Arsine TLV-TWA Reduction Update

O’Brien, Margaret (Texas Instruments)

You must log in to view the full proceedings.

The American Conference of Governmental Industrial Hygienists (ACGIH) proposed to lower the Threshold Limit Value (TLV)-Time Weighted Average (TWA) for arsine (AsH3) in the Notice of Intended Changes-1999 Threshold Limit Values for Chemical Substances and Physical Agents. The current TLV-TWA for arsine is 50 parts per billion (ppb) and the ACGIH’s proposal is to lower the arsine TLV-TWA to 2 ppb. Because of the potential significant impacts to the semiconductor industry, a subcommittee was formed under the Semiconductor Industry Association’s Occupational Health Committee to review the relevant arsine exposure data to ensure the science supported the 25-fold reduction. Exponent, a toxicological consulting company, was contracted to evaluate whether or not the proposed 2 ppb TLV-TWA for arsine was justifiable. The results of the Exponent review will be presented in addition to the status of the SIA Arsine Subcommittee and Compressed Gas Association activities.

Back to SESHA 23rd Annual Symposium (2001)