SESHA 2016 Symposium — PDC1

The Science Behind Exhaust Gas Management

Joe* Van Gompel

Equipment Product Group

The various process manufacturing steps of semiconductors, compound semiconductors, solar panels, and flat panel displays make use of a variety of process gases, many of which are toxic, combustible, explosive, and/or condensable. The technologies and strategies for dealing with both the process gases and the process exhaust byproducts are dependent on the physical and chemical properties of the combinations of these gases, which vary widely based on the process. There is no one-size-fits-all approach to process exhaust management, so the options must be carefully considered. The PDC begins with a survey of the chemistry of a wide variety of common process gases and byproduct gases as it relates to exhaust management, followed by an overview of some of the technologies (water scrubber, dry scrubber, burn-wet, plasma, etc.) that are used in process exhaust management, and then appropriate technologies by process. The PDC concludes with greenhouse gases; why some are more stable than others (e.g. CF4) and some approaches to abatement.

SESHA 2016 Symposium — PDC1

Semiconductor Fab Greenhouse Gas Reporting Requirements and POU Abatement Test Methodologies

Mike Sherer

Trinity Consultants, Phoenix, Arizona

This four-hour professional development course will present the semiconductor fab greenhouse gas emissions reporting requirements for EPA under 40 CFR Part 98 Subparts A, C and I, and the EPA test protocol for greenhouse gas destruction or removal efficiency for point-of-use(POU)abatement devices. In addition, semiconductor processes that emit greenhouse gas emissions will be discussed. Additional powerpoint slides will be provided to attendees for typical semiconductor fab stack sampling methods and for the ISMI environmental characterization guidelines.

SESHA 2016 Symposium — WSC1

Energetics in Exhaust Systems

Tim Yeakley

World Semiconductor Counsel, Safety and Health Working Group

Energetics in Exhaust Systems Workshop Agenda 1) Review the current status of the Sematech document that was published in 2014. 2) Provide an update to the development of the SEMI standard for Metal Organic Chemistries 3) Review the process and data collected by Sematech and SUNY-Albany NY 4) Member sharing of any events not previously discussed – incident reviews 5) SEMI Standard – content review 6) Information exchange – facilitated discussion focusing on known occurrences and actions taken to reduce risk of future occurrence 7) Summary of follow up actions. WORKSHOP PARTICIPATION: Participation in this full day workshop is limited to WSC members and approved suppliers. All attendees will be required to share non-confidential information about the workshop topic. All persons who attend a WSC workshop must be an expert in a field that can add to the discussion to resolve open technical issues (e.g. safety and health professional with experience in the topic area, analyst performing studies in the area). Persons who request to attend that are not a member of the WSC will receive instructions to provide information that will be reviewed by the WSC before they receive final attendance approval. Information that will be needed for each attendee is a biography, a brief description of experience in the area and a brief description of any information that will be shared with the group. Sales and marketing presentations will not be allowed.

SESHA 2016 Symposium Abstract

What is Real Corporate Social Responsibility (and how do I do it?)

Allenby, Braden
(Arizona State University)

Many corporate managers believe that responding transparently and substantively to the challenges of environmental, human rights, and other stakeholders fulfills their corporate social responsibility. The reality is much more nuanced, especially for organizations and firms involved in information and communication technology and services. In a world where the accelerating evolution of Big Data, Data Analytics, personal electronic devices, global information networks, Artificial Intelligence and other ICT products and services is not just challenging current paradigms, but obliterating them, corporate social responsibility becomes a much more crucial, and far more complex, challenge.

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SESHA 2016 Speaker Biography

Dr. Braden Allenby
Professor, Arizona State University

Braden R. Allenby is Lincoln Professor of Engineering and Ethics; President’s Professor of Civil, Environmental, and Sustainable Engineering, and of Law; Founding Chair of the Consortium for Emerging Technologies, Military Operations, and National Security; and Founding Director of the Center for Earth Systems Engineering and Management, at Arizona State University. He moved to ASU from his previous position as the Environment, Health and Safety Vice President for AT&T in 2004. Dr. Allenby received his BA from Yale University, his JD and MA (economics) from the University of Virginia, and his MS and Ph.D. in Environmental Sciences from Rutgers University. He is past President of the International Society for Industrial Ecology, ex-Chair of the AAAS Committee on Science, Engineering, and Public Policy, and ex-Chair of the IEEE Presidential Sustainability Initiative. He is an AAAS Fellow and a Fellow of the Royal Society for the Arts, Manufactures & Commerce, and has been a U. S. Naval Academy Stockdale Fellow (2009-2010), an AT&T Industrial Ecology Fellow (2007-2009), a Templeton Research Fellow (2008-2009), and a Batten Fellow in Residence at the University of Virginia’s Darden Graduate School of Business Administration. From 1995 to 1997, he was Director for Energy and Environmental Systems at Lawrence Livermore National Laboratory, and from 1991 to 1992 he was the J. Herbert Holloman Fellow at the National Academy of Engineering in Washington, DC. His areas of expertise include emerging technologies, especially in the military and security domains; Design for Environment; industrial ecology; telework and netcentric organizations; transhumanism; and earth systems engineering and management. In 2008 he was selected by the Carnegie Foundation as 2008 Arizona Professor of the Year. His latest books are Industrial Ecology and Sustainable Engineering (co-authored with Tom Graedel in 2009), The Techno-Human Condition (co-authored with Dan Sarewitz in 2011), The Theory and Practice of Sustainable Engineering (2012), and The Applied Ethics of Emerging Military and Security Technologies (an edited volume released by Ashgate Press in 2015).

SESHA 2016 Symposium Abstract

NanoStreeM: Nanomaterials and Strategies for Safety Assessment in Advanced Integrated Circuits Manufacturing

Pardon, Alain; Prodanov, Dimiter
(EHS, Imec, Leuven, Belgium)

Understanding properties of nano-functionalized materials and how they interact with living systems is a relatively new area of scientific study. The scientific community has not yet been able to derive harmful properties of nanomaterials from the properties of the bulk material. Therefore, a precautionary approach is applicable when handling and using these materials in circumstances where exposure to nanomaterials cannot be excluded. The project NanoStreeM, involving 14 partners from 6 European countries, covers all key elements of the semiconductor R&D value chain. The NanoStreeM consortium, recently funded by the European Commission, will focus on several use cases, such as chemical mechanical planarization, maintenance and water treatment. The purpose of NanoStreeM is to promote good practices, identify gaps in methodologies and direction for further investigations in order to support nanosafety risk assessment and occupational hazard monitoring. The project also aims to initiate communication with stakeholders to support informed decision making and governance of risks related to handling of nanomaterials and medical surveillance of the workforce in the semiconductor fabrication process.

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SESHA 2016 Speaker Biography

Alain Pardon
EHS, Imec, Leuven, Belgium

Bio – Alain Pardon, M.Eng. M.Sc, M.Ba Mr. Pardon is the Safety, Environmental & Health Manager at IMEC in Leuven, Belgium. IMEC is a world-leading independent research center in nanoelectronics and nanotechnology. In his current role, Mr. Pardon is responsible for the safe and environmentally responsible operation of facilities used at IMEC for semiconductor, solar cell and nanotechnology research. His job includes conducting semiconductor and solar cell manufacturing process hazard assessments in support of new process development, defining the environmental policy of the R&D centre (including the implementation of the use of benign environmental technology), contacts with authorities, advising on environmental critical investments, and providing EH&S training for a multi-cultural staff. Mr. Pardon holds a Master of Engineering and Master of Business Administration from the University of Limburg/Diepenbeek, and a Master of Science from the Catholic University in Leuven. He is the current Chairman of Advanced Technologies Safety Organisation (ATSO).

