Risk Assessment and Risk Management for Pyrophoric and Flammable Gases
McLaughlin, Anthony ; Peterson, Susan
(Earth Tech Microelectronic Services, San Jose, CA)
Increasing flows of pyrophoric and flammable gases in the semiconductor and flat panel industries highlight the need to ensure safety in the critical areas of the gas delivery, pumping and abatement systems. Risk assessment and risk management are essential resources in reducing the risks associated with hazardous process gases. This presentation’s intent is to provide a framework for assessing the risks associated with the gas delivery, exhaust pumping and abatement systems. The presentation will demonstrate how to integrate hazard identification and quantifiable risk assessment methods into a formalized program for managing hazardous process gases.