comply with regulations governing these activities.

Download the Proceedings

SESHA 2013 Symposium Abstract

An Overview of the Dangers of Raised Floors Common in Cleanroom Manufacturing and IT Departments.

Francis, Laurie
(Seagate Technology, Bloomington, MN)

Many electronics manufacturing companies have raised floors that have significant fall hazards to the subfab. This hazard can also be apparent in Data Centers, which are normally not thought of as a working at heights issue. Due to a recent incident, a survey was distributed to the Fab Owners Association (FOA) to benchmark the prevention of fall hazards. Data from 30 companies revealed great variation in the standardized protocol for prevention in the industry. This presentation is an overview of an actual incident, the challenges that come with raised floors, the benchmarking results, lessons learned and root cause/corrective actions to prevent re-occurrence.

Download the Proceedings

SESHA 2013 Speaker Biography

Laurie Francis
Sr. Safety Engineer, Seagate Technology, Bloomington, MN

Laurie Francis is a Sr. Safety Engineer and has 15 years of High Technology Environmental, Health and Safety experience. She graduated from the University of Minnesota Master of Industrial Safety Program in 1997. She has worked for Seagate Technology for the past 6 years and previously worked for EORM and National Semiconductor in Texas. Laurie is a Certified Safety Professional. She is an active member of the Semiconductor Environmental Safety and Health Association(SESHA), where she is the current President of the Twin Cities SESHA Chapter.

SESHA 2013 Symposium Abstract

Leveraging Technology for Effective EHS Management Systems Planning and Establishing Objectives

Mazzarella, Susan
(EORM)

Organizations who have, or are aiming to have, an ISO 14001 or OHSAS 18001 conformant management system need to perform some key Planning steps to ensure success. Common challenges in performing these steps, and keeping them up-to-date include change management and consistency. Technology solutions for this purpose are getting better and better. During this session, we will discuss the process for setting environmental aspects, occupational health and safety hazards, and Objectives (aka performance goals) as well as some of the common challenges. An example Risk Assessment (Job Hazard Analysis) software will be shown as part of this discussion.

Download the Proceedings

SESHA 2013 Speaker Biography

Susan Mazzarella
Managing Principal, EORM

Ms. Mazzarella has 18 years of experience in the environmental, health, safety and sustainability field, including EHS management systems implementation, corporate social responsibility strategies, sustainable building assessments and planning, and compliance auditing and management. Ms. Mazzarella leads EORM’s Management Systems practice and has experience leading teams in pursuit of ISO 14001, OHSAS 18001, ISO 28001, ISO 26001, and RC 14001; 100% of these projects have resulted in successfully passing the initial certification audit on the first attempt.

SESHA 2013 Symposium Abstract

3 Key Factors That Contribute to Accidents: Safety Lessons Learned on an Aircraft Carrier

Glass, Eric
(UL PureSafety )

Even when working in the most dangerous environments, workers with experience and long tenure can get too comfortable with their surroundings and the tasks they execute. An aircraft carrier abounds with dangerous conditions. Imagine every possible hazard crammed into a 1,096-foot-long, 270-foot-wide floating steel city to visualize the dangers faced daily by 5,180 sailors and Marines. This highly- interactive seminar will use real life scenarios of historical naval aircraft carrier mishaps, lessons learned from them and how these lessons can benefit your organization. 3 key factors will be identified to assist attendees with improving the performance of their own safety and health programs.

Download the Proceedings

SESHA 2013 Speaker Biography

Eric Glass
EHS Principal, UL PureSafety

Eric Glass is an EHS Principal at Underwriter’s Laboratories’ Workplace Safety Division, where he is responsible for the guidance and direction of all safety related training, consultation services in the health and safety arena for UL clients, and developing thought leadership initiatives to further advance the health and safety mission. Before joining Underwriter’s Laboratories, Eric was a risk management and safety consultant for numerous medium to large businesses in the manufacturing and distribution sector, a Risk Consultant with Federated Mutual Insurance Company, Corporate Risk Manager for Swifty Serve Inc., and an Aviation Ordnanaceman in the United States Navy.

SESHA 2013 Symposium Abstract

KEYNOTE – Semiconductor Manufacturing: A Forward Look at Emerging Technologies, Drivers and Challenges

Rajguru, Sanjay
(International SEMATECH Manufacturing Initiative (ISMI))

The worldwide semiconductor market is estimated to be about $343B USD in 2012, growing at a 6-7% compound annual growth rate. The growth in the semiconductor market is dependent on the ever present cost reduction historically provided by Moore’s Law. Moore’s law demands a relentless technology improvement to achieve a transistor density improvement every 18 months. In addition, to offset the cost increase that results from the increase in complexity, the industry must achieve manufacturing cost reductions. Viability of semiconductor manufacturing is dependent on a company’s ability to drive manufacturing effectiveness while reducing overall enterprise risk. One important aspect of enterprise risk reduction is a keen understanding of emerging technologies and associated barriers which may accompany those technologies as they move towards high volume manufacturing. This presentation will explore promising new and novel technologies which are emerging in the semiconductor industry, identify the drivers behind those technologies, and discuss potential ESH and manufacturing barriers which must be addressed to ensure successful introduction into existing and next generation factories.

SESHA 2013 Speaker Biography

Sanjay Rajguru
Director, International SEMATECH Manufacturing Initiative (ISMI)

Director – ISMI

SESHA 2013 Symposium Abstract

Review of III-V on Si Processing Hazards

Trammell, Steven; Davis, Brett
(ISMI)

For the 10-7 nm technology node, strained silicon is expected to reach low power performance limits, require alternative channel materials. Applications, such as mobile phones and satellites, will require devices which have higher electron mobility allowing functionality at higher frequencies. III-V on Si is an emerging processing technology, which may provide one solution as we approach these functional and material limits. The III-V processes will introduce processes which are new to traditional silicon semiconductor factories, along with a new set of potential ESH hazards. This presentation will provide an overview of the chemical and material hazards associated with III-V on Si processing, and some of the work ISMI is doing to identify, characterize and control these hazards.