SESHA 2016 Symposium Abstract

PSM Process Boundaries in the Semiconductor Industry

Moll, Ashley
(Greystone Risk Management, Saratoga Springs NY)

The OSHA PSM standard is a performance-based standard. In these standards, OSHA dictates what to do but the employer must determine applicability and how to meet the regulatory requirements based on the employer’s evaluation of their process(es). For process safety, the employer must determine the boundaries of a covered process which could result in a catastrophic release of the highly hazardous chemical (HHC). This presentation will include a regulatory overview of what interpretations exist regarding a PSM covered process boundary. The review will include interpretations available from OSHA that both support and inhibit a company’s decision on where their PSM process boundary can stop. Based on the regulatory review we will discuss what a company can do to support their decision on where to end the PSM process boundary specific to the semiconductor industry and how they can manage their risk. Managing the company’s risk when making their boundary determination must be based on a comprehensive review of the following: current industry practices, regulatory standards and interpretations, hazards of the process in the form of a process hazard analysis utilizing the hazard and operability study technique, and an evaluation of quantities of the covered chemical in the process after the end point of the covered process. At the end of the presentation attendees should have a solid understanding on how they can create a more acceptable level of risk in the event of an OSHA inspection, as it pertains to the PSM covered process boundaries at the facility.

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SESHA 2016 Speaker Biography

Ashley Moll
Senior Consultant, Greystone Risk Management, Saratoga Springs NY

Ashley Moll has 8 years of experience in the practice and management of safety, industrial hygiene and risk management. Ms. Moll has designed and implemented working programs and processes that achieved the protection of employees along with compliance with legal requirements (i.e. OSHA). She has been previously employed in both the chemical and semi-conductor industries with GE Silicones/Momentive and Globalfoundries. Ms. Moll’s experiences as a Sr. EHS Specialist and Staff Safety Engineer have honed her leadership, communication and interpersonal skills with both employees and regulators. With these skills she has successfully designed and implemented safety and health management systems which reduced company OSHA incident rates and improved overall safety culture.

SESHA 2016 Symposium Abstract

EICC Roundtable

Davis, Brett
(Cypress Semiconductor, Austin, TX)

The Electronic Industry Citizenship Coalition (EICC) was founded in 2004 by eight electronics companies seeking to create industry-wide standards on social, environmental, ethical and labor issues within the electronics industry supply chain. The result was the EICC Code of Conduct (the Code). Current semiconductor and semiconductor supplier members include: AMAT, AMD, Fairchild, Intel, KLA-Tencor, Micron, NXP, On, Samsung, TI, TSMC and TEL. This roundtable will begin with a presentation on the topics covered under the Code and how companies are assessed for conformance, through the use of EICC-ON Self-Assessment Questionnaires (SAQs) and third party audits. Attendees will be encouraged to share their own experiences with the membership process, using EICC-ON, both as a customer and a supplier, audits, and challenges and solutions for complying with the Code.

SESHA 2016 Speaker Biography

Brett Davis
Corporate BCM, CSR and EHS Programs Manager, Cypress Semiconductor, Austin, TX

Brett Davis is the Corporate BCM, CSR and EHS Programs Manager for Cypress Semiconductor. Previously he was a Senior Project Engineer for Zephyr Environmental Corporation in Austin, where he served as a project manager on air permit related projects, for chemical, oil and gas, industrial wastewater treatment and semiconductor clients. Prior to becoming a consultant, Brett provided EHS consulting and project management support for Motorola Semiconductor Products Sector (now NXP Semiconductor) sites worldwide. Brett earned a B.S. in Chemical Engineering from the University of Texas at Austin and an M.S. in Hazardous Waste Management from National Technological University, now Walden University. He has been a registered professional engineer in Texas since 1991.

SESHA 2016 Symposium Abstract

Leveraging ISO 14001:2015 & ISO 45001:2016 to Enhance EHS Leadership

Wilk, Lisa
(Capaccio Environmental Engineering, Inc. / Marlborough, MA)

The release of ISO 14001:2015 environmental management systems (EMS) standard and the closely aligned ISO 45001:2016 Occupational Health and Safety Management Systems (HSMS) standard facilitate new opportunities for environmental health & safety (EHS) leadership to demonstrate business value. Most significantly, the combined standards identify changes to organizational approaches to EHS management, including an emphasis on the need to integrate EHS management into the organization’s overall strategic business planning. These changes provide opportunities for EHS leaders to better align with the core business, and ultimately to drive performance improvements for both the business and EHS. This presentation will review the new requirements as they relate to business integration with a focus on ways in which the new standards provide opportunities to enhance value and EHS leadership. Specific approaches and examples of integrating EHS with core business organizational strategies to create value will be examined. EHS leaders can use these new ISO changes as an opportunity to ensure that they are effectively integrated and aligned with the core business of their organizations. Understanding the overall organizational vision, and taking a bigger picture view of EH&S within the context of this larger vision provides a framework around which EHS leaders can think and plan strategically to ensure the success of their organization. The ISO 14001:2015 and ISO 45001:2016 standards can be leveraged to provide strong transformational EHS leadership to achieve meaningful outcomes. While change always presents challenges, these new revisions provide significant opportunities for EHS leaders to provide greater value to their business organization as a whole, communicate and gain broader support, and make a measurable impact on the success of their organization from both EHS and business perspectives.

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SESHA 2016 Speaker Biography

Lisa F. Wilk, P.E.
President & CEO, Capaccio Environmental Engineering, Inc. / Marlborough, MA

As President and CEO of Capaccio Environmental Engineering, Inc., Lisa Wilk is responsible for overall operations, including recruiting and retaining outstanding staff and providing solutions to set clients up for success. Lisa takes pride in the team’s ability to proactively address client needs in an innovative and value-added manner. With 30 years of industry expertise, Lisa brings a wealth of experience in management systems and all facets of strategic integration of environmental, health & safety (EHS) with business and organizational objectives including initiatives to address the growing global EHS demands of business stakeholders. She is a published author of several technical articles and books, a registered professional engineer and holds a B.S. in Chemistry from Bates College and in Civil/Environmental Engineering from Northeastern University. Her firm has been a long-term corporate supporter of SESHA.

SESHA 2016 Symposium Abstract

How to leverage your Business Continuity Program to build a more resilient EHS program 

Buehler, Sarah
(ERM Inc., San Francisco, CA)

Too often fast moving companies operate in silos which can create an inefficient and risky environment. The EHS Manager is regularly not involved in early discussions around operational changes including new product offerings, specific customer needs, tool updates and changes, and facility design making it hard to get out of the “reactive” versus “proactive” role. By leveraging key concepts in business continuity (BC) planning, leaders can help breakdown some of these barriers and build a more resilient organization. An EHS Manager can take advantage of the BC program to help identify risks to critical operations, build rapport and partnerships with key leaders and stakeholders, and increase awareness of the EHS involvement and capabilities. Some of these opportunities include participation in the Business Impact Analysis (BIA) and Risk Assessment process, Supply Chain Audits, and joint emergency response and BC trainings & exercises. This session will include an overview of the ISO 22301 standard, relation to ISO 14001:2015 and OHSAS 18001 standards, supply chain risk, and common risks currently faced in the semiconductor industry.

