Integrating the concept of Sustainable/Green Chemistry into the Semiconductor Industry

Kenny, Leo; Brown, Steve
(Intel, Santa Clara, CA)

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A wide array of novel materials will be needed to address future technology challenges for the semiconductor industry. These materials will require a thorough characterization of their properties and understanding of the ESH implications. Given issues of natural resource and materials availability and a more complex global regulatory landscape, this will require a fundamentally different strategy in the development of emerging research materials. In response to these challenges, a comprehensive methodology is being developed based on the externally established Green (sustainable) Chemistry Principles* , which describe the design of chemical products and processes that reduce or eliminate the use or generation of hazardous substances, applicable across the life cycle of a chemical product, including its design, manufacture, and use. *(Anastas, P. T. and Warner, J. C. Green Chemistry: Theory and Practice, Oxford University Press: New York, 1998) An introduction to the key elements and concepts that should be part of a strategic framework of sustainable/green chemistry is described. By defining requirements and objectives in the technology roadmap for the semiconductor industry (ITRS), which address key ESH gaps to enabling new capabilities, this will set an expectation for research consortia and industry suppliers to address these issue in the chemical design phase.

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