Hazards Associated with Litho Equipment

Greenberg, Clifford
(Nikon Precision, Belmont, CA)

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This presentation discusses the hazards associated with lithography equipment (steppers, scanners) in the fab. Topics include some historical background, assessment of hazards and risk reduction during design, residual risk to users and service personnel.

Back to SESHA 29th Annual Symposium (2007)



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