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SESHA 2016 Speaker Biography

Sarah Buehler
Partner/Consultant, ERM Inc., San Francisco, CA

Ms. Sarah Buehler, is a Certified Business Continuity Professional (CBCP) and Partner with ERM Inc. in San Francisco, California. She has over 17 years of experience in the EHS industry with a specialized background in business continuity and crisis management. She has assisted both public and private sector clients develop and improve their EHS and BC programs through simple but effective design.

SESHA 2016 Symposium Abstract

Business Continuity at Cypress

Davis, Brett
(Cypress Semiconductor)

Cypress Semiconductor’s Business Continuity Management (BCM) program will be described in detail The presentation will look at BCM from a customer perspective, by addressing identification of key direct materials suppliers and the use of online services, such as Supply Risk Solutions (SRS), Resilinc and Carlson Wagonlit Travel, to identify natural and man-made disasters with potential impacts to suppliers sites and to identify potential supply chain disruptions. Inter-company lines of communication and intra-company reporting will be addressed. The presentation will also look at BCM from a supplier perspective. Ample time will be provided for audience discussion of BCM best practices.

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SESHA 2016 Speaker Biography

Brett Davis
Corporate BCM, CSR and EHS Programs Manager, Cypress Semiconductor

Brett Davis is the Corporate BCM, CSR and EHS Programs Manager for Cypress Semiconductor. Previously he was a Senior Project Engineer for Zephyr Environmental Corporation in Austin, where he served as a project manager on air permit related projects, for chemical, oil and gas, industrial wastewater treatment and semiconductor clients. Prior to becoming a consultant, Brett provided EHS consulting and project management support for Motorola Semiconductor Products Sector (now NXP Semiconductor) sites worldwide. Brett earned a B.S. in Chemical Engineering from the University of Texas at Austin and an M.S. in Hazardous Waste Management from National Technological University, now Walden University. He has been a registered professional engineer in Texas since 1991.

SESHA 2016 Symposium Abstract

Risk Management Strategies for Semiconductor Chemicals without Occupational Exposure Limits

Shepard, Michele
(Colden Corporation, Ballston Lake, NY)

Occupational exposure limits (OELs) define acceptable airborne concentrations of chemicals and have been a key part of workplace risk management programs. While thousands of hazardous chemicals are used in commerce, OELs have been established for only a fraction of these. There are numerous chemicals used in the semiconductor and other high technology industries without established OELs, and this number may increase with new chemistries and advanced materials and manufacturing processes. This presentation will outline strategies for managing workplace risks for chemicals without identified regulatory or recommended OELs. Approaches to be compared include a tiered approach to OEL development such as process-based Derived No Effect Levels (DNELs) and provisional limits as well as categorical approaches such as Occupational Exposure Bands (OEBs) and hazard banding, and control banding models. The focus will include management strategies as well as practical applications, tools, and other resources to assist EHS professionals in evaluating, prioritizing and managing workplace exposure risks for chemicals without established OELs.

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SESHA 2016 Speaker Biography

Michele Shepard
Senior Project Manager, Colden Corporation, Ballston Lake, NY

Michele Shepard is a Certified Industrial Hygienist at Colden Corporation with over 20 years of EHS experience in consulting, industry and academic research. She has a PhD from SUNY College of Nanoscale Science and Engineering (CNSE), M.S. in Environmental Studies from the University of Oregon, and B.S. in Industrial Hygiene/Environmental Toxicology from Clarkson University. As an EPA STAR Fellow, she investigated occupational exposure assessment and risk management practices for engineered nanoparticles used in semiconductor fabrication, and also conducted control banding and occupational exposure limit development projects for the semiconductor industry. Michele worked previously as a Vice President and health and safety services lead at a consulting firm, as the EHS lead for a global business division of a Fortune 200 corporation, and as a consultant at Arthur D. Little.

SESHA 2016 Symposium Abstract

Application of HazOp principles to a Liquid Noble Dark Matter R&D Platform

Kovvali, Nimmi; Frist, Bernie
(SLAC National Accelerator Laboratory, Menlo Park, CA and Safety & Risk Management Group, Phoenix, AZ)

The Lux Zeplin (LZ) collaboration is funded by the U.S. Department of Energy (DOE) and consists of 190 scientists in 32 institutions in the U.S., U.K., Portugal, Russia, and China. The LZ project is the next generation dark matter experiment searching for WIMP’s (weakly interacting massive particles). The project will install a detector nearly a mile below ground in the former Homestake gold mine in South Dakota. The LZ collaboration will search for these particles by looking for evidence of WIMPs colliding with xenon (Xe) nuclei inside the detector. The underground project will use a total of 10 tons of liquefied xenon and the detector will be surrounded by a jacket of nitrogen and water to eliminate background radiation. The LZ group at SLAC plays a major role in designing, fabricating and carrying out the experiment. SLAC recently invested in a central test platform that is being used to test LZ prototype detectors and will serve as a tool for R&D on the next generation Xe dark matter experiment. The SLAC LZ group is also responsible for determining how to best purify the liquid xenon that will be used in the detector, since radio-pure xenon is needed to ensure that the experiment can see the very faint signal of a dark matter particle behind the higher rate from natural radiation sources. The project review process at SLAC involves commissioning of a review committee that comprises representatives from various scientific and support areas. The principal scientific group presents their design and rationale to this review committee and addresses a set of recommendations provided before operating the system. This process ensures that scientific input is captured from other parts of the laboratory, where similar experiments have been designed and operated. This process, however is not collaborative and does not offer a solutions-based approach to the group that is presenting. For the LZ project, SLAC chose to pilot a Hazard Operability (HazOp) Study approach to review the platform design with the intention of promoting a more collaborative review environment. Following presentations on the R&D platform design by the researchers, the PHA Facilitator provided an overview of the HazOp methodology and explained that a successful analysis would result from a collaborative approach through dialogue, not defense. This presentation will provide an overview of the Liquid Noble Dark Matter R&D platform, and discuss lessons learned from applying a HazOp approach outside a traditional semiconductor facility to a larger project at a DOE National Laboratory.

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SESHA 2016 Speaker Biography

Nimmi Kovvali
Lead ESH Coordinator, Science Directorate, SLAC National Accelerator Laboratory, Menlo Park, CA and Safety & Risk Management Group, Phoenix, AZ

Mrs. Kovvali the Lead ES&H Coordinator for the Science Directorate at SLAC National Accelerator Laboratory. Ms. Kovvali has over fifteen years of experience in EH&S program management, with an emphasis on R&D laboratory environments. Her background is in Environmental Management, Chemistry and Biology. Ms. Kovvali has been at SLAC for 5 years, helping them develop their laboratory EH&S programs. She is currently participating in the construction of a state of the art laboratory facility, as a Science Liaison; a role that leverages her management and ES&H expertise.