Download the Proceedings

SESHA 2013 Speaker Biography

Steven Trammell
ESH Project Manager, ISMI

Steve Trammell is an ESH Project manager at ISMI in Austin, Texas. He manages a wide variety of ESH related projects for the ISMI consortium, with a focus on advanced and emerging materials and processes. Prior to ISMI, Steve worked at Motorola/Freescale for 15 years. Steve holds a B.S. in Mechanical Engineering from the University of Texas and an MBA. He is a registered Professional Engineer in Texas, a Certified Safety Professional and a Certified Hazardous Materials Manager. Steve has been an active member of SESHA since 1993, and is currently the president-elect for the organization.

SESHA 2013 Symposium Abstract

Risk Management of Emerging Technologies: Nanotechnology/nanomaterials

Gibbs, Lawrence
(Stanford University, Stanford, CA)

Oversight and risk management of manufacturing with new technologies is often a challenge even when good risk assessment information is available. Health professionals traditionally rely on the results of quantifiable human health risk assessments to develop and implement risk management programs. However, this becomes considerably more challenging with emerging technologies, where the risk has yet to be quantified. Such is the case with engineered nanomaterials, whose risks are not fully assessed as to their potential toxicological impact or exposure potential. The result is the need to apply qualitative risk management solutions which involve decision-making without all the information needed for quantitative risk assessment. This discussion will focus on the issues and elements involved in developing risk assessment and identify and characterize the major knowledge gaps relative to nanomaterials. Additionally, the presenter will discuss the importance of emergning technologies as economic drivers and also review approaches to nanomaterial risk governance, the challenges to regulatory development, and principles for regulation and oversight of emerging technologies, including nanotechnology.

Download the Proceedings

SESHA 2013 Speaker Biography

Lawrence M. Gibbs, CIH
Associate Vice Provost for EH&S, Stanford University, Stanford, CA

Larry Gibbs is Associate Vice-Provost for Environmental Health and Safety at Stanford University where he is responsible for health, safety, and environmental risk management programs in addition to oversight of institutional emergency planning and risk communication. Stanford has over 2500 laboratories on its campus involved annually in over one billion dollars of research activity ranging from basic sciences, particle physics and engineering to biomedical and human subjects clinical research. His work includes EH&S oversight of nanomaterials research conducted in materials science, engineering, medicine, chemistry and other research areas on campus. Larry is a lecturer at the Woods Institute for the Environment at Stanford and serves on the Stanford Board of Overseers for the SLAC National Accelerator Laboratory. He has graduate degrees from Boston University in science education and from the University of Michigan in industrial hygiene and public health. In addition to his work at the university, he serves as a consultant for a variety of organizations and is a member of the scientific advisory board for nanoTox, Inc, a nanomaterials risk assessment and risk management company. He has authored numerous publications and served as officer and board member in a number of international professional associations, recently as Chair of the ACGIH, and is an AIHA Fellow. He recently chaired the California Higher Education/DTSC/NIOSH Working Group that developed consensus safety guidelines for academic research use of nanomaterials

SESHA 2013 Symposium Abstract

Leveraging Technology to Effectively Manage your Ergonomics Program

Patil, Anuja
(EORM, San Jose, CA)

An efficient proactive ergonomic program focuses on management commitment, early risk identification, mitigation, employee engagement and training. Managing such a program often requires significant investment of time and resources. In many instances the inability to measure the true impact of these ergonomic efforts in addition to the cost of the dedicated time and resources makes it difficult to demonstrate the true value to the organization. This presentation will highlight how integrating technology in the ergonomics program and using tools such as process management software, your ergonomics program can be strengthened and streamlined to improve its value for your organization. The attendees will gain insight on centralizing the ergonomics process, resource allocation, employee engagement and measurement of the outcomes.

Download the Proceedings

SESHA 2013 Speaker Biography

Anuja Patil
Associate Consultant, EORM, San Jose, CA

Ms. Patil is an Associate Ergonomics Professional (AEP) with a Master’s degree in ergonomics and over 3 years’ experience as a physical therapist. As an Associate Consultant with EORM, Ms. Patil provides office and industrial ergonomics program support for multiple companies. More recent experience includes supporting ergonomics programs for Biotechnology industry clients. Ms. Patil has experience developing and implementing ergonomics solutions at Colorado Springs Utilities, as well as multiple hands-on projects as a graduate student and assistant.

SESHA 2013 Symposium Abstract

Insights into Tracer Gas Test Applications for Exhausted Enclosures

Visty, John
(Salus Engineering International; 3004 Scott Blvd.; Santa Clara, CA 95054)

Validating the performance of exhausted enclosures using tracer gas has been around in the semiconductor industry for many years. SEMI S6 specifically outlines methodologies to validate the ability of an exhausted enclosure to control flammable and/or toxic gases. However, new processing technologies in both semiconductor and photovoltaic (PV) coupled with a California ban on the use of sulfur hexafluoride (SF6) as a tracer gas starting in 2013 are posing new challenges. This presentation will cover the basic applied SEMI S6 methodologies including strategies for flammable and toxic gases. Alternative tracer gases to the prevalent use of SF6 will be identified. Finally, design strategies for exhausted enclosures that integrate high volume hazardous production materials (HPMs) will also be discussed.

Download the Proceedings

SESHA 2013 Speaker Biography

John Visty
Principal, Salus Engineering International

John Visty, CIH, is a co-founder / owner of Salus Engineering International a full service equipment product safety consultant based in Santa Clara California. John serves as a senior staff member and performs detailed technical engineering / product safety assessments for a variety of manufacturing process equipment suppliers in the semiconductor, PV and high technology industries. Technical evaluations include chemical exposure, ventilation, lasers, radiation (ionizing / non-ionizing), lasers, ergonomics and sound pressure / energy. John has over 28 years of field experience, including 12 years employment working directly for companies in the high tech industry. Additionally, Mr. Visty serves as a SESHA board member and the current SEMI Industrial Hygiene and S6 Ventilation Task Force leader.

