Benefits of Third-Party Semiconductor Tool Installation Review and Verification Services

Torres, Craig; Albaugh, Corey
(ENVIRON International Corporation, Atlanta, GA and Samsung Austin Semiconductor, Austin, TX)

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Benefits of Third-Party Semiconductor Tool Installation Review and Verification Services Situation This presentation will outline the approach taken and benefits of third-party semiconductor manufacturing tool installation review and verification services. As part of semiconductor manufacturing operations, manufacturing equipment (tools) are periodically installed as capacity is increased or technology updated. Prior to use in the manufacturing process, newly installed tools are commonly commissioned by in-house personnel to verify proper operation. In addition to ensuring the tool operates per manufacturing specifications, the commissioning process may further involve inspecting the tool to ensure the health and safety of manufacturing employees is protected. Methods In an effort to promote occupational health and safety protection beyond a place of compliance into the realm of excellence, select semiconductor manufacturers have employed third-party tool installation review and verification services. Third-party tool inspections typically address a myriad of topics/components and often include: – Inspection of the physical tool installation (i.e. seismic restraint) – Examination of related support equipment installation (e.g., pumps, chillers, scrubbers) – Observation of chemical and gas supply lines/connections, including HazCom labeling – Inspection of utility and waste connections (e.g., drains and exhaust ducting) – Verification of emergency functions such as real-time toxic air monitoring, fire detection/suppression, systems, interlocks, and emergency power interruption – Review of tool related testing documentation (e.g., pressure testing of gas lines, leak testing of chemical lines/waste connections, and ionizing and non-ionizing radiation leak detection surveys) – Evaluation of relevant regulatory requirements (local, state, and federal), industry standards, and company expectations – Compilation of a list of items requiring correction prior tool operation. Results Benefits of third-party tool verification services, in addition to or in-lieu of in-house verification include: – An objective/outside review of tool installations – Technically competent and experienced personnel – Ensuring a thorough/comprehensive tool installation review focused solely on the protection of employee health and safety.

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