Mr. Frist is the Founder and Managing Principal of Safety & Risk Management Group. Mr. Frist has over twenty-six years of experience in EH&S program management, specializing in process safety and risk management, with five years in a manufacturing environment and over twenty years in consulting. He has implemented and evaluated risk management and safety programs for research and development and full-scale production manufacturing operations in process intensive industries, worldwide. His PSM experience includes compliance auditing and leading PHAs for clients in diverse market sectors. He is a Past-President and Fellow of SESHA.

SESHA 2016 Symposium Abstract

Occurrence, Removal and Regulation of Nanomaterials at Publicly Owned Sewage Treatment Works

Westerhoff, Paul
(Arizona State University)

Engineered nanomaterials already occur in sewage and wastewater biosolids due to their release from commercial products (e.g., nano-scale titanium or silica dioxide in foods) and industrial processes (SiO2 in CMP polishing). Increasing levels and diversity of nanomaterials may enter sewage and wastewater treatment plants (WWTPs) in the future as they are released from products containing NMs (e.g., coatings, embedded in products or from industrial processes that use nanomaterials (e.g., for polishing). Some metallic nanomaterials may dissolve (e.g., silver, zinc, copper based) or biodegrade (e.g., fullerenes) in wastewater, and subsequently sorb to settable biomass, precipitate as inorganic solids or form stable aqueous complexes. Nanomaterials themselves sorb onto bacterial biomass in WWTPs, leading to their removal from water but accumulation in biosolids that are disposed to land surface spreading fields, landfills, or incineration where their fate needs to be further considered. Because of the dense biological communities in WWTP unit processes, under typical conditions >90% of the nanomaterials may attach to biomass which is removed within the WWTP. Inclusion of membrane filtration to augment gravity settling has the potential to increase nanoparticle removals. At expected production/use levels, the presence of nanomaterials in biomass appears unlikely to influence current biosolids treatment processes (e.g., anaerobic digestion) or landfill biogas production. Additional research is needed to be able to monitor the transformation and removal of engineered nanomaterials throughout WWTP and biosolids treatment to assure they are not released into the environment where they may pose human or ecological risks. We are working with the USEPA and OECD to assess rapid nanoparticle removal assessments that could be used to facilitate regulatory approval of nanomaterials in commerce.

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SESHA 2016 Speaker Biography

Paul Westerhoff
Professor, Arizona State University

Mr. Paul Westerhoff, Ph.D., PE, BCEE is a Professor and Senior Advisor on Science and Engineering to the ASU Vice Provost. Mr. Westerhoff joined ASU in 1995 as an environmental engineer and is part of the Ira A. Fulton School of Engineering in the recently formed School of Sustainable Engineering and The Built Environment at Arizona State University (ASU). He has served as the Department Chair and School Director and now focuses on teaching and research in the area of emerging contaminants and innovative treatment processes for clean water. His research group has over 185 peer reviewed journal publications and an H-index >50. In addition, Paul is currently Director of the USEPA Network on the LifeCycle of Nanomaterials and Deputy Director for the NSF Engineering Research Center on NanoEnabled Water Treatment Technologies. His current research interests include: – Innovative treatment processes using nanotechnology – Sources and characterization of natural organic matter (NOM) in natural systems – Formation of disinfection by-products (DBPs) during water treatment – Detection and exposure assessment to engineered NANOMATERIALS in the environment – Removal of arsenic and metals from drinking water – Control and treatment of alga-derived taste and odors (T&O) in potable water supplies – Indirect reuse of treated wastewater – Recharge of aquifers with surface water – Use of photosynthetic microalga for controlling greenhouse gases (CO2) – Management and treatment of nitrate (NO3–) in drinking water supplies His research focuses water issues involving Arizona, but these tend to address many global challenges as well. This research leads to a number of multidisciplinary research activities with biologists, botanists, chemists, and geologists. Undergraduate and graduate (master and Ph.D.) students and post-doctoral researchers are involved in funded research from local and national agencies including the NSF-sponsored Central Arizona Project Long-Term Ecological Research and NSF-sponsored Decision Center for Desert Cities.

SESHA 2016 Symposium Abstract

Recent developments in wastewater treatment in the microelectronics industry

Phillis, Kody; Jenkins, Brian; Carroll, Barry
(Nalco, an Ecolab Company)

As the microelectronics industry continues to drive cost optimization in its operations, there will be new opportunities to develop and implement innovative environmental solutions. Three of the more commonly encountered wastewater challenges are copper removal, hydrogen peroxide removal, and fluoride removal. The presentation will provide insight regarding these challenges as well as discuss treatment options including their benefits and drawbacks. Based on actual fab operating data, we will also provide examples of the application of solutions for these challenges, including economic and environmental benefit summaries.

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SESHA 2016 Speaker Biography

Brian V. Jenkins
Nalco, an Ecolab Company

Brian has been employed by Nalco since 1978 in a variety of technical sales and marketing positions including District Sales Manager, Marketing Manager, and Senior Product Manager. He is currently a Global Industry Development Manager in Nalco’s Light Industrial Strategic Business Unit, handling the Corrugated, Microelectronics and Tire Markets. He has published in or presented at several different technical forums. He has a Bachelor of Science in Chemical Engineering from the Technological Institute of Northwestern University. He holds ten US patents.

SESHA 2016 Symposium Abstract

Recent developments in wastewater treatment in the microelectronics industry

Phillis, Kody; Jenkins, Brian; Carroll, Barry
(Nalco, an Ecolab Company)

As the microelectronics industry continues to drive cost optimization in its operations, there will be new opportunities to develop and implement innovative environmental solutions. Three of the more commonly encountered wastewater challenges are copper removal, hydrogen peroxide removal, and fluoride removal. The presentation will provide insight regarding these challenges as well as discuss treatment options including their benefits and drawbacks. Based on actual fab operating data, we will also provide examples of the application of solutions for these challenges, including economic and environmental benefit summaries.

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SESHA 2016 Speaker Biography

Brian V. Jenkins
Nalco, an Ecolab Company

Brian has been employed by Nalco since 1978 in a variety of technical sales and marketing positions including District Sales Manager, Marketing Manager, and Senior Product Manager. He is currently a Global Industry Development Manager in Nalco’s Light Industrial Strategic Business Unit, handling the Corrugated, Microelectronics and Tire Markets. He has published in or presented at several different technical forums. He has a Bachelor of Science in Chemical Engineering from the Technological Institute of Northwestern University. He holds ten US patents.