SESHA 2013 Symposium Abstract

SESHA Emergency Response Forum

Yturri, Jeanne; Visty, John; Allen, Craig; Burns, Dave
(Zephyr Environmental Corporation, Salus Engineering, SACHEM Inc., EORM)

In the nature of the “Accidents and Incidents” session that our SSA founders began 34 years ago, this audience-interactive session will include 4 brief presentations and an informal Q&A about various emergency preparedness and response topics. The panel’s moderator, Jeanne Yturri of Zephyr Environmental Corporation and The HazMat Academy, will present highlights of a paper that describes a Boron Trifluoride incident that occurred in Taiwan involving a copycat Emergency Response Containment Vessel (ERCV). The paper was prepared by Eugene Ngai, a globally-respected expert on emergency response for compressed gases and founder of Chemically Speaking, LLC. The “lessons learned” in this incident will be relevant to any Emergency Response Team (ERT) with an ERCV. Mr. John Visty, a Principal at Salus Engineering, will share insight on the evolution of process tools and equipment that now utilize elevated process temperatures and multiple incompatible chemicals at the same station within a tool. This advancement in process technology obviously presents the potential for new challenges and concerns. Dr. Craig Allen, Chief Technology Officer of SACHEM, Inc., will review their TMAH safety package and options to help reduce handling and exposure to TMAH including high purity alternatives for existing and new TMAH applications. Mr. Dave Burns, a Senior Consultant with EORM, will present a new approach for private industry performing an effective emergency response using a “Core” ERT supplemented by volunteers which maximizes use of resources, reduces business interruption, and ensures regulatory compliance.

Download the Proceedings (Article 1)

Download the Proceedings (Article 2)

Download the Proceedings (Article 3)

Download the Proceedings (Article 4)

SESHA 2013 Speaker Biography

Jeanne Yturri
Principal, Zephyr Environmental Corporation, Salus Engineering, SACHEM Inc., EORM

Principal

SESHA 2013 Symposium Abstract

Mitchell, Glenn
(Matheson, Longmont, CO)

Authors: Glenn Mitchell, Robert Torres, Adam Seymour, Ramkumar Subramanian, and Carrie Wyse Matheson, Advanced Technology Center, Longmont CO 80501, USA Nitrogen trifluoride (NF3) is traditionally used in CVD chamber cleaning processes, most notably for thin film transistor (TFT) flat panel displays (FPD), and is used in very large quantities. As the semiconductor industry moves to more stringent regulations regarding high global warming potential (GWP) gases, NF3 usage and emissions are coming under scrutiny. Recent estimates (1) indicate that an optimized process can have greater than 98% destruction efficiency (DE), leaving 2% of the NF3 to be present in the process effluent. A recent report (2) estimates that NF3 has a GWP impact of 17,000 CO2 equivalents, which make the molecule a very high potential contributor to global warming over other gases used in the semiconductor industry. Matheson has developed Green NF3TM technology, with the objective of reducing the amount of NF3 used in a cleaning process as well as to improve the utilization of NF3 in the process. This is achieved by introducing a carefully selected additive into the NF3 process which forms new in-situ cleaning species. These cleaning species are formed in a plasma environment from the reaction of radicals and fragments from both the NF3 and additive and are easily abated species. Using this approach Matheson has demonstrated reduction in the amount of NF3 used in standard process recipes since the created in-situ molecules can maintain or increase the cleaning efficiency over pure NF3. Experiments conducted on-site with OEM FDP tools show up to a 10% reduction in NF3 usage and up to a 40% reduction in million metric tons carbon dioxide equivalent emissions directly exiting the tool. Further experiments conducted at Matheson’s Advanced Technology Center have established even higher levels of NF3 usage and emission reduction through process optimization and additive tuning. References (1) L. Brindley, “Nitrogen trifluoride (NF3): Calls to monitor potent greenhouse gas” RSC Chemistry World, July 2008. (2) M. J. Prather et al., “NF3, the greenhouse gas missing from Kyoto” Geophysical Research Letters, 35, June 2008.

Download the Proceedings

SESHA 2013 Speaker Biography

Glenn M. Mitchell, Ph.D.
Senior R&D Manager, Matheson, Longmont, CO

Glenn M. Mitchell, Ph.D., is a Senior R&D Manager at Matheson’s Advanced Technology Center in Longmont, Colorado. Dr. Mitchell’s focus is on new molecule and process development and optimization for the electronics, semiconductor, and solar industries. His areas of expertise are in ultra-trace impurity analysis and analytical method development, advanced statistical analysis and chemometrics, and etch, deposition, and chamber cleaning chemistries and processes. Additionally, Dr. Mitchell is skilled in new product development and commercialization and intellectual property and intellectual asset management.

SESHA 2013 Symposium Abstract

GHG Emissions Monitoring Using EPA Method 320

Hall, Steve ; Benaway, Bryan; Bellon, Alex
(URS Corporation, Austin, TX)

This presentation will cover the methodology, intricacies and complications of GHG monitoring at semiconductor facilities using EPA’s Test Method 320–Measurement of Vapor Phase Organic and Inorganic Emissions by Extractive Fourier Transform Infrared (FTIR) Spectroscopy. With the revised EPA GHG reporting rule likely to include stack sampling in accordance with EPA Method 320, it is important to understand the applicable parts of the method and its relevance for GHG emissions sampling at semiconductor stacks. By doing so, the facility operator will have the knowledge base to determine if this sampling can be performed in-house or, if outsourced, how to properly select a test company. This presentation will provide an overview of the Test Method, providing guidance on the important aspects (e.g. method validation, analyte spiking, minimum detection limit determination, etc.) and what is required in instrumentation and experience to perform this testing.

