SEMI® International Standards – Guiding ESH in the SC Industry
(Texas Instruments, Dallas, Tx)
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This presentation describes SEMI® International Standards in General and Safety and ESH Guidelines in particular. It describes the existing general Safety/ESH Guidelines and those that are being developed, as well as, other related SEMI Standards that are used within the Safety Guidelines as test protocols and other support documents. It will also provide a roadmap of the SEMI® standards with emphasis on the Safety/ESH-related documents that are currently planned and identify gaps where there may be a need for a future document. There will also be a short historical overview about how SEMI S2 and SEMI S8 have developed and how they helped to improve the industry.