SESHA 2016 Symposium Abstract

High Hazard Chemical Installation Case Study Session 

Creighton, Sue; Trammell, Steve; Wyman, Matt
(Ultratech, San Jose, CA)

High Hazard Chemical Installation Case Study Session Lesson Plan 1. Presentation Goal: Provide mock case study for installation and permitting of highly hazardous materials Time frame – full afternoon session 2. Course Objectives 2.1. Understand the chemical hazards evaluation process for of highly hazardous chemicals 2.2. Understand the construction and installation for highly hazardous chemical delivery systems 2.3. Understand how to determine local permit requirements for highly hazardous chemical installations 2.4. Role-play permitting process for a highly hazardous chemical installation 3. Agenda 3.1. Introduction 3.1.1. Describe structure of the session 3.1.2. Introduce session hosts 3.2. Overview on highly hazardous materials 3.2.1. What are they 3.2.2. Highly hazardous materials processes and uses 3.2.3. Accidents and incidents 3.2.4. Research and current trends 3.2.5. Controls 3.3. Scenario: Strata-Tech new process using highly hazardous chemicals 3.3.1. Strata-Tech new process: (need to decide what chemicals to pick) 3.3.1.1. R&D site on east coast install scope 3.3.1.2. San Jose Manufacturing Install scope 3.3.1.3. Audience Q&A 3.3.1.4. R&D site on east coast install chemical review 3.3.1.5. San Jose site install chemical review 3.3.1.6. Quiz the audience 3.3.1.7. R&D site on east coast install design 3.3.1.8. San Jose site on install design 3.3.1.9. Audience group exercise: design element “colorforms” 3.3.1.10. R&D site on east coast “plan check” 3.3.1.11. San Jose site on plan check 3.3.1.12. Chaos ensues (this is where we get audience involvement on problems and solutions) 3.3.2. Proposed players: 3.3.2.1. Overwhelmed EHS Manger: Sue 3.3.2.2. Competent Vendor (for hazard controls): Matt 3.3.2.3. Conscientious Consultant: Steve T 3.3.2.4. Moderator: Aaron 3.3.2.5. San Jose Regulator: Varun 3.3.2.6. East Coast Regulator: Steve R or John C 3.3.2.7. Audience: role play customers, Marketing and Sales, Service, etc

SESHA 2016 Symposium Abstract

Washington State’s New GHG Regulations: A Case Study for the Future of GHG Regulations for the High Tech Industry

De Blasi, Michelle*; Weissinger, Emily
(Fennemore Craig, Phoenix, AZ; Ramboll Environ, Phoenix, AZ)

On January 5, 2016 the Washington State Department of Ecology released their much anticipated proposed Clean Air Rule, which would require all organizations in the state that emit more than 100,000 metric tons of carbon dioxide equivalents per year to reduce their emissions by 5% every three years. This rule, the first of its kind in the United States, comes after many months of failed attempts by the Washington State legislature to agree upon a greenhouse gas cap and trade bill. It also comes amidst the threat of carbon tax ballot initiatives from multiple public interest groups. All of these proposals have the objective of reducing greenhouse gas emissions in Washington State, but each have vastly different financial implications for industry and varying opportunities for stakeholder involvement. What’s happening in Washington State today is likely to be seen around the country in years to come. This presentation will discuss the future of greenhouse gas regulation in the United States from both a technical and legal perspective, focusing on potential impacts to the high tech industry. In addition, it will use the various carbon initiatives proposed in Washington State to illustrate the many ways the greenhouse gas emissions of a hypothetical high tech manufacturing plant could be regulated.

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SESHA 2016 Speaker Biography

Michelle De Blasi
Director, Fennemore Craig, Phoenix, AZ

Michelle is senior environmental counsel at Fennemore Craig and advises clients on energy and environmental matters, with a focus on traditional and renewable energy project development, environmental permitting and compliance, and greenhouse gas emissions. Over the past 20 years, Michelle has worked at the federal and state levels on a wide variety of environmental and energy issues for a range of clients, including the high tech industries, on matters such as hazardous waste, air quality, water quality, greenhouse gas emissions, environmental health and safety, real property due diligence, utility regulation, due diligence and permitting for energy power generation, natural resource damage issues, asbestos, and underground storage tank regulation. Michelle is also Co-Executive Director of the Arizona Energy Consortium which she was instrumental in founding in 2011 as Arizona’s only state-wide energy organization. The AEC has published the Arizona Solar Strategic Plan and the Arizona Energy Roadmap.

SESHA 2016 Symposium Abstract

Reducing GHG Emissions from Heat Transfer Fluids

Higgs, Tim
(Independent consultant)

Subpart I of 40CFR part 98 requires semiconductor fabs to file annual reports of greenhouse gas emissions to U.S. EPA. New Global Warming Potential (GWP100) numbers published by EPA have made fluorinated heat transfer fluids (F-HTFs) a much more significant piece of total fab emissions. In 2013, F-HTFs were 0.1% of total 300mm fab emissions while in 2014, with the GWP100 values assigned, they have risen to 29% of total 300mm emissions. This large reported increase in emissions can cause challenges in meeting greenhouse gas permit limits as well as increase the total GHG emissions that companies are reporting to the public. As regulatory and public attention on greenhouse gases increases, the issue is likely to become of greater importance to the semiconductor industry. This paper will look at options for reducing F-GHG emissions from heat transfer fluids including chemical substitution, equipment replacement or repair, and other emissions reductions options. These methods can result in significant emissions reductions and can be implemented with no capital expenditure and most often no or only slight changes to the process. For example swapping low boiling point F-HTFs (3Ms FC-3283 and Solvay’s HT110, HT135) to high boilers F-HTFs ( 3Ms FC-40, Solvay’s HT170, HT200) result in reductions in both emissions and in costs. This substitution has been shown to be transparent to the process, and for many process steps provides a ready means of reducing emissions. After many years of GHG reductions focused on fluorinated gases, the fluorinated heat transfer fluids are among the best remaining options for making additional reductions.

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SESHA 2016 Speaker Biography

Tim Higgs
Environmental Consultant, Independent consultant

Tim Higgs is an environmental engineer with over 30 years of experience in the semiconductor industry. He received his B.S. degree in chemical engineering from Michigan State University in 1983 and is a registered professional engineer (chemical) in the State of Arizona. Tim is currently in consulting and previously worked for Intel Corporation in a variety of environmental positions at the site and worldwide levels, and has extensive experience in matters related to air permitting, air emissions control, energy efficiency and climate change. He has worked with state and local regulatory agencies across the U.S. as well as in other nations on air pollution control programs, and has frequently consulted with U.S. EPA on air program matters of importance to the semiconductor industry.

SESHA 2016 Symposium Abstract

Computer based monitoring of F-GHG emissions in Semiconductor Fabs

Neuber, Andreas; Cayer, Max; Van Gompel, Joe
(AMAT, Santa Clara CA)

Section: GHG Emissions. Regulatory compliance is an increasing issue for the semiconductor industry with regard to efforts required. Applied Materials has developed the monitoring to help track these emission and to support compliance with new regulations. It supports both the comparison to stack emission reports, and any other configuration for apportioning, planning and forecasting of F-GHG and N2O emissions from tool specific emission to fab wide reporting. Estimation of the emissions is thereby based on real time abatement operation information and gas flow monitoring. Different calculation methods can be used. The impact of this is shown. The method could be expanded into a monitoring of the SEMI S23 equivalent energy consumption per tool and for major areas of the fab as well as into the monitoring of other process resources.

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SESHA 2016 Symposium Abstract

Semiconductor Industry Greenhouse Gas Emissions & Reporting

Speed, David; Raley, Brian; Beu, Laurie
(GLOBAL FOUNDRIES)

Semiconductor Industry Greenhouse Gas Emissions & Reporting David Speed and Brian Raley, GLOBALFOUNDRIES Laurie Beu, Laurie S. Beu Consulting The presentation will address semiconductor industry greenhouse gas emissions. Sources and general trends in emissions will be described, along with recent changes to the method of estimating emissions and reporting.