Download the Proceedings

SESHA 2013 Speaker Biography

Steve Hall
Senior Scientist/Project Manager, URS Corporation, Austin, TX

Steven Hall is currently employed as a Project Manager and Senior Scientist at URS Corporation in Austin, Texas. His responsibilities include gas-phase emissions monitoring using various optical techniques. His work has been focused on emissions testing using FTIR, analysis, interpretation and validation of FTIR data, and training others on the usage of the FTIR equipment and test protocols including EPA Method 320. Before joining URS, Steven was conducting undergraduate research at the University of Illinois under Dr. James Lisy. His research involved implementation of molecular beam techniques for the formation of alkali metal/solvent clusters and probing them with a color center laser. Steven earned a Bachelor of Science in Chemistry and graduated with distinction from the University of Illinois Urbana-Champaign.

SESHA 2013 Symposium Abstract

Abatement Testing – High Performance and Continuous Improvement

Davia, Dan; Raley, Brian; Joe van Gompel, Bruce Tripp,
(Matheson, Longmont CO; GLOBALFOUNDRIES, Malta NY; IBM, Hopewell Junction NY)

The mandatory reporting rule established by the US EPA in 2010 requires semiconductor manufacturers to report emissions of fluorinated greenhouse gases (F-GHGs) from their facilities. As part of this rule manufacturers are permitted to either use a default destruction or removal efficiency (DRE) for F-GHGs, or measure actual F-GHG DREs on a subset of their entire point of use (POU) abatement fleet. The latter approach provides an accurate account of DRE performance and gives fab management and abatement vendors a powerful tool to impart improvements on abatement units that may be performing below manufacturers specified DREs; ultimately leading to reduced F-GHG emissions to the environment. However, deciding to test DRE performance versus selecting default DRE values brings with it additional financial and operational burdens to the fab that must be carefully considered. In this work, DRE testing conducted in 2012 at two 300 mm fabs will be discussed. Topics will include details regarding the DRE improvements made in 2012 to a mature POU abatement fleet (IBM, Hopewell Junction NY) based on lessons learned from abatement testing conducted in 2011, and how these improvements will be continued into 2013. Topics will also include the DRE performance benefits presented by a fleet of new POU abatement units (GLOBALFOUNDRIES, Malta NY) that are equipped with the latest combustion-based abatement technology. The presentation will conclude with DRE performance summaries and lessons learned in anticipation of a revision to the EPA’s mandatory reporting rule (expected in calendar year 2013).

Download the Proceedings

SESHA 2013 Speaker Biography

Davia, Raley, Tripp, Van Gompel
Performance Services Manager, Matheson, Longmont CO

SESHA 2013 Symposium Abstract

Arc Flash Hazard Assessment in the Semiconductor Industry

Polic, Lindsay; Elliott, Larren
(EORM, Laguna Hills, CA and Training Technology, Austin, TX)

While much has been done to reduce the risks of electrical shocks, many organizations are just now beginning to understand that there is a second hazard to electricity: Electric Arc Flash. This presentation is designed to save lives, prevent disabling injuries, and prevent damage to plants, buildings and equipment. Based on NFPA 70E, attendees will gain further respect for the power of electricity as it applies to the semiconductor facilities. You will learn how to provide contractors and site personnel the proper knowledge and hazard awareness required to work safely in and around the fab environments. The importance of electrical maintenance, coordination and arc flash studies, and effective administrative controls will be emphasized throughout the presentation. In addition, PPE requirements for the various arc flash hazard risk categories will be explained. Who Should Attend: This presentation is intended for conference participants interested in learning more about the hazards, hierarchy of risk controls and current EHS challenges due to the hazards of electric arc flash.

Download the Proceedings

SESHA 2013 Speaker Biography

Lindsay Polic, CSP, REHS
Principal Consultant, EORM, Laguna Hills, CA and Training Technology, Austin, TX

Ms. Polic has over 12 years of EH&S experience which includes both consulting and industry. She has considerable experience in areas including comprehensive EH&S audits, machine guarding and Lockout Tagout (LOTO) surveys, program development and training, EH&S training including Emergency Response and DOT, hazardous materials inventory, non-ionizing radiation surveys, and project management. Additionally, she has experience with Process Safety Management (PSM) and environmental Risk Management Plan (RMP) gap assessments, process hazard analysis and electrical safety. Ms. Polic conducts assessments of a facility’s compliance with Local, State, and Federal regulations including Fire Code and NFPA, OSHA regulations, EPA requirements, and corporate policies.

SESHA 2013 Symposium Abstract

Determining, Organizing and Presenting GHG/Carbon (CO2e) Footprint Activities & Data

Wurm, Charles
(Micrel Semiconductor, San Jose, CA)

This program uses combined EXCEL spreadsheets to show the creation and removal of carbon emissions (CO2e). It can be expanded or contracted depending on your activities and uses labeling from the ISO 14064. General Spreadsheet topics: (1) Program Flowchart, Footnotes and References. (2) Direct Carbon Generation: from production process emissions. (3) Direct Carbon Generation: from production support activities such as boiler, heater operations, vehicle use, refrigerant leaks, etc. (4) Indirect Carbon Generation: from support activities such as the creation of electric power off site. (5) On Site Carbon Sinks: determining the removal of carbon emissions (CO2e) from flora. (6) Total Carbon Footprint: combines this data to determine net site carbon emissions and complete operations carbon emissions. This method allows you to better understand, segregate and monitor carbon emisssions (CO2e) and production activities.

Download the Proceedings

SESHA 2013 Speaker Biography

Charles Wurm
EHS & Training Manager, Micrel Semiconductor, San Jose, CA

I have worked in semiconductor electronics manufacturing for 30 years and have specialed in EHS activities for the last 24 years. My hobbies include building and driving electric vehicles, two patents have been received while building my latest prototype. Education: Masters of Environmental Management from the University of San Francisco, member of the ASSE and a Certified Safety Professional.

