Arsine TLV-TWA Reduction Update

O’Brien, Margaret (Texas Instruments)

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The American Conference of Governmental Industrial Hygienists (ACGIH) proposed to lower the Threshold Limit Value (TLV)-Time Weighted Average (TWA) for arsine (AsH3) in the Notice of Intended Changes-1999 Threshold Limit Values for Chemical Substances and Physical Agents. The current TLV-TWA for arsine is 50 parts per billion (ppb) and the ACGIH’s proposal is to lower the arsine TLV-TWA to 2 ppb. Because of the potential significant impacts to the semiconductor industry, a subcommittee was formed under the Semiconductor Industry Association’s Occupational Health Committee to review the relevant arsine exposure data to ensure the science supported the 25-fold reduction. Exponent, a toxicological consulting company, was contracted to evaluate whether or not the proposed 2 ppb TLV-TWA for arsine was justifiable. The results of the Exponent review will be presented in addition to the status of the SIA Arsine Subcommittee and Compressed Gas Association activities.

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