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SESHA 2016 Speaker Biography

David Speed
Distinguished Member of the Technical Staff, GLOBAL FOUNDRIES

David Speed is a Distinguished Member of the Technical Staff at GLOBALFOUNDRIES. He works in the corporate EHS group and represents GLOBALFOUNDRIES on a wide variety of environmental, health, and safety issues. He has a PhD in Environmental Engineering from UCONN, with BS and MS degrees from URI and RPI.

SESHA 2016 Symposium Abstract

High Hazard Chemical Installation Case Study Session 

Creighton, Sue; Trammell, Steve; Wyman, Matt
(Ultratech, San Jose, CA)

High Hazard Chemical Installation Case Study Session Lesson Plan 1. Presentation Goal: Provide mock case study for installation and permitting of highly hazardous materials Time frame – full afternoon session 2. Course Objectives 2.1. Understand the chemical hazards evaluation process for of highly hazardous chemicals 2.2. Understand the construction and installation for highly hazardous chemical delivery systems 2.3. Understand how to determine local permit requirements for highly hazardous chemical installations 2.4. Role-play permitting process for a highly hazardous chemical installation 3. Agenda 3.1. Introduction 3.1.1. Describe structure of the session 3.1.2. Introduce session hosts 3.2. Overview on highly hazardous materials 3.2.1. What are they 3.2.2. Highly hazardous materials processes and uses 3.2.3. Accidents and incidents 3.2.4. Research and current trends 3.2.5. Controls 3.3. Scenario: Strata-Tech new process using highly hazardous chemicals 3.3.1. Strata-Tech new process: (need to decide what chemicals to pick) 3.3.1.1. R&D site on east coast install scope 3.3.1.2. San Jose Manufacturing Install scope 3.3.1.3. Audience Q&A 3.3.1.4. R&D site on east coast install chemical review 3.3.1.5. San Jose site install chemical review 3.3.1.6. Quiz the audience 3.3.1.7. R&D site on east coast install design 3.3.1.8. San Jose site on install design 3.3.1.9. Audience group exercise: design element “colorforms” 3.3.1.10. R&D site on east coast “plan check” 3.3.1.11. San Jose site on plan check 3.3.1.12. Chaos ensues (this is where we get audience involvement on problems and solutions) 3.3.2. Proposed players: 3.3.2.1. Overwhelmed EHS Manger: Sue 3.3.2.2. Competent Vendor (for hazard controls): Matt 3.3.2.3. Conscientious Consultant: Steve T 3.3.2.4. Moderator: Aaron 3.3.2.5. San Jose Regulator: Varun 3.3.2.6. East Coast Regulator: Steve R or John C 3.3.2.7. Audience: role play customers, Marketing and Sales, Service, etc

SESHA 2016 Symposium Abstract

Conflict minerals – 2015 reporting and compliance expectations

Pradhan-Kasmalkar, Revati*; Dennis, Tord
(WSP | Parsons Brinckerhoff, San Jose, CA)

This presentation will provide an update of the changes to the US conflict minerals rule for the CY2015 reporting period. An update of the impending EU regulation and China guidelines on conflict minerals will also be reviewed. We will assess the filings done for CY2014 and will highlight some of the key issues and challenges faced by both public (SEC filing) and private companies in achieving compliance with the conflict minerals ruling. With so much global focus on the issue of conflict-free and responsible sourcing, companies need to look at benchmarking their programs and investing in corrective actions to allow for efficient and satisfactory response to any future conflict minerals compliance expectations. We will look at practices being adopted across the high tech industry to enhance supplier transparency, due diligence and smelter data verification so as to better respond to SEC requirements, NGO expectations as well as customer requests.

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SESHA 2016 Speaker Biography

Revati Pradhan-Kasmalkar
Senior Consultant, WSP | Parsons Brinckerhoff, San Jose, CA

Revati Pradhan-Kasmalkar is a Senior Consultant with WSP | Parsons Brinckerhoff, specializing in product stewardship and sustainability programs. She has experience in supply chain environmental compliance management and is a subject matter expert on conflict minerals compliance as well as other product content regulations such as RoHS and REACH. Revati has previously worked in the area of semiconductor process exhaust management and has co-authored a patent on maximizing tool availability by reducing byproduct depositions and fouling in vacuum equipment. She holds dual Masters Degrees in Chemical Engineering and EHS (Gen. Eng.) and has over 15 years of experience working in high tech industry. Ms. Pradhan-Kasmalkar is based in San Jose, CA.

SESHA 2016 Symposium Abstract

Behind the Scenes of Conflict Minerals: Lessons from Smelter Outreach Visits

Rojas, Andreina; Fiereck, Bryan
(Intel, Chandler, AZ)

On January 5, Intel CEO Brian Krzanich announced that Intel is moving beyond microprocessors to achieve the goal to validate Intel’s broader product base as conflict-free in 2016, as part of his keynote at the 2016 Consumer Electronics Show (CES). This achievement is the result of Intel’s seven-year commitment to remove conflict minerals from its supply chain and prevent profits from the sale of these minerals from funding the ongoing conflict in the Democratic Republic of the Congo (DRC). In order to achieve this challenging goal, Intel’s conflict minerals team has visited 105 smelters and refiners in 21 countries around the globe with the goal of providing education on conflict minerals, assessing their sourcing practices, collecting country of origin information and encouraging & assisting their participation in an independent 3rd party audit program such as the CFSP. Our efforts complement those of CFSI member companies who participate on teams that conduct smelter research and outreach. It’s these smelter outreach activities which “opens the door” for companies like Intel to visit the smelter & refiner facilities. Today you will join Intel behind the scenes and hear stories about these smelter/refiner facility visits, with examples of how Intel and other CFSI member companies conducted smelter outreach and worked to construct conflict-free supply chains not just for Intel, but for electronics and other industries which make up the supply chains of products used around the world.

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SESHA 2016 Speaker Biography

Andreina M Rojas
Conflict Minerals Outreach Specialist, Intel, Chandler, AZ

Andreina M. Rojas first joined Intel in 2013 as an Environmental, Social and Governance intern. Her projects included monitoring suppliers’ compliance with the EICC Code of Conduct to determine the need for on-site audits; mapping end-of-life cycle for factory tool equipment to monitor resale, relocation, scrap, and recycling processes to identify cost-saving and waste reduction opportunities; and benchmarking Intel’s Corporate Social Responsibility performance against peer companies to identify and address gaps. After graduating from the Pennsylvania State University with B.S. degrees in Industrial Engineering and Economics, Andreina joined Intel full-time as a Smelter Outreach Specialist in the Conflict Mineral’s Program. She is responsible for directly observing smelters’ sourcing practices around the world and recruiting them into the Conflict Free Smelter Program. She was born and raised in Caracas, Venezuela and now lives in Scottsdale, Arizona. She enjoys the privilege of interacting with different cultures while on work travel, as well as being involved in STEM outreach for middle school and high school students.

SESHA 2016 Symposium Abstract

Semiconductor Market Update – IC Insights

Matas, Brian
(IC Insights, Inc.)