SESHA 2013 Symposium Abstract

A Process-based and Simplified Carbon Footprint Model for Customized Semiconductor Products

Yin, Jessica; WANG, TING-HSIN
(UMC, Hsinchu, Taiwan)

Jessica Yin, Hsiao-Chun Wang, Tin Hsin Wang, Allen H. Hu, Ching-Yao Huang, Nowadays, “carbon footprint” is often used as shorthand for the amount of carbon emissions generated by an activity, organization or product. The carbon footprint label of a product has been the most important indication of how “green” a product is, especially as climate change effects increase in severity and consumer green awareness grows. The foundation to obtain a green label is to confirm data thoroughly during the inventory stage. For the semiconductor industry, the complicated manufacturing process of IC (integrated circuits) makes carbon-related basis data more difficult to inventory. The significant amount of manpower, time and budget involved also means that large enterprises are the few that have the means to conduct and market green measurement activities. In addition, the absence of a means to distinguish between different products is problematic. The current IC PCR announced in 2008 is a popular structure that has been used for calculating carbon footprint within the semiconductor industry. Following the IC PCR, we can get a rough result of the carbon footprint for each IC, only by averaging all of the products in the whole factory. The calculation is unable to show the difference between products with different process or raw material usage and cannot be applied to the design stage of a product. This study aims to develop a simplified model and a cost efficient, easy-to-use tool to meet semiconductor industry needs for carbon footprint calculation. We also developed a method which could differentiate the carbon footprint of various IC products by looking into the process design, tool and raw material usage. In total, we obtained more than 7,000 CFP samples from 8 semiconductor fabs from 2010 to 2011. Then we used regression analysis to find the relationship between key factors in the process that customers are concerned about and the carbon footprint of each product. Based on the results of the analysis, we identified 7 key parameters that predominantly affect on the carbon footprint of an IC. The key parameters include four for the front-end processes: function, technology node, mask layer and metal layer, and three for back-end process: packaging type, wire used and body size. The simplified carbon footprint model developed for those factors will help IC designers or even end product designers easily estimate carbon footprint in the design stage within a certain reliability, and help them evaluate if any changes to their design are necessary. Keywords: Carbon footprint of products (CFP), Green design, Semiconductor industry,

Download the Proceedings

SESHA 2013 Speaker Biography

Jessica Yin
Senior Engineer, UMC, Hsinchu, Taiwan

Miss Jessica Yin is the major participator and the legal representative of UMC in the EU FP7 LCA to go project. Miss Yin has being joining UMC for nearly 13 years, and is currently serving as the Manager of Environmental Protection Engineering Department. Miss Yin is in charge of integral strategic planning relative to green affairs on a corporate level, as well as introducing sustainability and CSR affairs. Miss Yin is also the deputy chairman of the environmental protection committee of Taiwan Science Park Industry Association since 2009. In recent years, the team that she leads helped UMC earned several Green and CSR awards and listed in the DJSI for continuous 5 years. They also introduced newest international concept into UMC to enhance the CSR and Green competitive power of the company such as to publish the CSR report annually since 2000, led the Taiwan semiconductor industry to establish CSR committee in 2008, to complete the first carbon footprint inventory for 200 mm IC wafer in 2009 and the first water footprint inventory fro 200 & 300 mm IC wafer in 2010, to be the first Taiwan electronic company to announce the Climate Change Policy and the carbon reduction target in 2010. Carbon Management is now the most important issue that UMC is closely monitoring.

SESHA 2013 Symposium Abstract

How Relevant is the European Ecodesign Directive for the Semiconductor Industry?

Schischke, Karsten; Proske, Marina; Stobbe, Lutz
(Fraunhofer IZM, Berlin, Germany)

The European Ecodesign Directive adopted in 2005 and recasted in 2009 intends to regulate the life cycle of energy-related products through a multitude of product regulations. The semiconductor industry by now has rather benefitted from this policy, as the market demand for energy efficient semiconductors increased in recent years: Powerful and cost-effective microcontrollers help to save energy in home appliances, ICs control compact fluorescent lamps and LED lighting technology, and the evolution of power MOSFETs increased efficiency of power supplies significantly in recent years, leading also to the termination of the Energy Star programme for external power supplies – due to the tremendous progress achieved. Now, the semiconductor industry in Europe might be affected in a totally different way by the ecodesign policy, which extended its focus from home appliances, consumer electronics and office equipment to industrial equipment, including ovens and machine tools: Although no detailed measures to regulate industrial equipment have been proposed yet, several options are under consideration currently, which will be relevant for equipment to be installed in European cleanrooms. These could include recognition of SEMI S23 Guide for Conservation of Energy, Utilities and Materials as a sub-standard under the Ecodesign Directive, the implementation of power management features, or Minimum Energy Performance Standards (MEPS) for ovens. Such kinds of regulations are expected short-term. In the long-term the IC industry might face a third type of effects, stemming from the Ecodesign Directive: Although the directive puts in place a framework, which allows a regulation of the whole product life cycle the focus by now has been on energy use efficiency of products. Material and resource consumption for manufacturing the components of an electronics product has not been addressed yet, but the European Commission launched a study to explore possibilities to address material efficiency better. Already a while ago the European Passive Components industry was concerned by the possibility, that environmental production data might be requested throughout the supply chain, mandated by the Ecodesign Directive. The industry launched an initiative to be prepared for such kind of requirements. Semiconductor manufacturers, being even more relevant in terms of material and energy consumption in the supply chain of electronics, might be affected by similar declaration requirements, as carbon footprint data and material content data might be an option for European policy makers. The presentation will recap the developments under the Ecodesign Framework Directive 2009/125/EC and will outline a roadmap, how the evolution of this policy might impact the semiconductor industry in the future.

