Mark Johnsgard

CTO, Ebara Technologies Inc., Sacramento, California

Mark and Kris Johnsgard attended SJSU studying Physics in the 70s while working full time at Epitaxy Inc., the first Epi service company in Silicon Valley. They have over 60 years of combined experience in epitaxial and silicon wafer processing, equipment and process development and facilities and maintenance at companies such as Gemini Research, Moore Technologies and Mattson Technology. In 1988 they founded Airgard Inc. a point of use gas abatement manufacturer, initially targeting abatement solutions for the Epi industry. Between them they have over 15 patents granted and applied for.

Back to SESHA 31st Annual Symposium (2009)



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