A high degree of uncertainty looms over the global economy and has pervaded the IC industry. Yet, despite sluggishness in sales volume, unit demand for integrated circuits remains quite robust. Mature applications such as smartphones continue to add more features and functions, making them the leading platform for integrated circuits. New applications such as smart-appliances, autonomous vehicles, and the Internet of Things loom on the horizon and offer hope of boosting sales volume in the coming years. IC Insights will present its forecast and analysis of the IC market including trends in worldwide GDP growth, semiconductor industry capital spending and capacity, overcoming significant technology hurdles, and its perspective on key growth drivers.

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SESHA 2016 Speaker Biography

Brian Matas
Vice President, Market Research, IC Insights, Inc.

Mr. Matas has worked in the semiconductor industry for more than 30 years. At IC Insights, Mr. Matas specializes in analyzing and forecasting developing trends in the memory, microprocessor, and analog IC markets. Additional responsibilities include monitoring IC trends in automotive and consumer electronics. Prior to helping form IC Insights, he worked several years with Motorola in process engineering and with ICE Corporation in market research analysis. Mr. Matas received his Bachelor\’s degree in Physics from Anderson (Indiana) University and a Master\’s degree in aeronautical science from Embry-Riddle Aeronautical University. He enjoys competitive road cycling and is active with The Phoenix Symphony Chorus.

SESHA 2016 Symposium Abstract

Fleet Safety: You Have More Drivers Than You Think

Glass, Eric
(UL Workplace Health and Safety)

Many companies believe that the term “fleet” only applies to organizations that own and operate their own vehicles. Dead wrong! In fact, organizations that do not own their own or operate their own fleet of vehicles actually DO have a fleet and driving exposure. In this seminar, we will review a series of crash data statistics in relation to vehicle types, vehicle arrangements and the top two causes of traffic accidents and fatalities. By understanding this baseline information, attendees will learn about the term “negligent entrustment” and how that affects corporate liability. If EHS is responsible for ALL hazard identification and control, this course is a must attend.

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SESHA 2016 Speaker Biography

Eric Glass
Senior EHS Advisor, UL Workplace Health and Safety

Eric Glass serves as the Senior EHS Advisor with UL Workplace Health and Safety. His responsibilities include client consultation on building and sustaining health and safety culture and internal SME regarding EHS course and software development. Eric holds a BS from Florida State University in Risk Management and is a veteran of the United State Navy.

SESHA 2016 Symposium Abstract

Investigative Photography

Jacobi, Jonathan; Jacobi, Jonathan
(Underwriters Laboratories, Nashville, TN)

Pictures preserve details long after memories fade and it’s said that pictures are worth a thousand words. Photography is obviously important to incident investigations, the communication of lessons learned, and legal proceedings. What’s less obvious are the common mistakes that people routinely make when photographing an incident scene. This session will highlight some common mistakes and provide tips and techniques for defensible photo documentation.

SESHA 2016 Speaker Biography

Jonathan Jacobi
Sr. EHS Advisor, Underwriters Laboratories, Nashville, TN

Jonathan Jacobi, a Senior Environment, Health and Safety Advisor with UL, has more than 20 years of health and safety leadership experience. He is a Certified Safety Professional (CSP) and OSHA Authorized Outreach Trainer who earned graduate and post-graduate degrees in Occupational Health and Safety from Murray State University. Jonathan has played a leadership role in the creation and evolution of the UL Workplace Health and Safety online training library. Jonathan helped establish and currently leads UL’s OSHA Outreach Training Program. His insight and experience managing safety systems is shared with the health and safety community through various forms of consultation and thought leadership such as national seminars, presentations, articles, and white papers.

SESHA 2016 Symposium Abstract

Environmental Modeling: Understanding Risk and Enabling Compliance

Marsalla, Joy
(Intel Corporation, Hillsboro, Oregon)

As with many high-tech businesses, the semiconductor industry has successfully operated for decades in a state of tension between obtaining greater computing power and the increased technical demands required to achieve this feat. For semiconductor technology to become more state-of-the-art, this technical innovation may include increased chemical volumes, new categories of chemicals being chosen for production and more complex chemical mixtures in use. When examined against the social push toward greater environmental accountability, as well as increasingly strict regulatory and permit limitations to semiconductor manufacturing facilities, an opportunity is clearly available for a company’s environmental engineers. They must fully support technology development while ensuring compliance and adherence to worldwide, federal and corporate environmental goals. To accomplish this difficult task, sophisticated chemical models must be developed and maintained to define current operational state and predict future risk. This presentation will discuss the need for chemical modeling, model structure and validation, model use, and how model summaries can help prioritize abatement or facility development projects required to meet strict environmental objectives. Examples will be shared to illustrate basic methods of model creation, validation and testing selections, and use of models to prove compliance. In addition, historical achievements, as well as current and future challenges in the industry will be discussed to show the value of models in addressing accountability, permit limits and in defining the risks for many emerging pollutants.

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SESHA 2016 Speaker Biography

Joy Marsalla
Environmental Engineer, Intel Corporation, Hillsboro, Oregon

Joy Marsalla, PE, LEED GA, MSE – Intel Corporation, Corporate Services, Oregon Environmental Health & Safety, Environmental Engineer. Four years EHS experience in semiconductor industry in charge of research and development chemical review at Ronler Acres facility, high volume chemical review for Fab chemicals and supporting air, wastewater and waste modeling and projections.  Focus on chemical regulations, chemical classification, air permitting and air modeling.  Education: Masters of Science in Engineering, Environmental Engineering from Arizona State University and BSE, Civil & Environmental Engineering with a minor in Sustainability.

SESHA 2016 Symposium Abstract

Next Generation Batteries and EHS Challenges

Joshi, Kiran; Joshi, Kiran
(QuantumScape, San Jose, CA)

Next generation batteries contain more energy per unit of weight than conventional batteries, which, while contributing to their success, also triggers safety concerns. These same properties that result in high-energy density also pose potential hazards if the energy is released at a fast, uncontrolled rate. Therefore, safety is of great interest to the industry from the R&D to the last disposal stage after their use.

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SESHA 2016 Speaker Biography

Kiran Joshi
EHS Director, QuantumScape, San Jose, CA

Kiran Joshi is the EHS Director at QuantumScape. She has over 20 years of EHS experience in different industries including Semiconductor, Solar and Battery. She holds Ph.D. in organometallic chemistry from the University of British Columbia along with the CSP certification.

SESHA 2016 Symposium Abstract

Minimize VOC emission levels by replacing VOC solvents for wipe-downs and PM related tasks with DI water only

Barrios, Armand*
(Foamtec Internationall, Oceanside, California)

This paper explores how to replace the use of VOC solvents with DI water only, for PM applications throughout a wafer fab, in order to reduce fab VOC emission levels. Wafer fabs are struggling to meet advanced process parameters while trying to minimize VOC levels, which pose the most likely constraining air permit limit. Benefits include; reducing the amount of VOC solvent waste and the cost/health risk associated with disposing of VOC solvent waste, minimizing the environmental, safety & health risks coupled with fab VOC emissions and decreasing the risk of fire hazards, while improving fab safety for company personnel. Final attention will focus on the dynamics that help engineers meet their advanced process parameters using DI water only for PM related tasks throughout a wafer fab.