Download the Proceedings

SESHA 2013 Speaker Biography

Karsten Schischke
Senior Researcher, Fraunhofer IZM, Berlin, Germany

Karsten Schischke holds a degree from Technische Universtaet Berlin in Environmental Engineering and is with TUB and Fraunhofer as a senior researcher since 2000. His main research fields are packaging technologies, ecodesign of electronics and Life Cycle Assessments. He was involved in several product group studies for the European Commission under the Ecodesign Directive and coordinates currently the project “LCA to go”, which researches environmental assessment approaches for sensors, photovoltaics, printed circuit boards, passive components and semiconductors, and a couple of other sectors.

Codes and Regulations Overview / Update

Download the Proceedings

SESHA 2013 Symposium Abstract

Fundamentals and EHS Challenges of Light Emitting Diode Manufacturing

McIntyre, Andrew
(Environmental & Occupational Risk Management, Inc (EORM))

Light emitting diode (LED) technologies provide energy with distinct environmental benefits over traditional lighting technologies. With the rapid increase in demand (both consumer and commercial) for LED products, it is essential that this expanding industry address key environmental, health & safety (EHS) issues encountered during the expansion of similar high-technology industries. Experience with the semiconductor industry over the last three decades has provided a clear EHS roadmap for the LED industry to follow. This presentation will provide an overview of EHS and sustainability hazards/controls of the light emitting diode manufacturing, maintenance, supply chain and end-of-life product issues.

Download the Proceedings

SESHA 2013 Speaker Biography

Andrew McIntyre, CIH
Managing Principal & Co-Founder, Environmental & Occupational Risk Management, Inc (EORM)

Mr. McIntyre has thirty years of experience as an Environmental Health and Safety Professional in high technology industries and is a co-founder of Environmental and Occupational Risk Management, Inc (EORM). His industry experience started with Xerox Corporation’s Electronics Division in 1981 and continued with the Hewlett Packard Company’s Component’s Group in 1994. While at Xerox and HP, Andy’s experience included the development and implementation of health and safety programs in both Compound Semiconductor and Silicon microelectronics manufacturing. During his tenure with HP, Andy was awarded Certification in Industrial Hygiene by the American Board of Industrial Hygiene. After co-founding EORM in 1990, Andy has supported a variety of market areas including semiconductor, communications, biotechnology, pharmaceutical and most recently, the photovoltaic industry where he has focused on assisting clients in optimizing their EHS programs by improving operational compliance, reducing cost, enhancing productivity and strengthening business advantage. Currently, Andy holds the position of Executive Vice President and Managing Principal with EORM. Andy’s industry association involvement has centered on the Semiconductor Environmental Health and Safety Association (SESHA) where his involvement dates back to 1982. Andy has had the privilege of serving the Association as a member of the Board of Directors from 1989 to 1996, holding a series of leadership positions to include serving as President from 1995 – 1996. He received the Presidents Award in 1999 and was elected in 2001 as a Fellow by SESHA. He is the second recipient of Pacific Industrial and Business Association (PIBA) Health and Safety Professional of the Year Award (1999). Over the last twenty years, he has authored numerous articles and had the opportunity to present at international conferences and symposiums in both North America and Asia. Andy holds a Bachelor’s Degree in Environmental Toxicology from the University of California, Davis and a Masters Degree in Environmental and Occupational Health/Industrial Hygiene from California State University, Northridge.

SESHA 2013 Symposium Abstract

BIM, LEED, IPD, LEAN – The new Alphabet of the Capital Project

Chasey, Allan
(Del E Webb School of Construction, Tempe, AZ)

With the continued proliferation of acronyms in the construction industry (BIM, LEED, IPD, LEAN, RFID, GPS, GIS), this presentation will review the latest technologies and how we can use them effectively to improve the delivery and operation of the manufacturing facility. Building Information Modeling (BIM) is one of the most promising developments in the construction industry. It represents an accurate virtual model of a facility which can be constructed digitally. The model contains precise geometry and relevant data to support the construction, fabrication, procurement and on-going facility operational activities. BIM, ultimately a digital representation of the physical and functional characteristics of a facility, has become a valuable tool in many sectors of the capital facilities industry. However in current usage, BIM technologies tend to be applied within vertically integrated business functions rather than horizontally across an entire facility lifecycle. Leadership in Energy and Environmental Design (LEED) is playing a vital role in defining “Green” or sustainability in the construction field. The awareness for “Green” is rapidly increasing and this “Green” building revolution has been addressed in almost every phase of the facility life-cycle. By following structured systems such as LEED to construct and measure “Green,” the capital project industry is moving beyond conventional practices, even impacting how facilities are operated and maintained. Among currently available sustainability rating systems, LEED is revolutionizing the approach to the built environment by developing different criteria for different facility types. LEAN is process to reduce and eliminate waste. Widespread in the manufacturing arena for years, the construction and maintenance industry is starting to adopt many of the concepts to remove waste and improve the process how facilities are constructed and maintained. Integrated Project Delivery (IPD) is a complement of the BIM/LEED/LEAN process. Since BIM uses 3D modeling technology to design and plan projects, including cost and time, IPD is gaining ground as an improved project delivery process due to the high level of communication and collaboration required around the BIM process. This presentation will put this construction-related alphabet in perspective in the fast paced world of the semiconductor facility to show how risk is reduced and projects are delivered faster.

Download the Proceedings

SESHA 2013 Speaker Biography

Allan D. Chasey
Professor, Del E Webb School of Construction, Tempe, AZ

Dr. Allan D. Chasey is the Program Chair and an associate professor in the Del E. Webb School of Construction, at Arizona State University. He is also the Director of CREATE, Construction Research and Education for Advanced Technology Environments, a research and education consortium representing the advanced technology design and construction industry. Dr. Chasey is a registered Professional Engineer in Arizona and a LEED AP.