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SESHA 2016 Speaker Biography

Armand Barrios
VP MICROELECTRONICS, Foamtec Internationall, Oceanside, California

A Strategic Leader with 20yr experience in semiconductor industry. Has developed VOC Free – High Performance Preventative Maintenance (PM) Techniques used at advanced semiconductor chip manufacture worldwide, providing $Millions in cost savings and yield enhancement. Manage engineering support teams at semiconductor sites in USA, Taiwan, Korea, Singapore, Japan, China, and throughout Europe. Hands on experience and equipment knowledge helped develop over 150 technical documents, some of which have been implemented as Best Known Methods (BKM) used by $Billion equipment manufacturers, such as; Applied Materials, Varian, Novellus, LAM and KLA Tencor. Navy Veteran – Nuclear Power

SESHA 2016 Symposium Abstract

Real-Time FTIR Monitoring of Parts Per Trillion Level Vapor Intrusions and/or Airborne Molecular Contaminations

Laush, Curtis
(Geosyntec Consultants, 8217 Shoal Creek Blvd., Austin, TX.)

Low level vapor and aerosol emissions, even those of a transient nature, from various open or leaky chemical process activities can cause environmental and health concerns, as well as detrimental impacts on product yields (as with semiconductor wafer manufacturing, for instance). Characterization of these intrusions may call for real-time monitoring techniques, but achieving adequate pptv-level sensitivities with temporal measurement resolutions is challenging. Presented here is an air monitoring method based on specialized signal-to-noise enhancements of an extractive FTIR spectrometer. The hardware and software techniques incorporated in this system have been proven in the Geosyntec laboratories to enable sub-ppbv detection limits for various gaseous acids and amines, some gaseous and aerosolized arsenic compounds, and various VOC’s. Laboratory calibration and EPA Method 301 field validation procedures were carried over to additional field measurement campaigns at some semiconductor fabs, outdoor agricultural sites and indoor public facilities. The nature of vapor intrusion or airborne molecular contamination (AMC) testing often involves the collection of multiple time integrated air samples at strategic points within an area of interest, followed by laboratory analysis of these samples via some precision analytical method(s), ala EPA Method TO-15. The air sampling containers usually are specially prepared canisters, tedlar/Teflon bags, sorbent tubes, filter media (for particulate/aerosol matter), or even wet impingers. All of these require some preparation prior to field used and are not capable of providing “real-time” measurement results on-site. Also, any information associated with vapor intrusion or AMC events that may be considered transient or intermittent is lost as these sampling schemes combine volumes of air over a period of time before any analysis takes place. Such information would be critical in understanding the chemistry and by-product formation associated with certain vapors, as well as their acute exposure impact on local workers/inhabitants and manufacturing processes. The measurement method presented here is an EPA recognized one (see EPA Method 320) that can provide detection and profiling for multiple target analytes, simultaneously, that enables on-site characterization of emissions with ample time resolution. The limitations of extractive FTIR have often pointed to its relatively higher detection limits(tens to hundreds of ppbv) when providing data on minute-by-minute time scales. Recent work at Geosyntec has focused on driving down real-time detection limits to levels well below 1 ppbv. Enhanced iterative software algorithms are then invoked to achieve real-time detection limits (DLs) in the hundreds of pptv, with sample integrated (8-hour spectral coadded) DLs approaching the tens of pptv.

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SESHA 2016 Speaker Biography

Curtis Laush
Senior Scientist, Geosyntec Consultants, 8217 Shoal Creek Blvd., Austin, TX.

Curtis Laush, Ph.D., is a Senior Scientist based in Austin, Texas. He brings to Geosyntec Consultants more than 21 years of experience in the development of remote sensing quantitative measurement methods and instrumentation to serve a multitude of industries, especially the semiconductor manufacturing industry. He has conducted world-wide field measurement services, instrumentation installation and maintenance services, training and chemistry consultation, data interpretation/reporting and applied technology development throughout this time. Curtis is an active member of the American Chemical Society (ACS), the Air and Waste Management Association (AWMA) and the Society of Applied Spectroscopy. He earned his B.S. in chemistry at the University of Pittsburgh-Johnstown, and his Ph.D. in physical chemistry at the University of Illinois – Urbana/Champaign. He is a listed author on over 25 peer-reviewed publications and patents.

SESHA 2016 Symposium — PDC4

Successful Evaluation and Procurement of Commercial Environmental, Health, Safety and Sustainability Management Systems Technologies

Greystone Consolidated Companies, Saratoga Springs, NY

Thomas J. Morahan, Williamsville, NY. www.tmorahan.com tmorahanehs@gmail.com Successful Evaluation and Procurement of Commercial Environmental, Health, Safety and Sustainability Management Systems Technologies. A recognized EHS technology expert will systematically lead participants through the steps necessary for the successful evaluation and procurement of commercial EHSS technologies as follows: 1) Requirements Development including the capital budgeting process; the ROI analysis; interviews with process owners; identification of key individuals that represent the universe of system users; confirmation of the scope and direction of the new system with senior management; surveys with future end-users to determine the attributes of a model system, confirmation of management processes and existing software; confirmation of results through telephone interviews; and the requirements document. 2) Vendor Qualification including the identification of candidate technologies; pre-qualification of technologies; the Request for Information; the evaluation of responses; and the development of the bid list. 3) The Request for Proposal process including the compliance with corporate purchasing requirements; solicitation of proposals; and an analysis of responses; and plans for live demonstrations. 4) Software Demonstration and Evaluation including scenarios to challenge vendors during demos; the scoring system; and the live demo process. 5) The Decision Process including development of a consensus; the alignment with corporate IT strategy; the vendor briefing; the technology recommendation; and the executive summary for senior management. This course will help those interested in procuring a new or replacement EHSS technology solution to become confident in the process.

SESHA 2016 Symposium — WSC2

ESH Nanomaterials 

Tim Yeakley
World Semiconductor Counsel, Safety and Health Working Group

ESH Nanomaterials Workshop Agenda CMP ESH Information Review (>60% of the available time) • Data gathered by companies on use, controls, monitoring methods and exposure • Analytical techniques • Morphology • Human toxicity data • Environmental toxicity data • Sharing and idea exchange Carbon based ENM’s (<20% of the available time) • Data gathered by companies on use, controls, monitoring methods and exposure • Analytical techniques • Human toxicity data • Environmental toxicity data Metal Based ENM’s – sharing and discussion (<10% of the available time) • Data gathered by companies on use, controls, monitoring methods and exposure • Analytical techniques • Human toxicity data • Environmental toxicity data Participation in this full day workshop is limited to WSC members and approved suppliers. All attendees will be required to share non-confidential information about the workshop topic. All persons who attend a WSC workshop must be an expert in a field that can add to the discussion to resolve open technical issues (e.g. safety and health professional with experience in the topic area, analyst performing studies in the area). Persons who request to attend that are not a member of the WSC will receive instructions to provide information that will be reviewed by the WSC before they receive final attendance approval. Information that will be needed for each attendee is a biography, a brief description of experience in the area and a brief description of any information that will be shared with the group. Sales and marketing presentations will not be allowed.