SESHA 2013 Symposium Abstract

PV End of Life Management: Looming Crisis or Environmental Opportunity?

Larson, Jim
(EORM, San Jose, CA)

The issue of managing photovoltaic (PV) modules at the end of their useful life is not a new issue. With millions of solar modules being installed each year around the globe, and the high potential for miss-management during disposal, solar module manufacturers are receiving mounting pressure from external stakeholders regarding their liabilities through end of life management. This presentation will review current best management strategies and emerging technologies through benchmarking practices for managing end of life PV, including: reuse, recycling and disposal options. Current and pending environmental regulations and voluntary consortium approaches will also be reviewed. This presentation will share benchmarking information from PV manufacturers regarding current practices and will offer strategies for success.

Download the Proceedings

SESHA 2013 Speaker Biography

Jim Larson
Principal Consultant, EORM, San Jose, CA

Jim Larson is a Principal Consultant with EORM, headquartered in San Jose, CA. Jim leads the Clean Tech Business Practice for EORM. He has over 20 years of experience developing and delivering EHS services. Jim holds certifications as a Certified Professional Environmental Auditor as well as a Certified Hazardous Materials Manager. He holds a bachelors degree in Engineering Technology from St. Cloud State University as well as a Masters in Industrial Safety from the University of Minnesota- Duluth. He has worked for a number of high tech firms including Compaq Computers, Applied Materials, Agilent Technologies and SunPower Corporation.

SESHA 2013 Symposium Abstract

Best Practices In Chemical Process Safety -Lessons Learned and Re-Learned the Last 50 Years

Jones, Jerry L.
(Chemical Processing Industry Consultant)

Download the Proceedings

SESHA 2013 Speaker Biography

Jerry L. Jones
Bay Area, Chemical Processing Industry Consultant

Jerry is a licensed professional engineer with over 30 years experience in leading and supporting process and product development teams, engineering and manufacturing for commercialization of new technologies. He has directed economic analysis/optimization tasks, scale up and technology transfer, design/construction of facilities, and managed regulatory affairs. He has supported organizations and projects in 20 countries. He has been active in numerous professional societies, an editor of American Chemical Society symposia proceedings, and has published dozens of technical studies and articles. He was a co-inventor of a patented chemical reactor for highly exothermic reactions. He has served as an expert witness in civil litigation and administrative law proceedings, and a witness at a Congressional Hearing. Recently he served as the Genentech representative to the American Institute of Chemical Engineers’ Center for Chemical Process Safety and assisted in the preparation of a guidelines book on process safety in bioprocess facilities. He was also an industry representative to the ANSI US Technical Advisory Group on the ISO 14000 Environmental Management System Standard. He has participated in industry/government collaborative projects and served as the chair of a Technical Advisory Committee for a regional groundwater resources modeling project in the San Francisco Bay Area with the lead agency being the US Geological Survey. Jerry holds three engineering degrees, a BS and a ME in chemical engineering from Cornell University and an MS in environmental engineering from Stanford University. He is a licensed engineer in several states and holds a number of nationally recognized certifications in the hazardous materials and safety fields. Jerry resides with his wife in Menlo Park, CA and they have two adult children.

SESHA 2013 Symposium Abstract

Incident and Exception Reporting and Performance Metrics

Manders, Coni; Dayalal, Milan
(International Rectifier)

Coni Manders, Director of Corporate EHS & Social Responsibility International Rectifier El Segundo, CA Incident and Exception Reporting and Performance Metrics International Rectifier’s (IR) Global Environmental, Health, Safety and Security Policy as part of the Corporate Social Responsibility Policy, establishes the foundation of IR’s commitment to corporate citizenship. As a member of the Electronic Industry Citizenship Coalition (EICC), IR monitors and posts performance results regarding energy and water conservation and waste management. IR’s Incident & Exception Reporting System enables trends to be evaluated and data easily accessed. This presentation will demonstrate how an EHS Incident, Accident, Tracking and Metrics Reporting system will give IR professionals the ability to analyze accidents and near miss data to reveal gaps in compliance and emerging problems. Exception reporting parameters include, for example: events which may affect operations, injuries or illnesses that cause lost time or increase workers’ compensation costs, and any variation from EHS regulations.

Download the Proceedings

SESHA 2013 Speaker Biography

Coni Manders
Director of Corporate EHS & Social Responsibility, International Rectifier

Coni Manders has over 20 years experience in management of the Corporate Social Responsibility and Environment, Health & Safety functions in the semiconductor, oil & gas and aerospace sectors. She is a proven leader and advocate for CSR & EHS, and has created progressive programs internationally.Coni has held leadership positions in The Electronics Industry Citizenship Coalition (EICC), the Auditing Roundtable, University of California Certificate Program in EHS Management and the Head Trauma Support Project, Inc. Coni is a graduate of UCLA, Anderson School of Business, UC Davis and California State University, Sacramento.

SESHA 2013 Symposium Abstract

Toxic Gas Monitoring Forum

Davis, Brett; McKenna, Molly
(Zephyr Environmental Corp., Austin, TX)

The Toxic Gas Monitoring (TGM) Forum is proposed as taking two sessions during SESHA 2013. The first session would include a presentation summarizing the results of survey completed for ISMI’s TGM Best Practices Project. The suvery topics included: applicable regulations, company internal requirements, warning and alarm levels in multiple areas of a manufacturing facility, redundant monitoring, allowable system downtime, suppliers and designers used, operational responsibilities and more. The second session would be a roundtable to address the participants perspectives on the survey topics and any other TGM issues of interest.

SESHA 2013 Speaker Biography

Brett Davis
Senior Project Engineer, Zephyr Environmental Corp., Austin, TX

Brett Davis is a Senior Project Engineer for Zephyr Environmental Corporation in Austin. Before entering the consulting profession, Brett provided EHS consulting and project management support for Motorola Semiconductor Products Sector (now Freescale Semiconductor) sites worldwide. Brett’s current professional interests include process and electrical hazards risk management and air emissions issues, including air permitting and ozone precursor emissions reduction. Brett has served on the Central Texas Clean Air Force Executive Committee for six years and is currently the Chair of the organization’s Technical Advisory Committee. Brett earned a B.S. in Chemical Engineering from the University of Texas at Austin and an M.S. in Hazardous Waste Management from National Technological University, now Walden University. He has been a registered professional engineer in Texas since 1991.

SESHA 2013 Symposium Abstract

Toxic Gas Monitoring Forum

Davis, Brett; McKenna, Molly
(Zephyr Environmental Corp., Austin, TX)

The Toxic Gas Monitoring (TGM) Forum is proposed as taking two sessions during SESHA 2013. The first session would include a presentation summarizing the results of survey completed for ISMI’s TGM Best Practices Project. The suvery topics included: applicable regulations, company internal requirements, warning and alarm levels in multiple areas of a manufacturing facility, redundant monitoring, allowable system downtime, suppliers and designers used, operational responsibilities and more. The second session would be a roundtable to address the participants perspectives on the survey topics and any other TGM issues of interest.

Download the Proceedings

SESHA 2013 Speaker Biography

Brett Davis
Senior Project Engineer, Zephyr Environmental Corp., Austin, TX

Brett Davis is a Senior Project Engineer for Zephyr Environmental Corporation in Austin. Before entering the consulting profession, Brett provided EHS consulting and project management support for Motorola Semiconductor Products Sector (now Freescale Semiconductor) sites worldwide. Brett’s current professional interests include process and electrical hazards risk management and air emissions issues, including air permitting and ozone precursor emissions reduction. Brett has served on the Central Texas Clean Air Force Executive Committee for six years and is currently the Chair of the organization’s Technical Advisory Committee. Brett earned a B.S. in Chemical Engineering from the University of Texas at Austin and an M.S. in Hazardous Waste Management from National Technological University, now Walden University. He has been a registered professional engineer in Texas since 1991.

SESHA 2013 Symposium Abstract

Strategies for Tetramethylammonium Hydroxide (TMAH) Recovery and Recycling

Allen, Dr. Craig
(SACHEM)

Safe and environmentally responsible handling of tetramethylammonium hydroxide in semiconductor manufacturing is critical at all stages of Fab operations. Expanded use of TMAH in front end of line etching and back end of line wafer thinning can lead to significant volumes of TMAH waste that are added to the already large volumes of wastes from developer and rinses that are generated by photolithographic processes. At the same time, demands for waste reduction, improved chemical efficiency and more stringent discharge limits have challenged traditional waste treatment processes and models. SACHEM has pioneered systems for true recycle and reuse of TMAH that is recovered from Fab processes. We will review recovery and recycle options based on our experience in commercial scale operations.

Download the Proceedings

SESHA 2013 Speaker Biography

Dr. Craig Allen
Chief Technology Officer, SACHEM

Craig Allen is the Chief Technology Officer at SACHEM, Inc. in Austin, TX. He holds a BS degree in Chemistry from the University of Vermont and obtained MS and Ph.D. degrees in Physical and Analytical Chemistry from Northwestern University. After graduate school, he joined the faculty at Indiana University in Analytical Chemistry. He later relocated to Rohm and Haas Company in Philadelphia where he held a number of roles in R&D and Technology Development before moving to the Electronics Materials Division (formerly Shipley) in 2000. He joined SACHEM in 2008 and is responsible for process technology development and global research and development in SACHEM’s labs in Europe, Asia and North America.

SESHA 2013 Symposium Abstract

SMART Phone Technology | Driving Safety Excellence and Peace of Mind

Goss, Dale
(EORM Corporate Office – San Jose, CA)

Mobile electronic devices are changing the world regarding how we access information, our speed to answer questions, and the use of technology to make better informed decisions. With the App market exploding, the development of Safety applications is vast with creative tools entering the market providing real-time access to enormous amounts of information for safety professionals. This presentation will review the two most popular application platforms made for smart phone (iPhones/iPads and Android devices) available for EHS professionals and will include an informal roundtable discussion with the audience. The presentation will provide information and links to popular, highly-rated, free (or through minimal cost) apps currently available on the market. Colleagues have found this presentation to be extremely useful, cutting-edge, while providing access to select data instantly increasing productivity, efficiency, and the ability to make better informed business decisions. Bring your smart phones and smart devices – and have fun getting to know what others are already using as a competitive advantage.

Download the Proceedings

SESHA 2013 Speaker Biography

Dale Goss, MBA, MPH, CSP
Principal Consultant, EORM Corporate Office – San Jose, CA

Dale Goss, MBA, MPH, CSP and EORM Principal Consultant, has over 14 years of experience in environmental, health and safety (EHS) regulatory compliance and strategic management system implementation. Mr. Goss’s experience ranges vastly working with clients in the semiconductor, photovoltaic, pharmaceutical, biotechnology, entertainment, sports, and healthcare industries. Mr. Goss specializes in providing clients with cost-effective, risk-based solutions designed to match their current business needs.

SESHA 2013 Symposium Abstract

Sustainability Project Based Learning Model

Miller, Thomas
(ZMassociates Inc., Newport Beach, CA)

A well organized and well run sustainability project can improve organizations and communities in a way that breeds more positive change so a seemingly small project can, in time, become a force for much larger change. Sustainability projects have the potential to transform a community or an organization by uniting people in a common cause, by not only showing the way, but involving people in improving environmental, social and economic conditions.

SESHA 2013 Speaker Biography

Thomas A. Miller
President , ZMassociates Inc., Newport Beach, CA

Closing Ceremony

Download the Proceedings

Greenhouse Gas Leadership Forum (ISMI)

Download the Proceedings